JPH0244056B2 - KANKOSEIJUSHISOSEIBUTSU - Google Patents
KANKOSEIJUSHISOSEIBUTSUInfo
- Publication number
- JPH0244056B2 JPH0244056B2 JP11545883A JP11545883A JPH0244056B2 JP H0244056 B2 JPH0244056 B2 JP H0244056B2 JP 11545883 A JP11545883 A JP 11545883A JP 11545883 A JP11545883 A JP 11545883A JP H0244056 B2 JPH0244056 B2 JP H0244056B2
- Authority
- JP
- Japan
- Prior art keywords
- compound
- parts
- photosensitive resin
- resin composition
- formula
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000001875 compounds Chemical class 0.000 claims description 34
- 239000011342 resin composition Substances 0.000 claims description 32
- -1 urethane diacrylate compound Chemical class 0.000 claims description 14
- 125000003700 epoxy group Chemical group 0.000 claims description 10
- VZXPHDGHQXLXJC-UHFFFAOYSA-N 1,6-diisocyanato-5,6-dimethylheptane Chemical compound O=C=NC(C)(C)C(C)CCCCN=C=O VZXPHDGHQXLXJC-UHFFFAOYSA-N 0.000 claims description 9
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 claims description 6
- 125000004122 cyclic group Chemical group 0.000 claims description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 4
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 3
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 claims description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 3
- 125000002947 alkylene group Chemical group 0.000 claims description 3
- 229910052801 chlorine Inorganic materials 0.000 claims description 3
- 125000001309 chloro group Chemical group Cl* 0.000 claims description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 3
- 125000004432 carbon atom Chemical group C* 0.000 claims description 2
- 239000010408 film Substances 0.000 description 26
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 12
- 229940095095 2-hydroxyethyl acrylate Drugs 0.000 description 11
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 11
- 239000003822 epoxy resin Substances 0.000 description 11
- 229920000647 polyepoxide Polymers 0.000 description 11
- 230000001681 protective effect Effects 0.000 description 11
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 9
- 239000000376 reactant Substances 0.000 description 9
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 8
- 239000010410 layer Substances 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 6
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 6
- 239000012965 benzophenone Substances 0.000 description 6
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 6
- 239000011253 protective coating Substances 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 5
- 238000009472 formulation Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 5
- 229940044192 2-hydroxyethyl methacrylate Drugs 0.000 description 4
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 4
- 238000010292 electrical insulation Methods 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- ROVRRJSRRSGUOL-UHFFFAOYSA-N victoria blue bo Chemical compound [Cl-].C12=CC=CC=C2C(NCC)=CC=C1C(C=1C=CC(=CC=1)N(CC)CC)=C1C=CC(=[N+](CC)CC)C=C1 ROVRRJSRRSGUOL-UHFFFAOYSA-N 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 3
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 125000005442 diisocyanate group Chemical group 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920003986 novolac Polymers 0.000 description 3
- 229920002601 oligoester Polymers 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
- 150000003254 radicals Chemical class 0.000 description 3
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 2
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 2
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 2
- VHSHLMUCYSAUQU-UHFFFAOYSA-N 2-hydroxypropyl methacrylate Chemical compound CC(O)COC(=O)C(C)=C VHSHLMUCYSAUQU-UHFFFAOYSA-N 0.000 description 2
- GWZMWHWAWHPNHN-UHFFFAOYSA-N 2-hydroxypropyl prop-2-enoate Chemical compound CC(O)COC(=O)C=C GWZMWHWAWHPNHN-UHFFFAOYSA-N 0.000 description 2
- 229920003319 Araldite® Polymers 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- 239000005058 Isophorone diisocyanate Substances 0.000 description 2
- 241000233805 Phoenix Species 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 150000008065 acid anhydrides Chemical class 0.000 description 2
- 150000008064 anhydrides Chemical class 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 239000013039 cover film Substances 0.000 description 2
- 238000002845 discoloration Methods 0.000 description 2
- MKVYSRNJLWTVIK-UHFFFAOYSA-N ethyl carbamate;2-methylprop-2-enoic acid Chemical class CCOC(N)=O.CC(=C)C(O)=O.CC(=C)C(O)=O MKVYSRNJLWTVIK-UHFFFAOYSA-N 0.000 description 2
- JZMPIUODFXBXSC-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical class OC(=O)C=C.OC(=O)C=C.CCOC(N)=O JZMPIUODFXBXSC-UHFFFAOYSA-N 0.000 description 2
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 125000005395 methacrylic acid group Chemical group 0.000 description 2
- NUKZAGXMHTUAFE-UHFFFAOYSA-N methyl hexanoate Chemical compound CCCCCC(=O)OC NUKZAGXMHTUAFE-UHFFFAOYSA-N 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 150000005846 sugar alcohols Polymers 0.000 description 2
- JHPBZFOKBAGZBL-UHFFFAOYSA-N (3-hydroxy-2,2,4-trimethylpentyl) 2-methylprop-2-enoate Chemical compound CC(C)C(O)C(C)(C)COC(=O)C(C)=C JHPBZFOKBAGZBL-UHFFFAOYSA-N 0.000 description 1
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 1
- XHXSXTIIDBZEKB-UHFFFAOYSA-N 1,2,3,4,5,6,7,8-octamethylanthracene-9,10-dione Chemical compound CC1=C(C)C(C)=C2C(=O)C3=C(C)C(C)=C(C)C(C)=C3C(=O)C2=C1C XHXSXTIIDBZEKB-UHFFFAOYSA-N 0.000 description 1
- 229940058015 1,3-butylene glycol Drugs 0.000 description 1
- KWKAKUADMBZCLK-UHFFFAOYSA-N 1-octene Chemical group CCCCCCC=C KWKAKUADMBZCLK-UHFFFAOYSA-N 0.000 description 1
- SYENVBKSVVOOPS-UHFFFAOYSA-N 2,2-bis(hydroxymethyl)butyl prop-2-enoate Chemical compound CCC(CO)(CO)COC(=O)C=C SYENVBKSVVOOPS-UHFFFAOYSA-N 0.000 description 1
- PIZHFBODNLEQBL-UHFFFAOYSA-N 2,2-diethoxy-1-phenylethanone Chemical compound CCOC(OCC)C(=O)C1=CC=CC=C1 PIZHFBODNLEQBL-UHFFFAOYSA-N 0.000 description 1
