JPH0240151A - Magneto-optical recording medium - Google Patents

Magneto-optical recording medium

Info

Publication number
JPH0240151A
JPH0240151A JP19150488A JP19150488A JPH0240151A JP H0240151 A JPH0240151 A JP H0240151A JP 19150488 A JP19150488 A JP 19150488A JP 19150488 A JP19150488 A JP 19150488A JP H0240151 A JPH0240151 A JP H0240151A
Authority
JP
Japan
Prior art keywords
film
magneto
recording medium
rare earth
short wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19150488A
Other languages
Japanese (ja)
Inventor
Masabumi Nakada
正文 中田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP19150488A priority Critical patent/JPH0240151A/en
Publication of JPH0240151A publication Critical patent/JPH0240151A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To increase the Kerr rotating angle thetak on a short wavelength side by forming the recording medium of a specific thin amorphous alloy film having the axis of easy magnetization in the direction perpendicular to the film plane. CONSTITUTION:This recording medium is formed of the thin amorphous alloy film of Pr-R-Fe-Co-M (where R is at least >=1 kinds of Tb and Dy; M is at least >=1 kinds among Ti, Pt, Cr, Ta, and Al) having the axis of easy magnetiza tion in the direction perpendicular to the film plane. Namely, a light rare earth element has the f level near a Fermi plane, unlike from a heavy rare earth element and, therefore, the contribution to the magneto-optical effect by f d transition is expected but the amorphous light rare earth-3d transition metal film does not become a perpendicular magnetized film when the heating of the substrate to about 200 deg.C is not executed during the film formation. Since the heavy rare earths such as Tb and Dy have the effect of enhancing the perpendicular magnetic anisotropy, the thetak on the short wavelength side is in creased by the light rare earths Pr and the perpendicular magnetic anisotropy can be enhanced by the heavy rare earths. The Kerr rotating angle at the short wavelength is increased in this way.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、書換え可能な光ディスクなどに用いられ、磁
気カー回転効果あるいはファラデー効果などの磁気光学
効果を用いて読み出すことのできる光磁気記録媒体に関
するものである。
Detailed Description of the Invention (Industrial Application Field) The present invention relates to a magneto-optical recording medium that is used for rewritable optical disks and the like, and that can be read using magneto-optic effects such as the magnetic Kerr rotation effect or the Faraday effect. It is related to.

(従来技術) 光磁気記録媒体の材料としては、主として以下の条件が
要求されている。
(Prior Art) The following conditions are mainly required for materials for magneto-optical recording media.

a、垂直磁化膜であること。a. It must be a perpendicularly magnetized film.

b、キュリー温度が100’C〜2000Cの間にある
こと。
b. Curie temperature is between 100'C and 2000C.

C9大きな保磁力を有してること。C9 Has a large coercive force.

d、カー回転角θkが大きいこと。d. Kerr rotation angle θk is large.

Fe、Co等にTb、Gdなどの重希土類を添加した場
合、磁気異方性が増加し垂直磁化膜になることが知られ
ている。こうしたことから、光磁気記録媒体の材料とし
てGdTbFe、 DyFe、 GdCo、 TbCo
、 TbDyFe。
It is known that when heavy rare earth elements such as Tb and Gd are added to Fe, Co, etc., magnetic anisotropy increases and a perpendicularly magnetized film is formed. For these reasons, GdTbFe, DyFe, GdCo, and TbCo are used as materials for magneto-optical recording media.
, TbDyFe.

TbFeCoなどの重希土類−3d遷移金属非晶質合金
薄膜が前記条件を満足し、かつ量産に適し読み出しノイ
ズのないことから有望とされている。特にTbFeCo
は、有望視され実用化のための検討が進められている。
A heavy rare earth-3d transition metal amorphous alloy thin film such as TbFeCo satisfies the above conditions, is suitable for mass production, and has no read noise, and is therefore considered to be promising. Especially TbFeCo
is seen as promising and is being studied for practical use.

