JPH0246053Y2 - - Google Patents
Info
- Publication number
- JPH0246053Y2 JPH0246053Y2 JP18375683U JP18375683U JPH0246053Y2 JP H0246053 Y2 JPH0246053 Y2 JP H0246053Y2 JP 18375683 U JP18375683 U JP 18375683U JP 18375683 U JP18375683 U JP 18375683U JP H0246053 Y2 JPH0246053 Y2 JP H0246053Y2
- Authority
- JP
- Japan
- Prior art keywords
- holding plate
- semiconductor substrate
- substrate
- fixing jig
- epitaxial growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 46
- 239000007791 liquid phase Substances 0.000 claims description 9
- 238000003780 insertion Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 4
- 230000004308 accommodation Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 description 33
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000003708 ampul Substances 0.000 description 9
- 239000010453 quartz Substances 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18375683U JPS6092823U (ja) | 1983-11-30 | 1983-11-30 | 液相エピタキシヤル成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18375683U JPS6092823U (ja) | 1983-11-30 | 1983-11-30 | 液相エピタキシヤル成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6092823U JPS6092823U (ja) | 1985-06-25 |
| JPH0246053Y2 true JPH0246053Y2 (en)van) | 1990-12-05 |
Family
ID=30397615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18375683U Granted JPS6092823U (ja) | 1983-11-30 | 1983-11-30 | 液相エピタキシヤル成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6092823U (en)van) |
-
1983
- 1983-11-30 JP JP18375683U patent/JPS6092823U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6092823U (ja) | 1985-06-25 |
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