- LZWVPGJPVCYAOC-UHFFFAOYSA-N 2,3-diphenylanthracene-9,10-dione Chemical compound C=1C=CC=CC=1C=1C=C2C(=O)C3=CC=CC=C3C(=O)C2=CC=1C1=CC=CC=C1 LZWVPGJPVCYAOC-UHFFFAOYSA-N 0.000 description 1
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 1
- DXEHULHXWHEJJD-UHFFFAOYSA-N 2-[(4-butylphenoxy)methyl]oxirane Chemical compound C1=CC(CCCC)=CC=C1OCC1OC1 DXEHULHXWHEJJD-UHFFFAOYSA-N 0.000 description 1
- CUFXMPWHOWYNSO-UHFFFAOYSA-N 2-[(4-methylphenoxy)methyl]oxirane Chemical compound C1=CC(C)=CC=C1OCC1OC1 CUFXMPWHOWYNSO-UHFFFAOYSA-N 0.000 description 1
- LCZVSXRMYJUNFX-UHFFFAOYSA-N 2-[2-(2-hydroxypropoxy)propoxy]propan-1-ol Chemical compound CC(O)COC(C)COC(C)CO LCZVSXRMYJUNFX-UHFFFAOYSA-N 0.000 description 1
- CKKQLOUBFINSIB-UHFFFAOYSA-N 2-hydroxy-1,2,2-triphenylethanone Chemical compound C=1C=CC=CC=1C(C=1C=CC=CC=1)(O)C(=O)C1=CC=CC=C1 CKKQLOUBFINSIB-UHFFFAOYSA-N 0.000 description 1
- YTPSFXZMJKMUJE-UHFFFAOYSA-N 2-tert-butylanthracene-9,10-dione Chemical compound C1=CC=C2C(=O)C3=CC(C(C)(C)C)=CC=C3C(=O)C2=C1 YTPSFXZMJKMUJE-UHFFFAOYSA-N 0.000 description 1
- VEORPZCZECFIRK-UHFFFAOYSA-N 3,3',5,5'-tetrabromobisphenol A Chemical compound C=1C(Br)=C(O)C(Br)=CC=1C(C)(C)C1=CC(Br)=C(O)C(Br)=C1 VEORPZCZECFIRK-UHFFFAOYSA-N 0.000 description 1
- GRWFFFOEIHGUBG-UHFFFAOYSA-N 3,4-Epoxy-6-methylcyclohexylmethyl-3,4-epoxy-6-methylcyclo-hexanecarboxylate Chemical compound C1C2OC2CC(C)C1C(=O)OCC1CC2OC2CC1C GRWFFFOEIHGUBG-UHFFFAOYSA-N 0.000 description 1
- OKJSFKIUVDXFMS-UHFFFAOYSA-N 4-[bis[4-(diethylamino)-2-methylphenyl]methyl]-n,n-diethyl-3-methylaniline Chemical compound CC1=CC(N(CC)CC)=CC=C1C(C=1C(=CC(=CC=1)N(CC)CC)C)C1=CC=C(N(CC)CC)C=C1C OKJSFKIUVDXFMS-UHFFFAOYSA-N 0.000 description 1
- OECTYKWYRCHAKR-UHFFFAOYSA-N 4-vinylcyclohexene dioxide Chemical compound C1OC1C1CC2OC2CC1 OECTYKWYRCHAKR-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- QSJXEFYPDANLFS-UHFFFAOYSA-N Diacetyl Chemical group CC(=O)C(C)=O QSJXEFYPDANLFS-UHFFFAOYSA-N 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical class C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- 239000005057 Hexamethylene diisocyanate Substances 0.000 description 1
- OAZWDJGLIYNYMU-UHFFFAOYSA-N Leucocrystal Violet Chemical compound C1=CC(N(C)C)=CC=C1C(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 OAZWDJGLIYNYMU-UHFFFAOYSA-N 0.000 description 1
- FQYUMYWMJTYZTK-UHFFFAOYSA-N Phenyl glycidyl ether Chemical compound C1OC1COC1=CC=CC=C1 FQYUMYWMJTYZTK-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical class CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- NEHMKBQYUWJMIP-UHFFFAOYSA-N anhydrous methyl chloride Natural products ClC NEHMKBQYUWJMIP-UHFFFAOYSA-N 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 150000008365 aromatic ketones Chemical class 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- JMSRBKPMLUGHCR-UHFFFAOYSA-N bromohydrin Chemical group BrC[C]1CO1 JMSRBKPMLUGHCR-UHFFFAOYSA-N 0.000 description 1
- 235000019437 butane-1,3-diol Nutrition 0.000 description 1
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- XENVCRGQTABGKY-ZHACJKMWSA-N chlorohydrin Chemical group CC#CC#CC#CC#C\C=C\C(Cl)CO XENVCRGQTABGKY-ZHACJKMWSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000011353 cycloaliphatic epoxy resin Substances 0.000 description 1
- VEIOBOXBGYWJIT-UHFFFAOYSA-N cyclohexane;methanol Chemical compound OC.OC.C1CCCCC1 VEIOBOXBGYWJIT-UHFFFAOYSA-N 0.000 description 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 1
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 239000002305 electric material Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 1
- ACCCMOQWYVYDOT-UHFFFAOYSA-N hexane-1,1-diol Chemical compound CCCCCC(O)O ACCCMOQWYVYDOT-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-M hexanoate Chemical compound CCCCCC([O-])=O FUZZWVXGSFPDMH-UHFFFAOYSA-M 0.000 description 1
- 229910000039 hydrogen halide Inorganic materials 0.000 description 1
- 239000012433 hydrogen halide Substances 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- 150000002513 isocyanates Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- 229940050176 methyl chloride Drugs 0.000 description 1
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 1
- SOOZEQGBHHIHEF-UHFFFAOYSA-N methyltetrahydrophthalic anhydride Chemical compound C1C=CCC2C(=O)OC(=O)C21C SOOZEQGBHHIHEF-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920006289 polycarbonate film Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920005596 polymer binder Polymers 0.000 description 1
- 239000002491 polymer binding agent Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 150000004053 quinones Chemical class 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229940014800 succinic anhydride Drugs 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- YWDBSCORAARPPF-VWUMJDOOSA-N tixocortol Chemical compound O=C1CC[C@]2(C)[C@H]3[C@@H](O)C[C@](C)([C@@](CC4)(O)C(=O)CS)[C@@H]4[C@@H]3CCC2=C1 YWDBSCORAARPPF-VWUMJDOOSA-N 0.000 description 1
- 229960004631 tixocortol Drugs 0.000 description 1
- QXJQHYBHAIHNGG-UHFFFAOYSA-N trimethylolethane Chemical compound OCC(C)(CO)CO QXJQHYBHAIHNGG-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Epoxy Resins (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Polyethers (AREA)
Description
【発明の詳細な説明】
本発明は感光性樹脂組成物に関する。更に詳し
くは印刷配線板製造、金属精密加工等に使用し得
る優れた特性を有する保護膜形成用の感光性樹脂
組成物に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a photosensitive resin composition. More specifically, the present invention relates to a photosensitive resin composition for forming a protective film that has excellent properties that can be used in printed wiring board production, metal precision processing, and the like.
従来、精密加工業界、例えば印刷配線板製造等
においてめつきあるいはエツチングのためのレジ
スト形成に感光性樹脂組成物を用いることは良く
知られている。また最近では無電解めつきマス
ク、ソルダマスク等の永久マスクの分野にも感光
性樹脂組成物が用いられてきている。 It is well known that photosensitive resin compositions are used to form resists for plating or etching in the precision processing industry, for example, in the manufacture of printed wiring boards. Recently, photosensitive resin compositions have also been used in the field of permanent masks such as electroless plating masks and solder masks.
