JPH0252254U - - Google Patents
Info
- Publication number
- JPH0252254U JPH0252254U JP13246888U JP13246888U JPH0252254U JP H0252254 U JPH0252254 U JP H0252254U JP 13246888 U JP13246888 U JP 13246888U JP 13246888 U JP13246888 U JP 13246888U JP H0252254 U JPH0252254 U JP H0252254U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- microwave
- source chamber
- microwaves
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000498 cooling water Substances 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13246888U JPH0252254U (th) | 1988-10-11 | 1988-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13246888U JPH0252254U (th) | 1988-10-11 | 1988-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252254U true JPH0252254U (th) | 1990-04-16 |
Family
ID=31389456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13246888U Pending JPH0252254U (th) | 1988-10-11 | 1988-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252254U (th) |
-
1988
- 1988-10-11 JP JP13246888U patent/JPH0252254U/ja active Pending
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