(発明が解決しようとする問題点) 光磁気ディスクの高性能化として高記録密度化が求めら
れている。記録密度の増大のために、光磁気ディスクの
記録再生に用いられる半導体レーザーの波長を現在の8
30nmからさらに短波長化することが進められている
。TbFeCo等の重希土類−3d遷移金属系材料では
、波長が短くなるに従いθには徐々に減少する。このた
め、TbFeCo等の重希土類−3d遷移金属系材料を
記録媒体とした光磁気ディスクを短波長のレーザーによ
り記録再生した場合従来よりも再生出力の低下が起こる
。従って従来の記録媒体は高記録密度用媒体として適さ
ない。
(Problems to be Solved by the Invention) In order to improve the performance of magneto-optical disks, higher recording density is required. In order to increase the recording density, the wavelength of the semiconductor laser used for recording and reproducing magneto-optical disks has been reduced from the current 8.
Progress is being made to further shorten the wavelength from 30 nm. In heavy rare earth-3d transition metal materials such as TbFeCo, as the wavelength becomes shorter, θ gradually decreases. For this reason, when a magneto-optical disk using a heavy rare earth-3d transition metal material such as TbFeCo as a recording medium is recorded and reproduced using a short wavelength laser, the reproduction output is lower than in the past. Therefore, conventional recording media are not suitable as high recording density media.

本発明は、以上述べたような従来の問題点を解決するた
めになされたもので、高密度化に対応する媒体として短
波長側でTbFeCoよりもθにの大きな記録媒体を提
供することにある。
The present invention has been made in order to solve the conventional problems as described above, and it is an object of the present invention to provide a recording medium that has a larger θ than TbFeCo on the short wavelength side as a medium that can accommodate higher density. .

(問題を解決するための手段) 膜面に垂直な方向に磁気容易軸を有するPr−R−Fe
−Co−M(但し、MはTbおよびDyのうちの少なく
とも1種類以上、MはTi、Pt、Cr、Ta、Alの
うちの少なくとも1種類以上であること)の非晶質合金
薄膜からなることを特徴とする。
(Means for solving the problem) Pr-R-Fe with magnetic easy axis in the direction perpendicular to the film surface
-Co-M (provided that M is at least one of Tb and Dy, M is at least one of Ti, Pt, Cr, Ta, and Al). It is characterized by

(作用) 軽希土類元素は重希土類と異なりf準位がフェルミ面に
近いため、f−+d遷移による磁気光学効果への寄与が
期待できる。特にPrFeCo等の軽希土類−3d遷移
金属非晶質膜では、短波長側でのθにの増大が測定され
ている。しかし、軽希土類−3d遷移金属非晶質膜は、
成膜中に200°C程度の基板加熱を行わない場合垂直
磁化膜とは成らず、そのままでは基板にポリカーボネー
ト等の高分子を用いる光磁気ディスクの記録媒体として
使用することはできない。
(Function) Unlike heavy rare earth elements, light rare earth elements have an f level close to the Fermi surface, so they can be expected to contribute to the magneto-optical effect through the f-+d transition. In particular, in light rare earth-3d transition metal amorphous films such as PrFeCo, an increase in θ has been measured on the short wavelength side. However, light rare earth-3d transition metal amorphous films are
If the substrate is not heated to about 200° C. during film formation, a perpendicularly magnetized film will not be formed, and the film cannot be used as it is as a recording medium for a magneto-optical disk using a polymer such as polycarbonate for the substrate.

Tb、Dy等の重希土類は、垂直磁気異方性を高める効
果があることから、軽希土類Prで短波長側でのOkを
増大し重希土類(Tb、Dy)で垂直磁気異方性を高め
るという効果からこの両者を含むPr−R−Fe−Co
(但し、RはTbおよびDyのうちの少なくともどちら
が一方であること)系媒体が高記録密度用媒体として有
力であることを本発明者は見い出した。Coは、TbF
eもしくはDyFeにPrを添加した場合キュリー温度
が過剰に低下するため、それを増加することを目的に加
えられる。
Heavy rare earths such as Tb and Dy have the effect of increasing perpendicular magnetic anisotropy, so light rare earths Pr increase Ok on the short wavelength side, and heavy rare earths (Tb, Dy) increase perpendicular magnetic anisotropy. Because of this effect, Pr-R-Fe-Co containing both
(However, R is at least one of Tb and Dy.) The present inventors have found that this type of medium is effective as a medium for high recording density. Co is TbF
When Pr is added to e or DyFe, the Curie temperature decreases excessively, so Pr is added for the purpose of increasing it.

Pr、R,Fe、Coの原子濃度をそれぞれx、y、z
、wとしたとき、以下の関係式が成立することが望まし
い。
The atomic concentrations of Pr, R, Fe, and Co are x, y, and z, respectively.
, w, it is desirable that the following relational expression holds true.