永久マスクは、耐熱性、耐溶剤性、耐薬品性、
電気的特性、機械的特性等の優れた特性が要求さ
れるため、使用できる感光性樹脂は限られてい
る。特開昭52−117985号公報、特開昭54−1018号
公報、特開昭53−56018号公報等には永久マスク
として使用可能な感光性樹脂組成物が開示されて
いる。しかしこれらの感光性樹脂組成物は高分子
結合剤およびモノマを主成分としており厚膜の保
護被膜の形成には不向きである。すなわち、これ
らの感光性樹脂組成物ではガラス転移温度の高
い、高分子結合剤が用いられているために、感光
層を形成する場合には、まず該感光性樹脂組成物
をトルエン、メチルエチルケトン、塩化メチレン
等の有機溶剤に均一に溶解または分散させ、次に
塗布、乾燥して感光層を形成しなければならな
い。そのため、厚膜になると、乾燥時に気泡が発
生したり、樹脂の流動が起こり易く、均一な保護
被膜形成は困難である。 Permanent masks are heat resistant, solvent resistant, chemical resistant,
Since excellent properties such as electrical properties and mechanical properties are required, there are a limited number of photosensitive resins that can be used. JP-A-52-117985, JP-A-54-1018, JP-A-53-56018, etc. disclose photosensitive resin compositions that can be used as permanent masks. However, these photosensitive resin compositions mainly contain a polymer binder and a monomer and are not suitable for forming a thick protective film. That is, since these photosensitive resin compositions use a polymeric binder with a high glass transition temperature, when forming a photosensitive layer, the photosensitive resin composition is first mixed with toluene, methyl ethyl ketone, or chloride. It must be uniformly dissolved or dispersed in an organic solvent such as methylene, then coated and dried to form a photosensitive layer. Therefore, when the film becomes thick, air bubbles are likely to occur during drying and the resin tends to flow, making it difficult to form a uniform protective film.
一方、特開昭53−13696号公報には耐熱性およ
び密着性に優れ、ソルダマスクとして使用可能な
UV硬化型の無溶剤型液状樹脂組成物が提案され
ている。 On the other hand, Japanese Patent Application Laid-Open No. 53-13696 discloses that it has excellent heat resistance and adhesion, and can be used as a solder mask.
UV-curable solvent-free liquid resin compositions have been proposed.
この液状組成物は、少なくとも2つのラジカル
重合不飽和基を有する化合物の少なくとも1種お
よび下記式〔〕
〔式中Zは環式二塩基酸残基、R1は炭素数1〜
3のアルキレン基、R2は水素原子又はメチル基、
Xは塩素原子又は臭素原子である。〕で表わされ
る化合物を含有し、スクリーン印刷法により画像
を形成することができる。この組成物について
は、写真法の適用も可能であり、この場合には特
公昭46−39404号公報、特公昭48−23284号公報、
特開昭49−43701号公報等に示される塗布装置を
用い基板上に一定厚の液状感光層を形成し、像的
な活性光線の照射および現像により精密な画像を
形成することができる。しかし特開昭53−13696
号公報に開示される液状樹脂組成物は硬化被膜の
電気絶縁性、耐電食性等に改善点が残されてい
る。 This liquid composition comprises at least one compound having at least two radically polymerizable unsaturated groups and the following formula [] [In the formula, Z is a cyclic dibasic acid residue, R 1 is a carbon number of 1 to
3 alkylene group, R 2 is a hydrogen atom or a methyl group,
X is a chlorine atom or a bromine atom. ], and an image can be formed by screen printing. Regarding this composition, it is also possible to apply a photographic method, in which case, Japanese Patent Publication No. 46-39404, Japanese Patent Publication No. 48-23284,
A liquid photosensitive layer of a certain thickness is formed on a substrate using a coating apparatus such as that disclosed in Japanese Patent Application Laid-Open No. 49-43701, and a precise image can be formed by imagewise irradiation with active light and development. However, JP-A-53-13696
The liquid resin composition disclosed in the publication leaves room for improvement in the electrical insulation properties, electrolytic corrosion resistance, etc. of the cured film.
これらの事実に鑑み、本発明者等が種々検討し
た結果、特開昭53−13696号公報記載の化合物を
エポキシ基を少なくとも1個有する化合物とを組
み合せて用いたときに、電気絶縁性、耐電食性及
び解像力に優れた硬化膜が得られることを見い出
した。 In view of these facts, the present inventors conducted various studies and found that when the compound described in JP-A-53-13696 is used in combination with a compound having at least one epoxy group, the electrical insulation and dielectric strength are improved. It has been found that a cured film with excellent edibility and resolution can be obtained.
本発明の目的は、厚膜の保護膜形成が容易で、
更に、解像度、金属に対する密着性、電気絶縁
性、耐電食性等の特性に優れた感光性樹脂組成物
を提供することにある。 The purpose of the present invention is to facilitate the formation of a thick protective film;
Another object of the present invention is to provide a photosensitive resin composition that has excellent properties such as resolution, adhesion to metals, electrical insulation, and electrolytic corrosion resistance.
本発明は、(a)末端エチレン基を少なくとも2個
有する光重合性化合物の少なくとも1種、(b)式
〔〕で表わされる化合物〔式中Zは環式二塩基
酸残基、R1は炭素数1〜3のアルキレン基、R2
は水素原子又はメチル基、Xは塩素原子又は臭素
原子である。〕の少なくとも1種、(c)エポキシ基
を有する化合物の少なくとも1種及び(d)活性光線
により遊離ラジカルを生成する増感剤または(お
よび)増感剤系を含有してなる感光性樹脂組成物
に関する。 The present invention provides (a) at least one photopolymerizable compound having at least two terminal ethylene groups, and (b) a compound represented by the formula [where Z is a cyclic dibasic acid residue and R 1 is Alkylene group having 1 to 3 carbon atoms, R 2
is a hydrogen atom or a methyl group, and X is a chlorine atom or a bromine atom. ], (c) at least one compound having an epoxy group, and (d) a sensitizer or (and) a sensitizer system that generates free radicals when exposed to actinic rays. relating to things.
本発明の提案する感光性樹脂組成物を構成する
成分の各々について以下詳細に説明する。 Each of the components constituting the photosensitive resin composition proposed by the present invention will be explained in detail below.
本発明の感光性樹脂組成物は、末端エチレン基
を少なくとも2個有する光重合性化合物の少なく
とも1種を必須成分として含有する。この化合物
としては、多価アルコールのアクリル酸エステル
及びメタクリル酸エステルが適当であり、トリメ
チロールプロパン、トリメチロールエタン、ペン
タエリスリトール、1,3−ブチレングリコー
ル、1,4−ブチレングリコール、1,6−ヘキ
サンジオール、プロピレングリコール、トリプロ
ピレングリコール、ポリプロピレングリコール、
エチレングリコール、ポリエチレングリコール、
ネオペンチルグリコール、ジブロムネオペンチル
グリコール、ビスフエノールAの2個のフエノー
ル性水酸基にエチレンオキサイドを各々1〜10個
反応させて得られる2価アルコール、ビスフエノ
ールAの2個のフエノール性水酸基にプロピレン
オキサイドを各々1〜10個反応させて得られる2
価アルコール、テトラブロムビスフエノールAの
2個のフエノール性水酸基にプロピレンオキサイ
ドを各々1〜10個反応させて得られる2価アルコ
ール等の多価アルコールのアクリル酸、エステル
及びメタクリル酸エステルを例として挙げ得る。 The photosensitive resin composition of the present invention contains as an essential component at least one photopolymerizable compound having at least two terminal ethylene groups. Suitable compounds include acrylic esters and methacrylic esters of polyhydric alcohols, including trimethylolpropane, trimethylolethane, pentaerythritol, 1,3-butylene glycol, 1,4-butylene glycol, and 1,6-butylene glycol. hexanediol, propylene glycol, tripropylene glycol, polypropylene glycol,
ethylene glycol, polyethylene glycol,
Neopentyl glycol, dibromneopentyl glycol, bihydric alcohol obtained by reacting two phenolic hydroxyl groups of bisphenol A with 1 to 10 ethylene oxides, propylene to two phenolic hydroxyl groups of bisphenol A. 2 obtained by reacting 1 to 10 oxides each
Examples include acrylic acid, ester, and methacrylic acid ester of polyhydric alcohols such as dihydric alcohols obtained by reacting 1 to 10 propylene oxides with two phenolic hydroxyl groups of tetrabromo bisphenol A. obtain.
