JPH0252828B2 - - Google Patents

Info

Publication number
JPH0252828B2
JPH0252828B2 JP56047106A JP4710681A JPH0252828B2 JP H0252828 B2 JPH0252828 B2 JP H0252828B2 JP 56047106 A JP56047106 A JP 56047106A JP 4710681 A JP4710681 A JP 4710681A JP H0252828 B2 JPH0252828 B2 JP H0252828B2
Authority
JP
Japan
Prior art keywords
electrode
electron beam
voltage
deceleration
secondary electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56047106A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57161556A (en
Inventor
Akio Ito
Yoshiaki Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56047106A priority Critical patent/JPS57161556A/ja
Publication of JPS57161556A publication Critical patent/JPS57161556A/ja
Publication of JPH0252828B2 publication Critical patent/JPH0252828B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Tests Of Electronic Circuits (AREA)
JP56047106A 1981-03-30 1981-03-30 Voltage measuring device using electron beam Granted JPS57161556A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56047106A JPS57161556A (en) 1981-03-30 1981-03-30 Voltage measuring device using electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56047106A JPS57161556A (en) 1981-03-30 1981-03-30 Voltage measuring device using electron beam

Publications (2)

Publication Number Publication Date
JPS57161556A JPS57161556A (en) 1982-10-05
JPH0252828B2 true JPH0252828B2 (cs) 1990-11-14

Family

ID=12765916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56047106A Granted JPS57161556A (en) 1981-03-30 1981-03-30 Voltage measuring device using electron beam

Country Status (1)

Country Link
JP (1) JPS57161556A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2578744B2 (ja) * 1984-09-03 1997-02-05 日本電気株式会社 電子ビ−ム測定装置

Also Published As

Publication number Publication date
JPS57161556A (en) 1982-10-05

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