JPH0244523Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to an amorphous semiconductor solar cell having multiple functions.

Solar cells are often damaged by surge voltages such as static electricity, so to prevent this, it is conceivable to connect a capacitor in parallel with the solar cell. Since such a capacitor is required, the capacitor becomes large, and a lead wire is required to connect both elements, resulting in a lack of reliability and an increase in the number of man-hours.

In FIGS. 1 and 2, a is a glass substrate, and the solar cell is formed by depositing transparent electrodes b, b, a semiconductor layer c, and a back electrode d on the glass substrate a. The capacitor is formed by depositing a tantalum thin film e on a glass substrate a, a dielectric layer f formed by oxidizing the thin film e by anodizing method, and an electrode layer g made of chromium or the like. .

The purpose of the present invention is to solve the above-mentioned disadvantages, and it is based on a substrate 2 made of a metal such as tantalum, on which an oxide film 1 is formed on both principal surfaces except for a part of one principal surface. On the one main surface, a back electrode layer 3,
At least one layer consisting of a semiconductor layer 4 and a transparent electrode layer 5
A solar cell 7 is formed in which one back electrode layer 3 is adhered to an area including a part of the first main surface, and a conductive layer as a capacitor electrode is formed on the other main surface. 8 is formed, and the conductive layer 8 and the transparent electrode 5 are connected to each other by a connecting conductor 9.

Embodiments of the present invention will be described below with reference to the drawings.

To make the solar cell of the present invention, first, a resin mask 10 is applied to a part of the main surface of a substrate 2 made of metal such as tantalum or aluminum, and a dielectric layer with a thickness of 400 to 2000 Å is formed by anodizing. An oxide film 1 was formed on both main surfaces other than the resin mask 10 as shown in the third figure.

Next, the resin mask 10 is removed and the mask 9 is removed.
an area including a part of the substrate 2 exposed by removing it;
As shown in FIG. 4, a back electrode layer 3 made of aluminum or the like was deposited at two other locations on the same main surface to a thickness of 5,000 Å to 20,000 Å by vacuum evaporation or electron beam evaporation. Thereafter, as shown in FIG. 5, a p-layer, an i-layer, an n-layer or an n-layer is formed on the back electrode layer 3 by glow discharge decomposition using silane gas as the main raw material and phosphine and diborane as doping gases.
An amorphous semiconductor layer 4 such as amorphous silicon is formed in the order of an i-layer and a p-layer, and tin oxide, indium oxide, or indium tin oxide is further applied on top of the layer by a spray method, an electron beam evaporation method, or a sputtering method. Applied film thickness 300~10000Å, sheet resistance 10Ω/mouth ~200
A transparent electrode layer 5 of Ω/hole was formed, and if necessary, a protective film (not shown) was formed on the transparent electrode layer 5 and the oxide film 1. Thus, a solar cell 7 having two battery elements 6, 6 connected in series is formed on one main surface of the substrate 2.

Further, on the other main surface of the substrate 2, a conductive layer 8 made of aluminum or the like is deposited to a thickness of, for example, 1000 Å or more by vacuum evaporation or the like.
It was formed with a film thickness of 2000 Å. This conductive layer 8 is connected to the substrate 2
serves as one electrode and the other electrode of a capacitor having oxide film 1 as a dielectric layer.

The transparent electrode layer 5, which is one pole on the left side of the diagram of the solar cell 7, and the conductive layer 8, which is the electrode of the capacitor, are connected to a U-shaped external connection terminal fitting to which a connecting conductor 9, for example, a lead wire 11 can be soldered. The connection was made by clipping elastically onto 2.

In FIG. 5, reference numeral 12 denotes a U-shaped external connection terminal fitting that presses against a part of the external lead-out electrode of the back electrode layer 3 and the oxide film 1 of the capacitor, and by soldering to this, the lead wire 11 can be connected to the solar cell. 7
It is derived from one pole on the right side of the figure. According to the above configuration, one pole on the right side of the solar cell 7 in the figure is in contact with the substrate 2 which is one pole of the capacitor, and one pole on the left side in the figure is connected to the conductive layer 8 of the capacitor by the connecting conductor 9. Therefore, the solar cell 7 and the capacitor are connected in parallel. Thus, if sunlight shines from the top of the figure as shown by the arrow, the lead wires 11, 11
Super power is output, and even if surge voltage such as static electricity is input from the outside, it is absorbed by the capacitor, so the solar cell will not be damaged, and stable output characteristics can be obtained even if the incident light fluctuates. .

In this way, according to the present invention, a solar cell is formed on one main surface of the substrate 2, a capacitor with the substrate 2 as one electrode is formed on the other main surface, and one back electrode layer 3 of the solar electrode is formed. Since it is formed so as to be in direct contact with the substrate 2, a solar cell having multiple functions can be formed in a small size, the reliability of the connection is improved, and costs are reduced due to a reduction in the number of man-hours.

[Brief explanation of the drawing]

Figure 1 is a side view of a conventional single-function solar cell, Figure 2 is a side view of a capacitor, Figures 3 and 4 are plan views showing the manufacturing process of the solar cell of the present invention, and Figure 5 is a side view of a conventional single-function solar cell. 1 shows a side view of one embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Oxide film, 2... Substrate, 3... Back electrode layer, 4... Semiconductor layer, 5... Transparent electrode layer, 6...
Battery element, 7... Solar cell, 8... Conductive layer, 9... Connection conductor.

Claims (1)

[Scope of utility model registration request] A back electrode layer 3, a semiconductor layer 4, and a transparent electrode layer 5 are formed on one main surface of a substrate 2 made of a metal such as tantalum, on which an oxide film 1 is formed on both main surfaces except for a part of one main surface. A solar cell 7 is formed which has at least one battery element 6 and whose one back electrode 3 is deposited in an area including a part of the one main surface, and has a capacitor electrode on the other main surface. An amorphous semiconductor solar cell in which a conductive layer 8 is formed, and the conductive layer 8 and the transparent electrode 5 are connected to each other by a connecting conductor 9.