JPH0234527Y2 - - Google Patents
Info
- Publication number
- JPH0234527Y2 JPH0234527Y2 JP10411186U JP10411186U JPH0234527Y2 JP H0234527 Y2 JPH0234527 Y2 JP H0234527Y2 JP 10411186 U JP10411186 U JP 10411186U JP 10411186 U JP10411186 U JP 10411186U JP H0234527 Y2 JPH0234527 Y2 JP H0234527Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- seat
- gas
- ultra
- valve body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011247 coating layer Substances 0.000 claims description 12
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 5
- 239000007769 metal material Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 79
- 238000010926 purge Methods 0.000 description 24
- 238000000605 extraction Methods 0.000 description 12
- 239000012535 impurity Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 7
- 238000003860 storage Methods 0.000 description 7
- 206010037544 Purging Diseases 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000001272 nitrous oxide Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Landscapes
- Lift Valve (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10411186U JPH0234527Y2 (enrdf_load_stackoverflow) | 1986-07-07 | 1986-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10411186U JPH0234527Y2 (enrdf_load_stackoverflow) | 1986-07-07 | 1986-07-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS639570U JPS639570U (enrdf_load_stackoverflow) | 1988-01-22 |
| JPH0234527Y2 true JPH0234527Y2 (enrdf_load_stackoverflow) | 1990-09-17 |
Family
ID=30977301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10411186U Expired JPH0234527Y2 (enrdf_load_stackoverflow) | 1986-07-07 | 1986-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0234527Y2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6218470B2 (ja) * | 2013-07-18 | 2017-10-25 | 株式会社フジキン | ダイヤフラム弁 |
| JP6894667B2 (ja) * | 2016-03-28 | 2021-06-30 | ナブテスコ株式会社 | シール構造、弁及びシール構造の製造方法 |
-
1986
- 1986-07-07 JP JP10411186U patent/JPH0234527Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS639570U (enrdf_load_stackoverflow) | 1988-01-22 |
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