JPH0252801B2 - - Google Patents

Info

Publication number
JPH0252801B2
JPH0252801B2 JP12666081A JP12666081A JPH0252801B2 JP H0252801 B2 JPH0252801 B2 JP H0252801B2 JP 12666081 A JP12666081 A JP 12666081A JP 12666081 A JP12666081 A JP 12666081A JP H0252801 B2 JPH0252801 B2 JP H0252801B2
Authority
JP
Japan
Prior art keywords
sample
mirror
deformation
concave
interference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12666081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5828606A (ja
Inventor
Tetsuo Kumazawa
Tatsuji Sakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12666081A priority Critical patent/JPS5828606A/ja
Publication of JPS5828606A publication Critical patent/JPS5828606A/ja
Publication of JPH0252801B2 publication Critical patent/JPH0252801B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP12666081A 1981-08-14 1981-08-14 微小変形測定方法 Granted JPS5828606A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12666081A JPS5828606A (ja) 1981-08-14 1981-08-14 微小変形測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12666081A JPS5828606A (ja) 1981-08-14 1981-08-14 微小変形測定方法

Publications (2)

Publication Number Publication Date
JPS5828606A JPS5828606A (ja) 1983-02-19
JPH0252801B2 true JPH0252801B2 (enExample) 1990-11-14

Family

ID=14940710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12666081A Granted JPS5828606A (ja) 1981-08-14 1981-08-14 微小変形測定方法

Country Status (1)

Country Link
JP (1) JPS5828606A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0542201U (ja) * 1991-11-08 1993-06-08 トーア・スチール株式会社 折り畳み式ごみ箱

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8401649A (nl) * 1984-05-23 1985-12-16 Optische Ind De Oude Delft Nv Meetstelsel voor het, onder gebruikmaking van een op driehoeksmeting berustend principe, contactloos meten van de afstand tussen een bepaald punt van een objectvlak en een referentieniveau.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0542201U (ja) * 1991-11-08 1993-06-08 トーア・スチール株式会社 折り畳み式ごみ箱

Also Published As

Publication number Publication date
JPS5828606A (ja) 1983-02-19

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