JPS6288750U - - Google Patents

Info

Publication number
JPS6288750U
JPS6288750U JP17908585U JP17908585U JPS6288750U JP S6288750 U JPS6288750 U JP S6288750U JP 17908585 U JP17908585 U JP 17908585U JP 17908585 U JP17908585 U JP 17908585U JP S6288750 U JPS6288750 U JP S6288750U
Authority
JP
Japan
Prior art keywords
sputtering target
diameter
groove ring
peripheral surface
inner peripheral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17908585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238931Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17908585U priority Critical patent/JPH0238931Y2/ja
Publication of JPS6288750U publication Critical patent/JPS6288750U/ja
Application granted granted Critical
Publication of JPH0238931Y2 publication Critical patent/JPH0238931Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17908585U 1985-11-22 1985-11-22 Expired JPH0238931Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17908585U JPH0238931Y2 (enrdf_load_stackoverflow) 1985-11-22 1985-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17908585U JPH0238931Y2 (enrdf_load_stackoverflow) 1985-11-22 1985-11-22

Publications (2)

Publication Number Publication Date
JPS6288750U true JPS6288750U (enrdf_load_stackoverflow) 1987-06-06
JPH0238931Y2 JPH0238931Y2 (enrdf_load_stackoverflow) 1990-10-19

Family

ID=31121825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17908585U Expired JPH0238931Y2 (enrdf_load_stackoverflow) 1985-11-22 1985-11-22

Country Status (1)

Country Link
JP (1) JPH0238931Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0238931Y2 (enrdf_load_stackoverflow) 1990-10-19

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