JPH0238467U - - Google Patents
Info
- Publication number
- JPH0238467U JPH0238467U JP11554888U JP11554888U JPH0238467U JP H0238467 U JPH0238467 U JP H0238467U JP 11554888 U JP11554888 U JP 11554888U JP 11554888 U JP11554888 U JP 11554888U JP H0238467 U JPH0238467 U JP H0238467U
- Authority
- JP
- Japan
- Prior art keywords
- cap
- reaction
- gas
- reaction tube
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 8
- 239000012495 reaction gas Substances 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11554888U JPH0238467U (fi) | 1988-08-31 | 1988-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11554888U JPH0238467U (fi) | 1988-08-31 | 1988-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0238467U true JPH0238467U (fi) | 1990-03-14 |
Family
ID=31357307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11554888U Pending JPH0238467U (fi) | 1988-08-31 | 1988-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238467U (fi) |
-
1988
- 1988-08-31 JP JP11554888U patent/JPH0238467U/ja active Pending