JPH0252326U - - Google Patents
Info
- Publication number
- JPH0252326U JPH0252326U JP12959088U JP12959088U JPH0252326U JP H0252326 U JPH0252326 U JP H0252326U JP 12959088 U JP12959088 U JP 12959088U JP 12959088 U JP12959088 U JP 12959088U JP H0252326 U JPH0252326 U JP H0252326U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- sealing means
- pattern
- reduction lens
- reticle mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000005286 illumination Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000006837 decompression Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12959088U JPH0252326U (th) | 1988-10-04 | 1988-10-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12959088U JPH0252326U (th) | 1988-10-04 | 1988-10-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252326U true JPH0252326U (th) | 1990-04-16 |
Family
ID=31384007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12959088U Pending JPH0252326U (th) | 1988-10-04 | 1988-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252326U (th) |
-
1988
- 1988-10-04 JP JP12959088U patent/JPH0252326U/ja active Pending
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