JPH0243320B2 - - Google Patents

Info

Publication number
JPH0243320B2
JPH0243320B2 JP57017659A JP1765982A JPH0243320B2 JP H0243320 B2 JPH0243320 B2 JP H0243320B2 JP 57017659 A JP57017659 A JP 57017659A JP 1765982 A JP1765982 A JP 1765982A JP H0243320 B2 JPH0243320 B2 JP H0243320B2
Authority
JP
Japan
Prior art keywords
plasma
value
equivalent resistance
matching
frequency power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57017659A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58135600A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP57017659A priority Critical patent/JPS58135600A/ja
Publication of JPS58135600A publication Critical patent/JPS58135600A/ja
Publication of JPH0243320B2 publication Critical patent/JPH0243320B2/ja
Granted legal-status Critical Current

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  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
JP57017659A 1982-02-08 1982-02-08 プラズマ励起用高周波電力供給装置 Granted JPS58135600A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57017659A JPS58135600A (ja) 1982-02-08 1982-02-08 プラズマ励起用高周波電力供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57017659A JPS58135600A (ja) 1982-02-08 1982-02-08 プラズマ励起用高周波電力供給装置

Publications (2)

Publication Number Publication Date
JPS58135600A JPS58135600A (ja) 1983-08-12
JPH0243320B2 true JPH0243320B2 (enExample) 1990-09-27

Family

ID=11949968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57017659A Granted JPS58135600A (ja) 1982-02-08 1982-02-08 プラズマ励起用高周波電力供給装置

Country Status (1)

Country Link
JP (1) JPS58135600A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4629940A (en) * 1984-03-02 1986-12-16 The Perkin-Elmer Corporation Plasma emission source
JPS6327034U (enExample) * 1986-08-07 1988-02-22
JPH02101744A (ja) * 1988-10-11 1990-04-13 Semiconductor Energy Lab Co Ltd プラズマ反応方法

Also Published As

Publication number Publication date
JPS58135600A (ja) 1983-08-12

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