JPH0237766Y2 - - Google Patents
Info
- Publication number
- JPH0237766Y2 JPH0237766Y2 JP3632386U JP3632386U JPH0237766Y2 JP H0237766 Y2 JPH0237766 Y2 JP H0237766Y2 JP 3632386 U JP3632386 U JP 3632386U JP 3632386 U JP3632386 U JP 3632386U JP H0237766 Y2 JPH0237766 Y2 JP H0237766Y2
- Authority
- JP
- Japan
- Prior art keywords
- movable plate
- air cylinder
- guide rail
- board
- case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 description 9
- 238000007599 discharging Methods 0.000 description 4
- 238000003860 storage Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3632386U JPH0237766Y2 (pm) | 1986-03-14 | 1986-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3632386U JPH0237766Y2 (pm) | 1986-03-14 | 1986-03-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62150408U JPS62150408U (pm) | 1987-09-24 |
| JPH0237766Y2 true JPH0237766Y2 (pm) | 1990-10-12 |
Family
ID=30846619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3632386U Expired JPH0237766Y2 (pm) | 1986-03-14 | 1986-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0237766Y2 (pm) |
-
1986
- 1986-03-14 JP JP3632386U patent/JPH0237766Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62150408U (pm) | 1987-09-24 |
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