JPH0245423U - - Google Patents
Info
- Publication number
- JPH0245423U JPH0245423U JP12334688U JP12334688U JPH0245423U JP H0245423 U JPH0245423 U JP H0245423U JP 12334688 U JP12334688 U JP 12334688U JP 12334688 U JP12334688 U JP 12334688U JP H0245423 U JPH0245423 U JP H0245423U
- Authority
- JP
- Japan
- Prior art keywords
- pump
- flow rate
- detecting
- rate detection
- freed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12334688U JPH0725632Y2 (ja) | 1988-09-20 | 1988-09-20 | 真空排気系の流量検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12334688U JPH0725632Y2 (ja) | 1988-09-20 | 1988-09-20 | 真空排気系の流量検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0245423U true JPH0245423U (enExample) | 1990-03-28 |
| JPH0725632Y2 JPH0725632Y2 (ja) | 1995-06-07 |
Family
ID=31372112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12334688U Expired - Lifetime JPH0725632Y2 (ja) | 1988-09-20 | 1988-09-20 | 真空排気系の流量検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0725632Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013209928A (ja) * | 2012-03-30 | 2013-10-10 | Ebara Corp | 真空排気装置 |
-
1988
- 1988-09-20 JP JP12334688U patent/JPH0725632Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013209928A (ja) * | 2012-03-30 | 2013-10-10 | Ebara Corp | 真空排気装置 |
| JP2016205405A (ja) * | 2012-03-30 | 2016-12-08 | 株式会社荏原製作所 | 真空排気装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0725632Y2 (ja) | 1995-06-07 |
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