また環状脂肪族エポキシ樹脂、ノボラツク型エ
ポキシ樹脂、ビスフエノールA型エポキシ樹脂、
等のエポキシ基を少なくとも2個有する化合物と
メタクリル酸あるいはメタクリル酸との反応生成
物、更に(イ)ジイソシアナート、(ロ)2価アルコール
のアクリル酸モノエステル又はメタクリル酸モノ
エステル更に場合により(ハ)2価アルコールを反応
させて得られるウレタンジアクリレート化合物又
はウレタンジメタクリレート化合物等も使用可能
である。ウレタンジアクリレート化合物およびウ
レタンジメタクリレート化合物の具体例としては
トリメチルヘキサメチレンジイソシアナート/2
−ヒドロキシエチルアクリレート反応物、トリメ
チルヘキサメチレンジイソシアナート/シクロヘ
キサンジメタノール/2−ヒドロキシエチルアク
リレート反応物、トリメチルヘキサメチレンジイ
ソシアナート/2−ヒドロキシプロピルアクリレ
ート反応物、トリメチルヘキサメチレンジイソシ
アナート/2−ヒドロキシエチルメタクリレート
反応物、トリメチルヘキサメチレンジイソシアナ
ート/2−ヒドロキシプロピルメタクリレート反
応物、ヘキサメチレンジイソシアナート/2−ヒ
ドロキシプロピルメタクリレート反応物、イソホ
ロンジイソシアナート/2−ヒドロキシエチルア
クリレート反応物、イソホロンジイソシアナー
ト/2−ヒドロキシエチルメタクリレート反応
物、2,6ジイソシアナートカプロン酸メチル/
2−ヒドロキシエチルアクリレート反応物、2,
6ジイソシアナートカプロン酸メチル/2−ヒド
ロキシエチルメタクリレート反応物等を挙げるこ
とができる。 Also, cycloaliphatic epoxy resin, novolak type epoxy resin, bisphenol A type epoxy resin,
A reaction product of a compound having at least two epoxy groups such as methacrylic acid or methacrylic acid, and (a) diisocyanate, (b) acrylic acid monoester or methacrylic acid monoester of dihydric alcohol, and optionally ( c) Urethane diacrylate compounds or urethane dimethacrylate compounds obtained by reacting dihydric alcohols can also be used. Specific examples of urethane diacrylate compounds and urethane dimethacrylate compounds include trimethylhexamethylene diisocyanate/2
-Hydroxyethyl acrylate reactant, trimethylhexamethylene diisocyanate/cyclohexanedimethanol/2-hydroxyethyl acrylate reactant, trimethylhexamethylene diisocyanate/2-hydroxypropyl acrylate reactant, trimethylhexamethylene diisocyanate/2- Hydroxyethyl methacrylate reactant, trimethylhexamethylene diisocyanate/2-hydroxypropyl methacrylate reactant, hexamethylene diisocyanate/2-hydroxypropyl methacrylate reactant, isophorone diisocyanate/2-hydroxyethyl acrylate reactant, isophorone diisocyanate/2-hydroxyethyl acrylate reactant, Isocyanate/2-hydroxyethyl methacrylate reaction product, 2,6 diisocyanate methyl caproate/
2-hydroxyethyl acrylate reactant, 2,
Examples include methyl 6 diisocyanate caproate/2-hydroxyethyl methacrylate reaction product.
本発明の第二の必須成分は上記の式〔〕で表
わされる化合物である。式〔〕で表わされる化
合物は特公昭53−37214号公報に開示されており、
例えば、環式二塩基酸無水物から下式で表わされ
る反応によつて容易に製造することができる(式
中Z、R1、R2、Xは式()で定義したものと
同一である)。 The second essential component of the present invention is a compound represented by the above formula []. The compound represented by the formula [] is disclosed in Japanese Patent Publication No. 53-37214,
For example, it can be easily produced from a cyclic dibasic acid anhydride by the reaction represented by the following formula (wherein Z, R 1 , R 2 , and X are the same as those defined in formula ()). ).
式(a)
式(b)
環式二塩基酸無水物の例としてはこはく酸無水
物、無水フタル酸、無水ヘキサヒドロフタル酸、
無水テトラヒドロフタル酸、無水ハイミツク酸
(日立化成工業製3,6エンドメチレン1,2,
3,6テトラヒドロ無水フタル酸の商品名)無水
メチルハイミツクス酸(日立化成工業製3,6エ
ンドメチレン1,2,3,6テトラヒドメチル無
水フタル酸の商品名)等を挙げることができる。 Formula (a) Formula (b) Examples of cyclic dibasic acid anhydrides include succinic anhydride, phthalic anhydride, hexahydrophthalic anhydride,
Tetrahydrophthalic anhydride, hymic anhydride (3,6 endomethylene 1,2, manufactured by Hitachi Chemical Co., Ltd.)
Examples include (trade name of 3,6 tetrahydrophthalic anhydride) methylhymic anhydride (trade name of 3,6 endomethylene 1,2,3,6 tetrahydromethyl phthalic anhydride manufactured by Hitachi Chemical Co., Ltd.).
式〔〕で表わされる化合物はクロルヒドリン
基またはブロムヒドリン基を含有する一価のアク
リル酸エステルまたはメタクリル酸エステルであ
り、この化合物を含む液状型の感光性樹脂組成物
は優れた解像度を有するものである。 The compound represented by the formula [] is a monovalent acrylic ester or methacrylic ester containing a chlorohydrin group or a bromohydrin group, and a liquid photosensitive resin composition containing this compound has excellent resolution. .
本発明で使用する感光性樹脂組成物は少なくと
も1個のエポキシ基を少なくとも1個有する化合
物を必須成分として含有する。このエポキシ基含
有化合物は、光照射、熱処理等により式〔〕で
表わされる化合物から発生するハロゲン化水素を
捕獲し、硬化膜を防止しまた金属を腐食から保護
するために用いるものである。エポキシ基を少な
くとも1個有する化合物の例としては、フエニル
グリシジルエーテル、p−ブチルフエノールグリ
シジルエーテル、クレジルグリシジルエーテル、
アクリグリシジルエーテル、グリシジルメタクリ
レート、オクチレンオキサイド、ビスフエノール
Aのジグリシジルエーテル、ビスフエノールA型
エポキシ樹脂、チツソ社製指環式エポキシ樹脂
(チツソノツクス206、チツソノツクス221、チツ
ソノツクス201等)、ダイセル化学工業(株)製指環式
エポキシ樹脂セロキサイド2021等を挙げることが
できる。 The photosensitive resin composition used in the present invention contains as an essential component a compound having at least one epoxy group. This epoxy group-containing compound is used to capture hydrogen halide generated from the compound represented by the formula [] by light irradiation, heat treatment, etc., to prevent a cured film, and to protect metals from corrosion. Examples of compounds having at least one epoxy group include phenyl glycidyl ether, p-butylphenol glycidyl ether, cresyl glycidyl ether,
Acrylicidyl ether, glycidyl methacrylate, octylene oxide, diglycidyl ether of bisphenol A, bisphenol A type epoxy resin, ring type epoxy resin manufactured by Chitsuso Corporation (Chissonox 206, Chissonox 221, Chissonox 201, etc.), Daicel Chemical Industries, Ltd. Examples include ring type epoxy resin Celoxide 2021 manufactured by ).
