JPH0235436U - - Google Patents
Info
- Publication number
- JPH0235436U JPH0235436U JP11397788U JP11397788U JPH0235436U JP H0235436 U JPH0235436 U JP H0235436U JP 11397788 U JP11397788 U JP 11397788U JP 11397788 U JP11397788 U JP 11397788U JP H0235436 U JPH0235436 U JP H0235436U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- wafers
- large number
- gas
- diffusion furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11397788U JPH0235436U (fi) | 1988-08-29 | 1988-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11397788U JPH0235436U (fi) | 1988-08-29 | 1988-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0235436U true JPH0235436U (fi) | 1990-03-07 |
Family
ID=31354305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11397788U Pending JPH0235436U (fi) | 1988-08-29 | 1988-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0235436U (fi) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0410531A (ja) * | 1990-04-27 | 1992-01-14 | Toshiba Ceramics Co Ltd | 縦型拡散炉 |
-
1988
- 1988-08-29 JP JP11397788U patent/JPH0235436U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0410531A (ja) * | 1990-04-27 | 1992-01-14 | Toshiba Ceramics Co Ltd | 縦型拡散炉 |