JPH0239243Y2 - - Google Patents
Info
- Publication number
- JPH0239243Y2 JPH0239243Y2 JP1985039326U JP3932685U JPH0239243Y2 JP H0239243 Y2 JPH0239243 Y2 JP H0239243Y2 JP 1985039326 U JP1985039326 U JP 1985039326U JP 3932685 U JP3932685 U JP 3932685U JP H0239243 Y2 JPH0239243 Y2 JP H0239243Y2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- interference
- tapered
- light
- interference filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985039326U JPH0239243Y2 (OSRAM) | 1985-03-18 | 1985-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985039326U JPH0239243Y2 (OSRAM) | 1985-03-18 | 1985-03-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61154555U JPS61154555U (OSRAM) | 1986-09-25 |
| JPH0239243Y2 true JPH0239243Y2 (OSRAM) | 1990-10-22 |
Family
ID=30547175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985039326U Expired JPH0239243Y2 (OSRAM) | 1985-03-18 | 1985-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0239243Y2 (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0827234B2 (ja) * | 1987-06-10 | 1996-03-21 | 株式会社堀場製作所 | 赤外線ガス分析計 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5391595U (OSRAM) * | 1976-12-23 | 1978-07-26 | ||
| DE3041375A1 (de) * | 1980-11-03 | 1982-06-09 | Siemens AG, 1000 Berlin und 8000 München | Optische filteranordnung mit interferenzfiltern |
-
1985
- 1985-03-18 JP JP1985039326U patent/JPH0239243Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61154555U (OSRAM) | 1986-09-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5949934U (ja) | 分光光度計 | |
| US7038778B2 (en) | Spectrometer and spectrally separating method | |
| US7957004B2 (en) | Interference filter | |
| JPH0239243Y2 (OSRAM) | ||
| US5371596A (en) | Optical apparatus components having spectrally overlapping characteristics for measuring semiconductor layer thickness | |
| JPH0330847Y2 (OSRAM) | ||
| JPH07128231A (ja) | 赤外線式ガスセンサー | |
| JPH08247942A (ja) | 赤外線ガス分析計 | |
| WO2004076997A1 (ja) | 分光装置 | |
| JPH031615B2 (OSRAM) | ||
| EP0462599B1 (en) | Apparatus and method for etch rate monitoring | |
| JP3309957B2 (ja) | 赤外線検出素子 | |
| JP4524087B2 (ja) | 吸光式分析計 | |
| JPH11271215A (ja) | 表面プラズモン共鳴角検出装置 | |
| CN109283136B (zh) | 具有大量程的光腔 | |
| JPH0419522B2 (OSRAM) | ||
| CN220454834U (zh) | 一种可响应多个波长的检测装置 | |
| JPH08226854A (ja) | 2色光センサおよび放射温度計 | |
| JP2012088098A (ja) | 光モジュール、及び光分析装置 | |
| JPH03144323A (ja) | レーザ波長測定装置 | |
| JPH0620131Y2 (ja) | 非分散型ガス分析計 | |
| JPS63308540A (ja) | 赤外線ガス分析計 | |
| JPH0612949U (ja) | ガス濃度測定装置 | |
| JPH0458139A (ja) | 赤外線光学装置 | |
| JPS631220Y2 (OSRAM) |