本発明で用いる感光性樹脂組成物は、活性光に
より遊離ラジカルを生成する増感剤または(およ
び)増感剤系を必須成分として含有する。使用で
きる増感剤としては、置換または非置換の多核キ
ノン類、例えば、2−エチルアントラキノン、2
−t−ブチルアントラキノン、オクタメチルアン
トラキノン、1,2−ペンズアントラキノン、
2,3−ジフエニルアントラキノン等、ジアセチ
ルおよびベンジル等のケトアルドニル化合物、ベ
ンゾイン、ピバロン等のα−ケタルドニルアルコ
ール類およびエーテル類、α−炭化水素置換芳香
族アシロイン類、例えばα−フエニル−ベンゾイ
ン、α,α−ジエトキシアセトフエノン等、ベン
ゾフエノン、4,4′−ビスジアルキルアミノベン
ゾフエノン等の芳香族ケトン類を例示でき、これ
らは単独でも組合せてもよい。使用できる増感剤
系としては2,4,5−リアリールイミダゾール
二量体と2−メルカプトベンゾキナゾール、ロイ
コクリスタルバイオレツト、トリス(4−ジエチ
ルアミノ−2−メチルフエニル)メタン等との組
合せを例示できる。また、それ自体で光開始性は
ないが、前述した物質と組合せて用いることによ
り全体として光開始性能のより良好な増感剤系と
なるような添加剤を用いることができる。例えば
ベンゾフエノンに対するトリエタノールアミン等
の三級アミンなどである。これら増感剤または
(および)増感剤系は上記の(a)光重合性化合物、
(b)式〔〕で表わされる化合物および(c)エポキシ
基を有する化合物に対して0.5〜10重量%含有さ
れていることが好ましい。 The photosensitive resin composition used in the present invention contains as an essential component a sensitizer or (and) a sensitizer system that generates free radicals by actinic light. Sensitizers that can be used include substituted or unsubstituted polynuclear quinones, such as 2-ethylanthraquinone, 2
-t-butylanthraquinone, octamethylanthraquinone, 1,2-penzanthraquinone,
2,3-diphenylanthraquinone etc., ketoaldonyl compounds such as diacetyl and benzyl, α-ketaldonyl alcohols and ethers such as benzoin and pivalone, α-hydrocarbon substituted aromatic acyloins such as α-phenyl-benzoin, Examples include aromatic ketones such as α,α-diethoxyacetophenone, benzophenone, and 4,4′-bisdialkylaminobenzophenone, which may be used alone or in combination. Examples of sensitizer systems that can be used include combinations of 2,4,5-lyarylimidazole dimer and 2-mercaptobenzoquinazole, leuco crystal violet, tris(4-diethylamino-2-methylphenyl)methane, etc. can. Additionally, additives can be used which do not have photoinitiating properties by themselves, but which, when used in combination with the above-mentioned substances, result in a sensitizer system with better photoinitiating performance as a whole. Examples include tertiary amines such as triethanolamine for benzophenone. These sensitizers or (and) sensitizer systems are the above-mentioned (a) photopolymerizable compounds,
The content is preferably 0.5 to 10% by weight based on (b) the compound represented by formula [] and (c) the compound having an epoxy group.
末端エチレン基を少なくとも2個有する光重合
性化合物の少なくとも1種を20〜90重量部、式
〔〕で表わされる化合物の少なくとも1種を40
〜5重量部少なくとも1個のエポキシ基を有する
化合物の少なくとも1種を40〜5重量部および活
性光により遊離ラジカルを生成する増感剤または
(および)増感剤系を1〜10重量部の範囲とする
ことが、光重合性、解像度、硬化物の密着性等の
点で好ましい。 20 to 90 parts by weight of at least one photopolymerizable compound having at least two terminal ethylene groups, 40 parts by weight of at least one compound represented by formula []
~5 parts by weight 40 to 5 parts by weight of at least one compound having at least one epoxy group and 1 to 10 parts by weight of a sensitizer or (and) a sensitizer system that generates free radicals upon actinic light. In terms of photopolymerizability, resolution, adhesion of the cured product, etc., it is preferable to set it within this range.
本発明になる感光性樹脂組成物は以上の必須成
分に加えて、種々の目的のために副次的成分を含
有せしめることができる。副次的成分としては熱
重合防止剤、染料、顔料、消泡剤、難燃剤、可塑
剤、密着性向上剤、エポキシ樹脂の潜在性硬化剤
等を挙げることができる。これらの副次的成分の
選択は通常の感光性樹脂組成物と同様の考慮のも
とに行なわれる。 In addition to the above-mentioned essential components, the photosensitive resin composition of the present invention can contain secondary components for various purposes. Examples of the subsidiary components include thermal polymerization inhibitors, dyes, pigments, antifoaming agents, flame retardants, plasticizers, adhesion improvers, and latent curing agents for epoxy resins. Selection of these secondary components is made based on the same considerations as those for ordinary photosensitive resin compositions.
本発明の感光性樹脂組成物は常法に従つて保護
被膜を形成し得る。たとえば本発明の感光性樹脂
組成物を常温ないし150℃で撹拌混合して均一化
した後、加工保護すべき基板上に10〜300μmの厚
さに塗布し、この上にネガフイルをあて、活性光
を像的に照射して露光部を硬化させ、次いで現像
処理により未露光部を溶出することにより保護被
膜を形成することができる。ネガフイルムに感光
層が付着するのを防止するために、ネガフイルム
と感光層の間にポリエチレンテレフタレートフイ
ルム、ポリプロピレンフイルム、酢酸セルロース
フイルム、ポリカーボネートフイルム等の透明な
カバーフイルムを介在させることも可能である。
高解像の保護被膜を得る場合には、カバーフイル
ムの厚さは25μm以下であることが望ましい。 The photosensitive resin composition of the present invention can be used to form a protective film using a conventional method. For example, the photosensitive resin composition of the present invention is homogenized by stirring and mixing at room temperature to 150°C, and then applied to a thickness of 10 to 300 μm on a substrate to be processed and protected. A protective film can be formed by image-wise irradiation to cure the exposed areas, and then elution of the unexposed areas by development. In order to prevent the photosensitive layer from adhering to the negative film, it is also possible to interpose a transparent cover film such as polyethylene terephthalate film, polypropylene film, cellulose acetate film, polycarbonate film, etc. between the negative film and the photosensitive layer. .
When obtaining a high-resolution protective film, the thickness of the cover film is desirably 25 μm or less.
現像処理に用いられる現像液は露光部にダメー
ジを与えず、未露光部を選択的に溶出するもので
あればその種類については特に制限はない。現像
液の例としては1,1,1−トリクロルエタン等
のハロゲン化炭化水素、ジエチレングリコールモ
ノブチルエーテル/炭酸ナトリウム水溶液等の有
機溶剤/希アルカリ水溶液混合液などを挙げるこ
とができる。 The type of developer used in the development process is not particularly limited as long as it does not damage the exposed areas and selectively elutes the unexposed areas. Examples of the developer include halogenated hydrocarbons such as 1,1,1-trichloroethane, organic solvents such as diethylene glycol monobutyl ether/sodium carbonate aqueous solution/dilute aqueous alkali solution, and the like.
