JPH0247045U - - Google Patents
Info
- Publication number
- JPH0247045U JPH0247045U JP12600988U JP12600988U JPH0247045U JP H0247045 U JPH0247045 U JP H0247045U JP 12600988 U JP12600988 U JP 12600988U JP 12600988 U JP12600988 U JP 12600988U JP H0247045 U JPH0247045 U JP H0247045U
- Authority
- JP
- Japan
- Prior art keywords
- horizontal
- view
- section
- manufacturing equipment
- arm part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 28
- 235000012431 wafers Nutrition 0.000 claims description 27
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Landscapes
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12600988U JPH0247045U (fr) | 1988-09-27 | 1988-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12600988U JPH0247045U (fr) | 1988-09-27 | 1988-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0247045U true JPH0247045U (fr) | 1990-03-30 |
Family
ID=31377129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12600988U Pending JPH0247045U (fr) | 1988-09-27 | 1988-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0247045U (fr) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08288358A (ja) * | 1995-04-20 | 1996-11-01 | Rohm Co Ltd | 半導体基板入りマガジンのクランプ搬送装置 |
| JPH11222121A (ja) * | 1997-07-10 | 1999-08-17 | Shinko Electric Co Ltd | 無人搬送車 |
| JP2000003894A (ja) * | 1999-05-10 | 2000-01-07 | Tokyo Electron Ltd | 洗浄装置及びその方法 |
| JP2002362737A (ja) * | 2001-06-07 | 2002-12-18 | Semiconductor Leading Edge Technologies Inc | マスク搬送装置、マスク搬送システム及びマスク搬送方法 |
| JP2006240884A (ja) * | 2005-03-03 | 2006-09-14 | Keuro Besitz Gmbh & Co Edv Dienstleistungs Kg | 長尺物品用荷役装置 |
| WO2018146740A1 (fr) * | 2017-02-08 | 2018-08-16 | 株式会社Ｆｕｊｉ | Engin de chantier |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62198113A (ja) * | 1986-02-26 | 1987-09-01 | Shimizu Constr Co Ltd | ウエハの自動移送装置 |
-
1988
- 1988-09-27 JP JP12600988U patent/JPH0247045U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62198113A (ja) * | 1986-02-26 | 1987-09-01 | Shimizu Constr Co Ltd | ウエハの自動移送装置 |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08288358A (ja) * | 1995-04-20 | 1996-11-01 | Rohm Co Ltd | 半導体基板入りマガジンのクランプ搬送装置 |
| JPH11222121A (ja) * | 1997-07-10 | 1999-08-17 | Shinko Electric Co Ltd | 無人搬送車 |
| JP2000003894A (ja) * | 1999-05-10 | 2000-01-07 | Tokyo Electron Ltd | 洗浄装置及びその方法 |
| JP2002362737A (ja) * | 2001-06-07 | 2002-12-18 | Semiconductor Leading Edge Technologies Inc | マスク搬送装置、マスク搬送システム及びマスク搬送方法 |
| JP2006240884A (ja) * | 2005-03-03 | 2006-09-14 | Keuro Besitz Gmbh & Co Edv Dienstleistungs Kg | 長尺物品用荷役装置 |
| WO2018146740A1 (fr) * | 2017-02-08 | 2018-08-16 | 株式会社Ｆｕｊｉ | Engin de chantier |
| CN110248777A (zh) * | 2017-02-08 | 2019-09-17 | 株式会社富士 | 作业机 |
| JPWO2018146740A1 (ja) * | 2017-02-08 | 2019-11-07 | 株式会社Ｆｕｊｉ | 作業機 |
| CN110248777B (zh) * | 2017-02-08 | 2022-09-16 | 株式会社富士 | 作业机 |