JPH0231236U - - Google Patents

Info

Publication number
JPH0231236U
JPH0231236U JP11074788U JP11074788U JPH0231236U JP H0231236 U JPH0231236 U JP H0231236U JP 11074788 U JP11074788 U JP 11074788U JP 11074788 U JP11074788 U JP 11074788U JP H0231236 U JPH0231236 U JP H0231236U
Authority
JP
Japan
Prior art keywords
water tank
separation
extraction device
ultrasonic generator
separating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11074788U
Other languages
English (en)
Other versions
JPH056277Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11074788U priority Critical patent/JPH056277Y2/ja
Publication of JPH0231236U publication Critical patent/JPH0231236U/ja
Application granted granted Critical
Publication of JPH056277Y2 publication Critical patent/JPH056277Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • De-Stacking Of Articles (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Description

【図面の簡単な説明】
第１図は本考案ウエハー分離取出し装置の一実
施例を示す縦断正面図、第２図は他の実施例を示
す縦断正面図である。 尚、図中、１：水槽、２：超音波発生装置、４
：吸着装置、５：ブロツク状ウエハー、５′：ウ
エハー。

Claims (1)

    【実用新案登録請求の範囲】
  1. 開口部を有する水槽内に収容されたブロツク状
    ウエハーを吸着装置によつて一枚ずつ分離せしめ
    て取出すウエハー分離取出し装置において、上記
    水槽の壁面に超音波発生装置を設けたことを特徴
    とするウエハー分離取出し装置。
JP11074788U 1988-08-23 1988-08-23 Expired - Lifetime JPH056277Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11074788U JPH056277Y2 (ja) 1988-08-23 1988-08-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11074788U JPH056277Y2 (ja) 1988-08-23 1988-08-23

Publications (2)

Publication Number Publication Date
JPH0231236U true JPH0231236U (ja) 1990-02-27
JPH056277Y2 JPH056277Y2 (ja) 1993-02-18

Family

ID=31348188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11074788U Expired - Lifetime JPH056277Y2 (ja) 1988-08-23 1988-08-23

Country Status (1)

Country Link
JP (1) JPH056277Y2 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016146446A (ja) * 2015-02-09 2016-08-12 株式会社ディスコ ウエーハの生成方法
JP2016146448A (ja) * 2015-02-09 2016-08-12 株式会社ディスコ ウエーハの生成方法
JP2016146447A (ja) * 2015-02-09 2016-08-12 株式会社ディスコ ウエーハの生成方法
JP2019102513A (ja) * 2017-11-29 2019-06-24 株式会社ディスコ 剥離装置
JP2021122860A (ja) * 2020-01-31 2021-08-30 株式会社荏原製作所 基板処理装置および基板処理方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016146446A (ja) * 2015-02-09 2016-08-12 株式会社ディスコ ウエーハの生成方法
JP2016146448A (ja) * 2015-02-09 2016-08-12 株式会社ディスコ ウエーハの生成方法
JP2016146447A (ja) * 2015-02-09 2016-08-12 株式会社ディスコ ウエーハの生成方法
JP2019102513A (ja) * 2017-11-29 2019-06-24 株式会社ディスコ 剥離装置
JP2021122860A (ja) * 2020-01-31 2021-08-30 株式会社荏原製作所 基板処理装置および基板処理方法

Also Published As

Publication number Publication date
JPH056277Y2 (ja) 1993-02-18

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