JPH0250626B2 - - Google Patents
Info
- Publication number
- JPH0250626B2 JPH0250626B2 JP57022530A JP2253082A JPH0250626B2 JP H0250626 B2 JPH0250626 B2 JP H0250626B2 JP 57022530 A JP57022530 A JP 57022530A JP 2253082 A JP2253082 A JP 2253082A JP H0250626 B2 JPH0250626 B2 JP H0250626B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- lattice
- contact holes
- active element
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 238000009429 electrical wiring Methods 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 14
- 229910052782 aluminium Inorganic materials 0.000 description 14
- 238000010586 diagram Methods 0.000 description 4
- 230000010354 integration Effects 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Geometry or layout of the interconnection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57022530A JPS58139445A (ja) | 1982-02-15 | 1982-02-15 | 半導体集積回路装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57022530A JPS58139445A (ja) | 1982-02-15 | 1982-02-15 | 半導体集積回路装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58139445A JPS58139445A (ja) | 1983-08-18 |
JPH0250626B2 true JPH0250626B2 (it) | 1990-11-02 |
Family
ID=12085346
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57022530A Granted JPS58139445A (ja) | 1982-02-15 | 1982-02-15 | 半導体集積回路装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58139445A (it) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6047440A (ja) * | 1983-08-26 | 1985-03-14 | Fujitsu Ltd | 半導体集積回路 |
JPS6119146A (ja) * | 1984-07-06 | 1986-01-28 | Nec Corp | Cmos集積回路 |
JPH0644593B2 (ja) * | 1984-11-09 | 1994-06-08 | 株式会社東芝 | 半導体集積回路装置 |
US5168342A (en) * | 1989-01-30 | 1992-12-01 | Hitachi, Ltd. | Semiconductor integrated circuit device and manufacturing method of the same |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5028796A (it) * | 1973-04-30 | 1975-03-24 | ||
JPS5483787A (en) * | 1977-12-16 | 1979-07-04 | Fujitsu Ltd | Master slice semiconductor device |
JPS56108242A (en) * | 1980-01-31 | 1981-08-27 | Nec Corp | Master slice semiconductor device |
JPS57112062A (en) * | 1980-12-05 | 1982-07-12 | Cii | High density integrated circuit device |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6422734A (en) * | 1987-07-17 | 1989-01-25 | Fujitsu Ltd | Paper feed cassette for facsimile |
JPH0689026B2 (ja) * | 1987-08-06 | 1994-11-09 | 帝人株式会社 | メソトレキセート誘導体およびその製造方法 |
-
1982
- 1982-02-15 JP JP57022530A patent/JPS58139445A/ja active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5028796A (it) * | 1973-04-30 | 1975-03-24 | ||
JPS5483787A (en) * | 1977-12-16 | 1979-07-04 | Fujitsu Ltd | Master slice semiconductor device |
JPS56108242A (en) * | 1980-01-31 | 1981-08-27 | Nec Corp | Master slice semiconductor device |
JPS57112062A (en) * | 1980-12-05 | 1982-07-12 | Cii | High density integrated circuit device |
Also Published As
Publication number | Publication date |
---|---|
JPS58139445A (ja) | 1983-08-18 |
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