JPH0232579B2 - - Google Patents
Info
- Publication number
- JPH0232579B2 JPH0232579B2 JP56170031A JP17003181A JPH0232579B2 JP H0232579 B2 JPH0232579 B2 JP H0232579B2 JP 56170031 A JP56170031 A JP 56170031A JP 17003181 A JP17003181 A JP 17003181A JP H0232579 B2 JPH0232579 B2 JP H0232579B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- sample
- reflected
- lens
- ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000002604 ultrasonography Methods 0.000 claims description 14
- 230000002452 interceptive effect Effects 0.000 claims 1
- 239000000523 sample Substances 0.000 description 32
- 238000005305 interferometry Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 238000003384 imaging method Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000003111 delayed effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000386 microscopy Methods 0.000 description 2
- 101000860173 Myxococcus xanthus C-factor Proteins 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- -1 silicon and aluminum Chemical class 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/0289—Internal structure, e.g. defects, grain size, texture
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56170031A JPS5871455A (ja) | 1981-10-26 | 1981-10-26 | 超音波顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56170031A JPS5871455A (ja) | 1981-10-26 | 1981-10-26 | 超音波顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5871455A JPS5871455A (ja) | 1983-04-28 |
| JPH0232579B2 true JPH0232579B2 (enrdf_load_stackoverflow) | 1990-07-20 |
Family
ID=15897315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56170031A Granted JPS5871455A (ja) | 1981-10-26 | 1981-10-26 | 超音波顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5871455A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04123067U (ja) * | 1991-04-22 | 1992-11-06 | 湯浅電池株式会社 | 把手付き蓄電池 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61210944A (ja) * | 1985-03-15 | 1986-09-19 | Hitachi Ltd | 超音波顕微鏡 |
| JP2019152598A (ja) * | 2018-03-06 | 2019-09-12 | 株式会社神戸製鋼所 | 超音波探傷用探触子 |
-
1981
- 1981-10-26 JP JP56170031A patent/JPS5871455A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04123067U (ja) * | 1991-04-22 | 1992-11-06 | 湯浅電池株式会社 | 把手付き蓄電池 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5871455A (ja) | 1983-04-28 |