JPH0246893B2 - - Google Patents
Info
- Publication number
- JPH0246893B2 JPH0246893B2 JP59202874A JP20287484A JPH0246893B2 JP H0246893 B2 JPH0246893 B2 JP H0246893B2 JP 59202874 A JP59202874 A JP 59202874A JP 20287484 A JP20287484 A JP 20287484A JP H0246893 B2 JPH0246893 B2 JP H0246893B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- support
- rotating part
- attached
- stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 16
- 239000002245 particle Substances 0.000 claims description 12
- 238000001004 secondary ion mass spectrometry Methods 0.000 claims description 8
- 238000004458 analytical method Methods 0.000 claims description 4
- 238000007689 inspection Methods 0.000 claims 1
- 239000000523 sample Substances 0.000 description 62
- 150000002500 ions Chemical class 0.000 description 12
- 238000005259 measurement Methods 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000538 analytical sample Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052729 chemical element Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000013214 routine measurement Methods 0.000 description 1
- 238000005464 sample preparation method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000009958 sewing Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0409—Sample holders or containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19833335581 DE3335581A1 (de) | 1983-09-30 | 1983-09-30 | Probenhalterung fuer sekundaerionen-massenspektrometrie und andere empfindliche teilchenstrahl-analysenmethoden und verfahren zu ihrem betrieb |
DE3335581.9 | 1983-09-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6093948A JPS6093948A (ja) | 1985-05-25 |
JPH0246893B2 true JPH0246893B2 (US08063081-20111122-C00102.png) | 1990-10-17 |
Family
ID=6210615
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59202874A Granted JPS6093948A (ja) | 1983-09-30 | 1984-09-27 | 二次イオン質量分析用の試料台 |
Country Status (4)
Country | Link |
---|---|
US (1) | US4851672A (US08063081-20111122-C00102.png) |
EP (1) | EP0136610A3 (US08063081-20111122-C00102.png) |
JP (1) | JPS6093948A (US08063081-20111122-C00102.png) |
DE (2) | DE3335581A1 (US08063081-20111122-C00102.png) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4719349A (en) * | 1986-05-27 | 1988-01-12 | The United States Of America As Represented By The Department Of Health And Human Services | Electrochemical sample probe for use in fast-atom bombardment mass spectrometry |
EP0268434B1 (en) * | 1986-11-15 | 1991-04-03 | The British Petroleum Company p.l.c. | Transport detector system |
DE10112387B4 (de) | 2001-03-15 | 2004-03-25 | Bruker Daltonik Gmbh | Massenspektrometrische Genotypisierung |
US20080035389A1 (en) * | 2006-08-11 | 2008-02-14 | Hall David R | Roof Mining Drill Bit |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1226228B (de) * | 1959-07-24 | 1966-10-06 | Max Planck Gesellschaft | Bewegbarer Praeparattisch fuer einen Korpus-kularstrahlapparat, insbesondere Elektronen-mikroskop oder Elektronenbeugungsgeraet |
DE1789019B1 (de) * | 1968-09-23 | 1972-04-27 | Siemens Ag | Verfahren zur erzeugung eines stereobildes mittels der elektronenstrahlmikroskopie |
US3911282A (en) * | 1973-11-01 | 1975-10-07 | Dresser Ind | Axial ion beam accelerator tube having a wobbled target |
US4110625A (en) * | 1976-12-20 | 1978-08-29 | International Business Machines Corporation | Method and apparatus for monitoring the dose of ion implanted into a target by counting emitted X-rays |
DE3128814A1 (de) * | 1981-07-21 | 1983-02-10 | Siemens AG, 1000 Berlin und 8000 München | Elektrisch leitende probenhalterung fuer die analysentechnik der sekundaerionen-massenspektrometrie |
US4405864A (en) * | 1981-09-08 | 1983-09-20 | Rca Corporation | Ion implanter end processing station |
FR2529383A1 (fr) * | 1982-06-24 | 1983-12-30 | Commissariat Energie Atomique | Porte-cible a balayage mecanique utilisable notamment pour l'implantation d'ioris |
-
1983
- 1983-09-30 DE DE19833335581 patent/DE3335581A1/de not_active Withdrawn
- 1983-09-30 DE DE8328167U patent/DE8328167U1/de not_active Expired
-
1984
- 1984-08-20 US US06/642,396 patent/US4851672A/en not_active Expired - Fee Related
- 1984-09-14 EP EP84111011A patent/EP0136610A3/de not_active Ceased
- 1984-09-27 JP JP59202874A patent/JPS6093948A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
DE3335581A1 (de) | 1985-04-18 |
JPS6093948A (ja) | 1985-05-25 |
US4851672A (en) | 1989-07-25 |
EP0136610A2 (de) | 1985-04-10 |
EP0136610A3 (de) | 1986-08-13 |
DE8328167U1 (de) | 1986-04-10 |
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