JPH02106823U - - Google Patents
Info
- Publication number
- JPH02106823U JPH02106823U JP1430089U JP1430089U JPH02106823U JP H02106823 U JPH02106823 U JP H02106823U JP 1430089 U JP1430089 U JP 1430089U JP 1430089 U JP1430089 U JP 1430089U JP H02106823 U JPH02106823 U JP H02106823U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- conveying
- lamp annealing
- heat
- annealing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000137 annealing Methods 0.000 claims description 4
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1430089U JPH02106823U (fi) | 1989-02-09 | 1989-02-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1430089U JPH02106823U (fi) | 1989-02-09 | 1989-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02106823U true JPH02106823U (fi) | 1990-08-24 |
Family
ID=31225378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1430089U Pending JPH02106823U (fi) | 1989-02-09 | 1989-02-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02106823U (fi) |
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1989
- 1989-02-09 JP JP1430089U patent/JPH02106823U/ja active Pending