JPH025241B2 - - Google Patents
Info
- Publication number
- JPH025241B2 JPH025241B2 JP21334483A JP21334483A JPH025241B2 JP H025241 B2 JPH025241 B2 JP H025241B2 JP 21334483 A JP21334483 A JP 21334483A JP 21334483 A JP21334483 A JP 21334483A JP H025241 B2 JPH025241 B2 JP H025241B2
- Authority
- JP
- Japan
- Prior art keywords
- light beam
- movable
- reflector
- incident
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000004907 flux Effects 0.000 description 14
- 230000003287 optical effect Effects 0.000 description 6
- 230000004075 alteration Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 2
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Mechanical Optical Scanning Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21334483A JPS60105903A (ja) | 1983-11-15 | 1983-11-15 | 平行光束走査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21334483A JPS60105903A (ja) | 1983-11-15 | 1983-11-15 | 平行光束走査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60105903A JPS60105903A (ja) | 1985-06-11 |
JPH025241B2 true JPH025241B2 (fr) | 1990-02-01 |
Family
ID=16637598
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21334483A Granted JPS60105903A (ja) | 1983-11-15 | 1983-11-15 | 平行光束走査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60105903A (fr) |
-
1983
- 1983-11-15 JP JP21334483A patent/JPS60105903A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS60105903A (ja) | 1985-06-11 |
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