1.00≧XfY+Z+W≧0.95 0.1≦X≦0.5 0.2≦Y≦0.3 x+y十z+w≧0.95としたのは、この非晶質合金
薄膜にMとしてTi、Pt、Ta、Cr、AI、Inの
いずれかの元素1種類以上を0.05以下(5%以下)
添加することが光磁気記録媒体の耐候性の向上に有効で
あり、また5%以下の添加であれば磁気光学特性の大き
な低下もないためである。添加する元素は、1種類また
は複数でもよい。また光磁気ディスクの用途によっては
この添加元素はなくてもかまわない。
1.00≧XfY+Z+W≧0.95 0.1≦X≦0.5 0.2≦Y≦0.3 0.05 or less (5% or less) of one or more elements of Pt, Ta, Cr, AI, and In
This is because addition is effective in improving the weather resistance of magneto-optical recording media, and addition of 5% or less does not cause a significant deterioration of magneto-optical properties. The number of elements to be added may be one or more. Further, depending on the use of the magneto-optical disk, this additive element may be omitted.

ま゛たPr濃度を0.1以上、0.5以下としたのは0
.1以下ではカー回転角の短波長側での増加が小さく、
0.5以上では合金膜が非晶質化しないためである。
If the Pr concentration is 0.1 or more and 0.5 or less, it is 0.
.. Below 1, the increase in the Kerr rotation angle on the short wavelength side is small;
This is because if it is 0.5 or more, the alloy film will not become amorphous.

前述したように、TbまたはDyは垂直磁気異方性を高
める効果がある。このような効果のある組成範囲は限ら
れており0.2以上、0.3以下の範囲でこの非晶質合
金薄膜は垂直磁気異方性が大きくかつ保磁力も大きくな
りこの組成範囲が光磁気記録媒体として適している。な
お、重希土類元素はTbのみ添加してもよく、あるいは
Dyのみの添加でもよい。またTbおよびDyの両者の
添加でもよい。
As mentioned above, Tb or Dy has the effect of increasing perpendicular magnetic anisotropy. The composition range in which this effect occurs is limited, and in the range of 0.2 or more and 0.3 or less, this amorphous alloy thin film has a large perpendicular magnetic anisotropy and a large coercive force, and this composition range becomes optical. Suitable as a magnetic recording medium. Note that, as the heavy rare earth element, only Tb or only Dy may be added. Further, both Tb and Dy may be added.

Coは、Pr、Tb、Dyの添加により低下したキュリ
ー温度を増加させる効果がある。このco組成を調節す
ることによりキュリー温度を記録再生に適当な温度範囲
(100’C〜200°C)にすることができる。
Co has the effect of increasing the Curie temperature, which has been lowered by the addition of Pr, Tb, and Dy. By adjusting the Co composition, the Curie temperature can be adjusted to a temperature range (100'C to 200°C) suitable for recording and reproduction.

(実施例) 3極RFマグネトロンスパツタリングにより、ガラス基
板上に本発明にしたがって光磁気記録媒体の成膜を実施
した。Fe86Co2oターゲツト上に5mm角のPr
、Tb、Dyチップを配列した複合ターゲットを用い、
希土類組成を変化させた非晶質合金薄膜を作成した。到
達真空度は3X10 ’Torr以下とし、スパッタガ
スにArを用いカス圧7X10=Torrとした。
(Example) A magneto-optical recording medium according to the present invention was formed on a glass substrate by three-pole RF magnetron sputtering. 5mm square Pr on Fe86Co2o target
, Tb, using a composite target with an array of Dy chips,
We created amorphous alloy thin films with varying rare earth compositions. The ultimate degree of vacuum was set to 3×10' Torr or less, Ar was used as the sputtering gas, and the gas pressure was set to 7×10=Torr.

投入電力は、300Wである。膜厚は、10100n定
とした。第1図にこのようにして作成した試料のPr組
成によるカー回転θにの変化を示す。θには短波長にお
けるθにの増加を明瞭に表すために500nmと900
nmのθにの比(Ok(500nm)/θk(900n
m))により示した。Prの添加にともない、明かな短
波長におけるθにの増加がみられる。
The input power was 300W. The film thickness was set to 10100n. FIG. 1 shows the change in Kerr rotation θ depending on the Pr composition of the sample thus prepared. θ is 500 nm and 900 nm to clearly represent the increase in θ at short wavelengths.
The ratio of nm to θ (Ok(500nm)/θk(900n
m)). With the addition of Pr, there is a clear increase in θ at short wavelengths.