上記の方法で得られた像的な保護被膜は通常の
エツチング、めつき等のための耐食膜となるが、
現像後の活性光の露光及び80℃ないし200での加
熱処理により更に優れた特性を有する保護被膜と
なる。現像後の活性光の露光及び加熱処理の順序
はどちらが先でもよい。このようにして得られる
保護被膜はトリクレン、メチルエチルケトン、イ
ソプロピルアルコール、トルエン等の有機溶剤に
十分に耐え、酸性水溶液又はアルカリ水溶液にも
耐える。更に耐熱性、機械的特性にも優れている
ので、ソルダマスク等の永久的な保護膜として使
用し得る。更に本発明の感光性樹脂組成物を用い
て形成される被膜は優れた化学的、物理的特性を
有することから、多層印刷配線板の層間絶縁層、
感光性接着剤、塗料、プラスチツクレリーフ、印
刷版材料等にも用いられる。 The image-like protective film obtained by the above method serves as a corrosion-resistant film for ordinary etching, plating, etc.
After development, exposure to actinic light and heat treatment at 80°C to 200°C result in a protective film with even better properties. The order of exposure to actinic light and heat treatment after development may be in any order. The protective coating thus obtained is sufficiently resistant to organic solvents such as tricrene, methyl ethyl ketone, isopropyl alcohol, and toluene, and also resistant to acidic or alkaline aqueous solutions. Furthermore, since it has excellent heat resistance and mechanical properties, it can be used as a permanent protective film for solder masks and the like. Furthermore, since the film formed using the photosensitive resin composition of the present invention has excellent chemical and physical properties, it can be used as an interlayer insulating layer of a multilayer printed wiring board,
It is also used in photosensitive adhesives, paints, plastic reliefs, printing plate materials, etc.
次に本発明の実施例を示す。ここに示す実施例
は、本発明の実施態様を示すものであり、本発明
はこれによつて制限されるものではない。 Next, examples of the present invention will be shown. The examples shown here are illustrative of embodiments of the present invention, and the present invention is not limited thereto.
実施例中「部」は重量部を示す。 In the examples, "parts" indicate parts by weight.
実施例 1
トリメチルヘキサメチレンジイソシアナート1
モルと2−ヒドロキシエチルアクリレート2モ
ルとを反応させて得られたウレタンジアクリレ
ート化合物 ……80部
無水フタル酸、2−ヒドロキシエチルメタクリ
レート、エピクロルヒドリンから合成した式
〔〕で表わされた化合物 ……15部
セロキサイド2021(ダイセル化学工業(株)製脂環
式エポキシ樹脂 ……5部
ベンゾフエノン ……2.7部
ミヒラーケトン ……0.3部
p−メトキシフエノール ……0.1部
上記の配合で粘度約30ポアーズ(25℃)の感光
性樹脂組成物を調製し、厚さ1mmのステンレス板
上に厚さ80μmに塗布し、ネガマスク通し、オー
ク製作所製超高圧水銀灯フエニツクス3000を使用
し、150mJ/cm2で照射した。露光後30分放置した
のち、1,1,1−トリクロルエタンを用いて18
℃で30秒間スプレー現像した。現像後80℃で10分
間加熱乾燥し、東芝電材(株)製紫外線照射装置を使
用し25J/cm2で照射した。その後150℃で30分間加
熱処理した。ネガマスクに相応する精密な像状の
硬化被膜が得られた。この被膜はトリクレン、ト
ルエン、イソプロパノール、10%硫酸水溶液にそ
れぞれ25℃、1時間浸漬後も何の変化も認められ
ず、更に26℃、10秒のはんだ処理にも耐え、クラ
ツクの発生、銅箔からのはく離は認められず、ソ
ルダマスクとして用い得ることがわかつた。Example 1 Trimethylhexamethylene diisocyanate 1
Urethane diacrylate compound obtained by reacting 2 moles of 2-hydroxyethyl acrylate with 80 parts of phthalic anhydride, 2-hydroxyethyl methacrylate, and epichlorohydrin Compound represented by the formula []... 15 parts Celoxide 2021 (alicyclic epoxy resin manufactured by Daicel Chemical Industries, Ltd.)...5 parts Benzophenone...2.7 parts Michler's ketone...0.3 parts p-methoxyphenol...0.1 part The above formulation has a viscosity of approximately 30 poise (at 25℃) ) was prepared, applied to a thickness of 80 μm on a 1 mm thick stainless steel plate, and irradiated with 150 mJ/cm 2 through a negative mask using an ultra-high pressure mercury lamp Phoenix 3000 manufactured by Oak Seisakusho. Exposure. After leaving for 30 minutes, 18
Spray developed for 30 seconds at °C. After development, the film was dried by heating at 80° C. for 10 minutes, and irradiated at 25 J/cm 2 using an ultraviolet irradiation device manufactured by Toshiba Electric Materials Corporation. Thereafter, it was heat-treated at 150°C for 30 minutes. A cured film with a precise image shape corresponding to a negative mask was obtained. This film showed no change after being immersed in trichlene, toluene, isopropanol, and 10% sulfuric acid aqueous solutions at 25°C for 1 hour, and also withstood soldering at 26°C for 10 seconds, causing no cracks or cracks on the copper foil. No peeling was observed, indicating that it could be used as a solder mask.
実施例 2
実施例1の感光性樹脂組成物を日立化成工業(株)
製銅張積層板MCL−E−67(片面板、板厚1.6mm、
銅箔厚35μm)をエツチングして作製したクシ型
電極(ライン幅200μm、ライン間隔300μm)上に
約100μmの厚さに塗布した。次に東芝電材(株)製紫
外線照射装置(定格電圧200V、定格消費電力
7.2KW、適合ランプH5600L/2、ランプ本数1
本)を使用し、50J/cm2で照射した。その後150℃
で30分間加熱処理した。このように処理されたク
シ型電極に40℃、90%RHの環境下で20日間、
100Vの直流電圧を印加したが、電極に変色は認
められなかつた。比較のために、実施例1の感光
性樹脂組成物からセロキサイド2021を除いた感光
性樹脂組成物について、同上の処理を行なつたと
ころ、電圧印加3日で陽極に変色が発生した。こ
のことから本発明になる感光性樹脂組成物は特開
昭53−13696号公報に示される感光性樹脂組成物
に比べ耐電食性に優れ、永久保護被膜としての信
頼性に優れていることが示される。 Example 2 The photosensitive resin composition of Example 1 was manufactured by Hitachi Chemical Co., Ltd.
Copper-clad laminate MCL-E-67 (single-sided plate, plate thickness 1.6 mm,
It was applied to a thickness of about 100 μm on a comb-shaped electrode (line width 200 μm, line spacing 300 μm) prepared by etching copper foil (35 μm thick). Next, the ultraviolet irradiation device manufactured by Toshiba Electric Materials Co., Ltd. (rated voltage 200V, rated power consumption)
7.2KW, compatible lamp H5600L/2, number of lamps 1
) and irradiated at 50 J/cm 2 . Then 150℃
The mixture was heat-treated for 30 minutes. The comb-shaped electrode treated in this way was exposed to 40℃ and 90%RH for 20 days.
