JPH0242427U - - Google Patents
Info
- Publication number
- JPH0242427U JPH0242427U JP12197988U JP12197988U JPH0242427U JP H0242427 U JPH0242427 U JP H0242427U JP 12197988 U JP12197988 U JP 12197988U JP 12197988 U JP12197988 U JP 12197988U JP H0242427 U JPH0242427 U JP H0242427U
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- side magnet
- high frequency
- forms
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 230000005684 electric field Effects 0.000 claims 2
- 239000012495 reaction gas Substances 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12197988U JPH0614478Y2 (ja) | 1988-09-16 | 1988-09-16 | 薄膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12197988U JPH0614478Y2 (ja) | 1988-09-16 | 1988-09-16 | 薄膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0242427U true JPH0242427U (de) | 1990-03-23 |
| JPH0614478Y2 JPH0614478Y2 (ja) | 1994-04-13 |
Family
ID=31369485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12197988U Expired - Lifetime JPH0614478Y2 (ja) | 1988-09-16 | 1988-09-16 | 薄膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0614478Y2 (de) |
-
1988
- 1988-09-16 JP JP12197988U patent/JPH0614478Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0614478Y2 (ja) | 1994-04-13 |
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