JPH0238931Y2 - - Google Patents
Info
- Publication number
- JPH0238931Y2 JPH0238931Y2 JP17908585U JP17908585U JPH0238931Y2 JP H0238931 Y2 JPH0238931 Y2 JP H0238931Y2 JP 17908585 U JP17908585 U JP 17908585U JP 17908585 U JP17908585 U JP 17908585U JP H0238931 Y2 JPH0238931 Y2 JP H0238931Y2
- Authority
- JP
- Japan
- Prior art keywords
- target
- groove
- groove ring
- ring
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 18
- 238000005477 sputtering target Methods 0.000 claims description 12
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 238000004544 sputter deposition Methods 0.000 description 10
- 238000005219 brazing Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17908585U JPH0238931Y2 (enrdf_load_stackoverflow) | 1985-11-22 | 1985-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17908585U JPH0238931Y2 (enrdf_load_stackoverflow) | 1985-11-22 | 1985-11-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6288750U JPS6288750U (enrdf_load_stackoverflow) | 1987-06-06 |
| JPH0238931Y2 true JPH0238931Y2 (enrdf_load_stackoverflow) | 1990-10-19 |
Family
ID=31121825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17908585U Expired JPH0238931Y2 (enrdf_load_stackoverflow) | 1985-11-22 | 1985-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238931Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-11-22 JP JP17908585U patent/JPH0238931Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6288750U (enrdf_load_stackoverflow) | 1987-06-06 |
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