JPH0238468U - - Google Patents
Info
- Publication number
- JPH0238468U JPH0238468U JP11555088U JP11555088U JPH0238468U JP H0238468 U JPH0238468 U JP H0238468U JP 11555088 U JP11555088 U JP 11555088U JP 11555088 U JP11555088 U JP 11555088U JP H0238468 U JPH0238468 U JP H0238468U
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- gas
- pipe
- exhaust
- reaction tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 10
- 239000002699 waste material Substances 0.000 claims description 3
- 239000012495 reaction gas Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 3
- 230000007797 corrosion Effects 0.000 claims 1
- 238000005260 corrosion Methods 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11555088U JPH0638114Y2 (ja) | 1988-08-31 | 1988-08-31 | 縦形炉の排気ガス・液体処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11555088U JPH0638114Y2 (ja) | 1988-08-31 | 1988-08-31 | 縦形炉の排気ガス・液体処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0238468U true JPH0238468U (de) | 1990-03-14 |
| JPH0638114Y2 JPH0638114Y2 (ja) | 1994-10-05 |
Family
ID=31357311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11555088U Expired - Lifetime JPH0638114Y2 (ja) | 1988-08-31 | 1988-08-31 | 縦形炉の排気ガス・液体処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0638114Y2 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03229414A (ja) * | 1990-02-05 | 1991-10-11 | Tokyo Electron Sagami Ltd | 熱処理装置 |
| JPH0417324A (ja) * | 1990-05-10 | 1992-01-22 | Shin Etsu Handotai Co Ltd | 半導体ウエーハの処理装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000349027A (ja) * | 1999-05-27 | 2000-12-15 | Applied Materials Inc | 半導体製造装置 |
-
1988
- 1988-08-31 JP JP11555088U patent/JPH0638114Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03229414A (ja) * | 1990-02-05 | 1991-10-11 | Tokyo Electron Sagami Ltd | 熱処理装置 |
| JPH0417324A (ja) * | 1990-05-10 | 1992-01-22 | Shin Etsu Handotai Co Ltd | 半導体ウエーハの処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0638114Y2 (ja) | 1994-10-05 |