JPH025022U - - Google Patents

Info

Publication number
JPH025022U
JPH025022U JP8309688U JP8309688U JPH025022U JP H025022 U JPH025022 U JP H025022U JP 8309688 U JP8309688 U JP 8309688U JP 8309688 U JP8309688 U JP 8309688U JP H025022 U JPH025022 U JP H025022U
Authority
JP
Japan
Prior art keywords
detecting
mask
light
displacement
sent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8309688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8309688U priority Critical patent/JPH025022U/ja
Publication of JPH025022U publication Critical patent/JPH025022U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
JP8309688U 1988-06-23 1988-06-23 Pending JPH025022U (US06623731-20030923-C00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8309688U JPH025022U (US06623731-20030923-C00012.png) 1988-06-23 1988-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8309688U JPH025022U (US06623731-20030923-C00012.png) 1988-06-23 1988-06-23

Publications (1)

Publication Number Publication Date
JPH025022U true JPH025022U (US06623731-20030923-C00012.png) 1990-01-12

Family

ID=31307820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8309688U Pending JPH025022U (US06623731-20030923-C00012.png) 1988-06-23 1988-06-23

Country Status (1)

Country Link
JP (1) JPH025022U (US06623731-20030923-C00012.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004053605A (ja) * 2002-07-16 2004-02-19 Mitsutoyo Corp 光ファイバ受信器チャネルを使用した回折格子エンコーダ及び変位測定装置
JP2005070053A (ja) * 2003-08-27 2005-03-17 Mitsutoyo Corp 変位測定装置
JP2005106827A (ja) * 2003-09-30 2005-04-21 Mitsutoyo Corp 変位測定装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004053605A (ja) * 2002-07-16 2004-02-19 Mitsutoyo Corp 光ファイバ受信器チャネルを使用した回折格子エンコーダ及び変位測定装置
JP4493944B2 (ja) * 2002-07-16 2010-06-30 株式会社ミツトヨ 光ファイバ受信器チャネルを使用した回折格子エンコーダ及び変位測定装置
JP2005070053A (ja) * 2003-08-27 2005-03-17 Mitsutoyo Corp 変位測定装置
JP4516381B2 (ja) * 2003-08-27 2010-08-04 株式会社ミツトヨ 変位測定装置
JP2005106827A (ja) * 2003-09-30 2005-04-21 Mitsutoyo Corp 変位測定装置
JP4608274B2 (ja) * 2003-09-30 2011-01-12 株式会社ミツトヨ 変位測定装置

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