JPH0249722Y2 - - Google Patents
Info
- Publication number
- JPH0249722Y2 JPH0249722Y2 JP5338886U JP5338886U JPH0249722Y2 JP H0249722 Y2 JPH0249722 Y2 JP H0249722Y2 JP 5338886 U JP5338886 U JP 5338886U JP 5338886 U JP5338886 U JP 5338886U JP H0249722 Y2 JPH0249722 Y2 JP H0249722Y2
- Authority
- JP
- Japan
- Prior art keywords
- smif
- vehicle
- semiconductor
- semiconductor manufacturing
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 119
- 101000873785 Homo sapiens mRNA-decapping enzyme 1A Proteins 0.000 claims description 116
- 102100035856 mRNA-decapping enzyme 1A Human genes 0.000 claims description 116
- 238000004519 manufacturing process Methods 0.000 claims description 65
- 235000012431 wafers Nutrition 0.000 claims description 61
- 230000003749 cleanliness Effects 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 230000002093 peripheral effect Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5338886U JPH0249722Y2 (fr) | 1986-04-09 | 1986-04-09 | |
US07/018,993 US4826360A (en) | 1986-03-10 | 1987-02-25 | Transfer system in a clean room |
EP87301888A EP0239266A3 (fr) | 1986-03-10 | 1987-03-04 | Système de transfert dans une chambre propre |
CA000531391A CA1271271A (fr) | 1986-03-10 | 1987-03-06 | Transport de puces a semiconducteurs dans une salle blanche |
KR870002102A KR870009446A (ko) | 1986-03-10 | 1987-03-09 | 크린룸 내의 이송 시스템 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5338886U JPH0249722Y2 (fr) | 1986-04-09 | 1986-04-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62163951U JPS62163951U (fr) | 1987-10-17 |
JPH0249722Y2 true JPH0249722Y2 (fr) | 1990-12-27 |
Family
ID=30879406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5338886U Expired JPH0249722Y2 (fr) | 1986-03-10 | 1986-04-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0249722Y2 (fr) |
-
1986
- 1986-04-09 JP JP5338886U patent/JPH0249722Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS62163951U (fr) | 1987-10-17 |
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