(発明の効果) 以上のように、本発明にしたがって作成した光磁気記録
媒体は短波長におけるカー回転角の増加がみられ、従来
の光磁気記録媒体よりも高密度化記録に適するという効
果を有する。
(Effects of the Invention) As described above, the magneto-optical recording medium produced according to the present invention exhibits an increase in the Kerr rotation angle at short wavelengths, and has the effect of being more suitable for high-density recording than conventional magneto-optical recording media. have

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、この発明に従った光磁気記録媒体におけるP
r組成によるカー回転角Okの変化を示す図である。
FIG. 1 shows P in the magneto-optical recording medium according to the present invention.
FIG. 3 is a diagram showing changes in Kerr rotation angle Ok depending on r composition.

Claims (1)

【特許請求の範囲】 (1)膜面に垂直な方向に磁気容易軸を有するPr−R
−Fe−Co−M(但し、RはTbおよびDyのうちの
1種類以上、MはTi,Pt,Cr,Ta,Al,In
のうちの少なくとも1種類以上であること)の非晶質合
金薄膜からなる光磁気記録媒体。 (2)Pr,R,Fe,Coの原子濃度をそれぞれX,
Y,Z,Wとしたとき、 1.00≧X+Y+Z+W≧0.95 0.1≦X≦0.5 0.2≦Y≦0.3 の関係を満足する特許請求の範囲第1項に記載されてい
る光磁気記録媒体。
[Claims] (1) Pr-R having a magnetic easy axis in the direction perpendicular to the film surface
-Fe-Co-M (where, R is one or more of Tb and Dy, M is Ti, Pt, Cr, Ta, Al, In
A magneto-optical recording medium comprising an amorphous alloy thin film of at least one of the following. (2) The atomic concentrations of Pr, R, Fe, and Co are
Claim 1 that satisfies the following relationships, where Y, Z, and W: 1.00≧X+Y+Z+W≧0.95 0.1≦X≦0.5 0.2≦Y≦0.3 magneto-optical recording media.
JP19150488A 1988-07-29 1988-07-29 Magneto-optical recording medium Pending JPH0240151A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19150488A JPH0240151A (en) 1988-07-29 1988-07-29 Magneto-optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19150488A JPH0240151A (en) 1988-07-29 1988-07-29 Magneto-optical recording medium

Publications (1)

Publication Number Publication Date
JPH0240151A true JPH0240151A (en) 1990-02-08

Family

ID=16275751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19150488A Pending JPH0240151A (en) 1988-07-29 1988-07-29 Magneto-optical recording medium

Country Status (1)

Country Link
JP (1) JPH0240151A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19527221A1 (en) * 1995-07-17 1997-02-06 Samsung Electronics Co Ltd Magneto-optical recording medium for short wavelengths

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19527221A1 (en) * 1995-07-17 1997-02-06 Samsung Electronics Co Ltd Magneto-optical recording medium for short wavelengths
DE19527221B4 (en) * 1995-07-17 2005-06-30 Samsung Electronics Co., Ltd., Suwon Magneto-optical recording medium for short wavelengths

Similar Documents

Publication Publication Date Title
JP3072812B2 (en) Magneto-optical recording medium and method of reproducing information from the medium
US4995024A (en) Magneto-optical recording element
JPS6115308A (en) Photomagnetic recording material
US5265073A (en) Overwritable magneto-optical recording medium having two-layer magnetic films wherein one of the films contains one or more of Cu, Ag, Ti, Mn, B, Pt, Si, Ge, Cr and Al, and a method of recording on the same
JPS6134744A (en) Photoelectromagnetic recording medium
US6146740A (en) Magnetic recording medium and method of fabricating the same
US5965286A (en) Magneto-optical recording medium
US5993937A (en) Magneto-optic recording medium and method of fabricating the same
US5958575A (en) Magneto-optical recording medium
US5100741A (en) Magneto-optic recording systems
JPH0240151A (en) Magneto-optical recording medium
US5710746A (en) Magneto-optical recording medium and reading method with magnetic layers of different coercivity
US5529854A (en) Magneto-optic recording systems
EP0245743B1 (en) Magneto-optical recording medium
JPH0570922B2 (en)
JPH0555941B2 (en)
JPS60246041A (en) Photo thermomagnetic recording medium
JPH0350344B2 (en)
JPS60173746A (en) Photoelectromagnetic recording medium
JP2693832B2 (en) Magneto-optical recording medium
JPH08315435A (en) Magneto-optical recording medium
JPH0445898B2 (en)
KR100225108B1 (en) Optic-magneto recording medium
JP2957425B2 (en) Magneto-optical disk and method of manufacturing the same
JPH0792936B2 (en) Method for manufacturing magneto-optical recording element