JPH0248365B2 - - Google Patents

Info

Publication number
JPH0248365B2
JPH0248365B2 JP62165947A JP16594787A JPH0248365B2 JP H0248365 B2 JPH0248365 B2 JP H0248365B2 JP 62165947 A JP62165947 A JP 62165947A JP 16594787 A JP16594787 A JP 16594787A JP H0248365 B2 JPH0248365 B2 JP H0248365B2
Authority
JP
Japan
Prior art keywords
chuck
sliding member
piston
fixing
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62165947A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6411702A (en
Inventor
Toshihiro Nakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TEIKOKU CHATSUKU KK
Original Assignee
TEIKOKU CHATSUKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TEIKOKU CHATSUKU KK filed Critical TEIKOKU CHATSUKU KK
Priority to JP16594787A priority Critical patent/JPS6411702A/ja
Publication of JPS6411702A publication Critical patent/JPS6411702A/ja
Publication of JPH0248365B2 publication Critical patent/JPH0248365B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gripping On Spindles (AREA)
JP16594787A 1987-07-02 1987-07-02 Automatic eccentric shaft Granted JPS6411702A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16594787A JPS6411702A (en) 1987-07-02 1987-07-02 Automatic eccentric shaft

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16594787A JPS6411702A (en) 1987-07-02 1987-07-02 Automatic eccentric shaft

Publications (2)

Publication Number Publication Date
JPS6411702A JPS6411702A (en) 1989-01-17
JPH0248365B2 true JPH0248365B2 (enrdf_load_stackoverflow) 1990-10-24

Family

ID=15822041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16594787A Granted JPS6411702A (en) 1987-07-02 1987-07-02 Automatic eccentric shaft

Country Status (1)

Country Link
JP (1) JPS6411702A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2541141Y2 (ja) * 1990-12-28 1997-07-09 神鋼電機株式会社 半導体製造装置におけるウェハ−の移載装置の取付け構造

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4871010A (enrdf_load_stackoverflow) * 1971-12-28 1973-09-26
JPS5143277A (ja) * 1974-10-11 1976-04-13 Myano Tekkosho Kk Henshinchatsuku

Also Published As

Publication number Publication date
JPS6411702A (en) 1989-01-17

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