Although a DC voltage of 100 V was applied, no discoloration was observed on the electrode. For comparison, a photosensitive resin composition obtained by removing Celoxide 2021 from the photosensitive resin composition of Example 1 was subjected to the same treatment, and discoloration occurred on the anode within 3 days of voltage application. This indicates that the photosensitive resin composition of the present invention has superior electrolytic corrosion resistance and reliability as a permanent protective film compared to the photosensitive resin composition disclosed in JP-A-53-13696. It will be done.
実施例 3
トリメチルヘキサメチレンジイソシアナート1
モルと2−ヒドロキシプロピルアクリレート2
モルとを反応させて得られたウレタンジアクリ
レート化合物 ……75部
無水フタル酸、2−ヒドロキシエチルアクリレ
ート、エピクロルヒドリンから合成した実施例
1で用いた式〔〕の化合物 ……20部
エピコート828(シエル社製ビスフエノールA型
エポキシ樹脂) ……5部
ベンゾフエノン ……2.7部
ミヒラーケトン ……0.3部
p−メトキシフエノール ……0.1部
ビクトリアピユアブルー ……0.02部
上記配合で粘度約30ポアーズ(25℃)の感光性
樹脂組成物を調製し、感光層の厚さを一定に保つ
ためのスペーサ(厚さ160μm)を設けた銅張積層
板上に塗布した。この感光層表面にポリエチレン
テレフタレートフイルム(厚さ4μm)及びネガマ
スク(透明画線幅30μm、線間隔300μm)を重ね、
オーク製作所製超高圧水銀灯フエニツクス3000を
使用し、300mJ/cm2で照射した。露光後30分間放
置したのち、1,1,1−トリクロルエタンを用
い18℃で30秒間スプレー現像した。現像後、40℃
で10分間加熱乾燥し、東芝電材製紫外線照射装置
を使用し、50J/cm2で照射した。その後150℃で1
時間加熱処理した。得られた保護被膜は厚さ
160μmで線幅40μmの解像力を有しており、耐ト
リクレン性、電気絶縁性、耐熱性等の特性も優れ
ており、永久保護被膜として用い得るものであつ
た。Example 3 Trimethylhexamethylene diisocyanate 1
Mol and 2-hydroxypropyl acrylate 2
Urethane diacrylate compound obtained by reacting with molar...75 parts Compound of formula [] used in Example 1 synthesized from phthalic anhydride, 2-hydroxyethyl acrylate, and epichlorohydrin...20 parts Epicote 828 (Ciel (Bisphenol A type epoxy resin)...5 parts Benzophenone...2.7 parts Michler's ketone...0.3 part p-methoxyphenol...0.1 part Victoria Pure Blue...0.02 part The above formulation has a viscosity of approximately 30 poise (25℃) A photosensitive resin composition was prepared and applied onto a copper-clad laminate provided with a spacer (thickness: 160 μm) to keep the thickness of the photosensitive layer constant. A polyethylene terephthalate film (thickness: 4 μm) and a negative mask (transparent line width: 30 μm, line spacing: 300 μm) were overlaid on the surface of this photosensitive layer.
Irradiation was performed at 300 mJ/cm 2 using an ultra-high pressure mercury lamp Phoenix 3000 manufactured by Oak Seisakusho. After being left to stand for 30 minutes after exposure, spray development was carried out using 1,1,1-trichloroethane at 18° C. for 30 seconds. After development, 40℃
The sample was dried by heating for 10 minutes, and then irradiated with 50 J/cm 2 using an ultraviolet irradiation device manufactured by Toshiba Denzai. Then 1 at 150℃
Heat treated for hours. The resulting protective coating has a thickness
It had a resolution of 160 μm and a line width of 40 μm, and had excellent properties such as trichlene resistance, electrical insulation, and heat resistance, and could be used as a permanent protective coating.
実施例 4
トリメチルヘキサメチレンジイソシアナート/
シクロヘキサンジメタノール/2−ヒドロキシ
エチルアクリレート(1/0.1/1.9モル比)反
応物 ……80部
無水フタル酸、2−ヒドロキシエチルアクリレ
ート、エピクロルヒドリンから合成した実施例
1で用いた式〔〕の化合物 ……10部
エポライト1600(共栄社油脂化学工業(株)製水添
ビスフエノールA型エポキシ樹脂) ……10部
ベンゾフエノン ……2.9部
ミヒラーケトン ……0.1部
p−メトキシフエノール ……0.1部
ビクトリアピユアブルー ……0.02部
上記配合で粘度約70ポアーズ(25℃)の感光性
樹脂組成物を調製し、実施例1と同様にして、優
れた永久保護被膜を得た。Example 4 Trimethylhexamethylene diisocyanate/
Cyclohexane dimethanol/2-hydroxyethyl acrylate (1/0.1/1.9 molar ratio) reaction product...80 parts Compound of formula [] used in Example 1 synthesized from phthalic anhydride, 2-hydroxyethyl acrylate, and epichlorohydrin... ...10 parts Epolite 1600 (hydrogenated bisphenol A type epoxy resin manufactured by Kyoeisha Yushi Kagaku Kogyo Co., Ltd.) ...10 parts Benzophenone ...2.9 parts Michler's ketone ...0.1 part p-methoxyphenol ...0.1 part Victoria Pure Blue ... ...0.02 part A photosensitive resin composition having a viscosity of about 70 poise (25°C) was prepared using the above formulation, and an excellent permanent protective coating was obtained in the same manner as in Example 1.
実施例 5
アロニツクスM6200(東亜合成化学工業(株)製オ
リゴエステルアクリレート) ……50部
アロニツクスM8060(東亜合成化学工業(株)製オ
リゴエステルアクリレート) ……10部
無水フタル酸、2−ヒドロキシエチルアクリレ
ート、エピクロルヒドリンから合成した式
〔〕の化合物 ……20部
アラルダイトECN1235(チバ社製ノボラツク型
エポキシ樹脂) ……20部
2−エチルアントラキノン ……3部
p−メトキシフエノール ……0.1部
ビクトリアピユアブルー ……0.02部
上記配合で粘度70ポアーズ(25℃)の感光性樹
脂組成物を調製し、実施例1と同様にして優れた
永久保護被膜を得た。Example 5 Aronix M6200 (oligoester acrylate manufactured by Toagosei Chemical Industry Co., Ltd.) ...50 parts Aronix M8060 (oligoester acrylate manufactured by Toagosei Chemical Industry Co., Ltd.) ...10 parts phthalic anhydride, 2-hydroxyethyl acrylate , compound of formula [] synthesized from epichlorohydrin......20 parts Araldite ECN1235 (novolac type epoxy resin manufactured by Ciba)......20 parts 2-ethylanthraquinone...3 parts p-methoxyphenol...0.1 part Victoria Pure Blue... ...0.02 part A photosensitive resin composition having a viscosity of 70 poise (25°C) was prepared using the above formulation, and an excellent permanent protective coating was obtained in the same manner as in Example 1.
