JPH0241581Y2 - - Google Patents
Info
- Publication number
- JPH0241581Y2 JPH0241581Y2 JP3365383U JP3365383U JPH0241581Y2 JP H0241581 Y2 JPH0241581 Y2 JP H0241581Y2 JP 3365383 U JP3365383 U JP 3365383U JP 3365383 U JP3365383 U JP 3365383U JP H0241581 Y2 JPH0241581 Y2 JP H0241581Y2
- Authority
- JP
- Japan
- Prior art keywords
- reference electrode
- groove
- main surface
- ion sensor
- isfet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 230000005669 field effect Effects 0.000 claims description 5
- 229910052594 sapphire Inorganic materials 0.000 description 8
- 239000010980 sapphire Substances 0.000 description 8
- 239000010408 film Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
- 229910021607 Silver chloride Inorganic materials 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 2
- AZBAQHIVVLQMFX-UHFFFAOYSA-N 4-(2,4-dimethylphenyl)-5-methyl-1,3-thiazol-2-amine Chemical compound S1C(N)=NC(C=2C(=CC(C)=CC=2)C)=C1C AZBAQHIVVLQMFX-UHFFFAOYSA-N 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3365383U JPS59138757U (ja) | 1983-03-09 | 1983-03-09 | 半導体イオンセンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3365383U JPS59138757U (ja) | 1983-03-09 | 1983-03-09 | 半導体イオンセンサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59138757U JPS59138757U (ja) | 1984-09-17 |
| JPH0241581Y2 true JPH0241581Y2 (US20080293856A1-20081127-C00150.png) | 1990-11-06 |
Family
ID=30164430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3365383U Granted JPS59138757U (ja) | 1983-03-09 | 1983-03-09 | 半導体イオンセンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59138757U (US20080293856A1-20081127-C00150.png) |
-
1983
- 1983-03-09 JP JP3365383U patent/JPS59138757U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59138757U (ja) | 1984-09-17 |