実施例 6
アロニツクスM6100(東亜合成化学工業(株)製オ
リゴエステルアクリレート) ……40部
トリメチロールプロパンアクリレート……20部
無水フタル酸、2−ヒドロキシエチルアクリレ
ート、エピクロルヒドリンから合成した実施例
1で用いた式〔〕の化合物 ……10部
アラルダイトECN1280(チバ社製ノボラツク型
エポキシ樹脂) ……30部
ベンゾフエノン ……2.7部
ミヒラーケトン ……0.3部
p−メトキシフエノール ……0.1部
ビクトリアピユアブルー ……0.02部
上記配合で粘度約100ポアーズ(35℃)の感光
性樹脂組成物を調製し、実施例1と同様にして優
れた永久保護被膜を得た。 Example 6 Aronix M6100 (oligoester acrylate manufactured by Toagosei Kagaku Kogyo Co., Ltd.)...40 parts Trimethylolpropane acrylate...20 parts Used in Example 1 synthesized from phthalic anhydride, 2-hydroxyethyl acrylate, and epichlorohydrin Compound of formula []...10 parts Araldite ECN1280 (Novolac type epoxy resin manufactured by Ciba Corporation)...30 parts Benzophenone...2.7 parts Michler's ketone...0.3 parts p-methoxyphenol...0.1 part Victoria Pure Blue...0.02 parts A photosensitive resin composition having a viscosity of about 100 poise (35° C.) was prepared using the above formulation, and an excellent permanent protective coating was obtained in the same manner as in Example 1.
Claims (1)
光重合性化合物の少なくとも1種 (b) 式〔〕で表わされる化合物〔式中Zは環式
二塩基酸残基、R1は炭素数1〜3のアルキレ
ン基、R2は水素原子又はメチル基、Xは塩素
原子又は臭素原子である。〕の少なくとも1種 (c) エポキシ基を有する化合物の少なくとも1種
および (d) 活性光線により遊離ラジカルを生成する増感
剤または(および)増感剤系を含有してなる感
光性樹脂組成物。 2 (a) 末端エチレン基を少なくとも2個有する
光重合性化合物の少なくとも1種を20〜90重量
部 (b) 式〔〕で表わされる化合物を40〜5重量部
および (c) エポキシ基を有する化合物の少なくとも1種
を40〜5重量部とした特許請求の範囲第1項記
載の感光性樹脂組成物。 3 末端エチレン基を少なくとも2個有する光重
合性化合物が、(イ)トリメチルヘキサメチレンジイ
ソシアナート、(ロ)2価アルコールのアクリル酸モ
ノエステル又はメタクリル酸モノエステル更に場
合により(ハ)2価アルコールを反応させて得られる
ウレタンジアクリレート化合物又はウレタンジメ
タクリレート化合物である特許請求の範囲第1項
または第2項記載の感光性樹脂組成物。[Scope of Claims] 1 (a) At least one photopolymerizable compound having at least two terminal ethylene groups (b) A compound represented by the formula [] [wherein Z is a cyclic dibasic acid residue, R 1 is an alkylene group having 1 to 3 carbon atoms, R 2 is a hydrogen atom or a methyl group, and X is a chlorine atom or a bromine atom. (c) at least one compound having an epoxy group; and (d) a sensitizer or (and) a sensitizer system that generates free radicals when exposed to actinic rays. . 2 (a) 20 to 90 parts by weight of at least one photopolymerizable compound having at least two terminal ethylene groups, (b) 40 to 5 parts by weight of a compound represented by formula [], and (c) having an epoxy group. The photosensitive resin composition according to claim 1, wherein at least one of the compounds is contained in an amount of 40 to 5 parts by weight. 3. The photopolymerizable compound having at least two terminal ethylene groups is (a) trimethylhexamethylene diisocyanate, (b) acrylic acid monoester or methacrylic acid monoester of dihydric alcohol, and optionally (c) dihydric alcohol. The photosensitive resin composition according to claim 1 or 2, which is a urethane diacrylate compound or a urethane dimethacrylate compound obtained by reacting.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11545883A JPH0244056B2 (en) | 1983-06-27 | 1983-06-27 | KANKOSEIJUSHISOSEIBUTSU |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11545883A JPH0244056B2 (en) | 1983-06-27 | 1983-06-27 | KANKOSEIJUSHISOSEIBUTSU |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS607427A JPS607427A (en) | 1985-01-16 |
JPH0244056B2 true JPH0244056B2 (en) | 1990-10-02 |
Family
ID=14663047
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11545883A Expired - Lifetime JPH0244056B2 (en) | 1983-06-27 | 1983-06-27 | KANKOSEIJUSHISOSEIBUTSU |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0244056B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0780370A2 (en) | 1995-12-18 | 1997-06-25 | Degussa Aktiengesellschaft | Process for the preparation of D,L-methionine or salts thereof |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4988605A (en) * | 1987-07-09 | 1991-01-29 | Mitsubishi Denki Kabushiki Kaisha | Light-sensitive resin composition and light-sensitive element |
CN102007451A (en) | 2008-04-28 | 2011-04-06 | 日立化成工业株式会社 | Photosensitive resin composition, photosensitive element, method for forming resist pattern, and method for manufacturing printed wiring board |
KR101247912B1 (en) | 2008-06-02 | 2013-03-26 | 히타치가세이가부시끼가이샤 | Photosensitive resin composition, photosensitive element, resist pattern manufacturing method, and printed circuit board manufacturing method |
CN109929430A (en) * | 2019-04-03 | 2019-06-25 | 浙江福斯特新材料研究院有限公司 | A kind of optical fiber outer coating paint of resistant to hydrolysis |
-
1983
- 1983-06-27 JP JP11545883A patent/JPH0244056B2/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0780370A2 (en) | 1995-12-18 | 1997-06-25 | Degussa Aktiengesellschaft | Process for the preparation of D,L-methionine or salts thereof |
Also Published As
Publication number | Publication date |
---|---|
JPS607427A (en) | 1985-01-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4693961A (en) | Photopolymerizable coating agent, a photopolymerizable material and its use | |
JPH09235356A (en) | Epoxy resin composition and solder-resistant photoink, and printed circuit board and its production | |
JPS62187722A (en) | Liquid photopolymer composition and image formation using same | |
KR101900355B1 (en) | Dry film layered product | |
JPH0244056B2 (en) | KANKOSEIJUSHISOSEIBUTSU | |
JP2662480B2 (en) | Photosensitive resin composition, photosensitive element using the same, and method for producing plating resist | |
JPS63289014A (en) | Photosensitive film composition | |
US20040253540A1 (en) | Permanent resist, permanent resist-laminated substrate and process for producing the same | |
JP2002040647A (en) | Resist ink composition | |
JP2746009B2 (en) | Photo solder resist composition | |
JPS61264341A (en) | Photosensitive resin composition | |
JPH04195043A (en) | Photosensitive composition and production of printed circuit board with solder resist using the same | |
JPH0562732B2 (en) | ||
JPH08123016A (en) | Photosensitive solder resist composition, production of printed circuit board using that, printed circuit board and apparatus using that printed circuit board | |
JP3214297B2 (en) | Photosensitive resin composition | |
JPH0435061B2 (en) | ||
JPH0829979A (en) | Manufacture of resist pattern and etching pattern | |
JPH0733961A (en) | Ink composition for solder resist | |
JPS61132947A (en) | Photosensitive resin composition | |
JP2000047383A (en) | Photosensitive resin composition, photosensitive element and production of plating resist using these | |
JP2002138140A (en) | Polyester resin and photosensitive resin composition using the same | |
JPH0736183A (en) | Liquid photosensitive resin composition | |
JPS63280244A (en) | Photosensitive resin composition | |
JPH02123359A (en) | Photosensitive resin composition and photosensitive element | |
JPH04225355A (en) | Photosensitive resin composition and photosensitive element using same |