JPH02301705A - Method for assembling lens and optical semiconductor assembly - Google Patents

Method for assembling lens and optical semiconductor assembly

Info

Publication number
JPH02301705A
JPH02301705A JP12246089A JP12246089A JPH02301705A JP H02301705 A JPH02301705 A JP H02301705A JP 12246089 A JP12246089 A JP 12246089A JP 12246089 A JP12246089 A JP 12246089A JP H02301705 A JPH02301705 A JP H02301705A
Authority
JP
Japan
Prior art keywords
lens
holder
optical semiconductor
outer cylinder
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12246089A
Other languages
Japanese (ja)
Inventor
Jun Kojima
小島 純
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12246089A priority Critical patent/JPH02301705A/en
Publication of JPH02301705A publication Critical patent/JPH02301705A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To increase the degree of optical coupling and to obtain stability by moving and adjusting a holder outer cylinder finely in an X-Y direction by using clamping bodies which are fixed to an arm plate across an elastic body. CONSTITUTION:While the edge of the flange 11a of the holder outer cylinder 11 is pressed by a couple of clamping bodies 40 which are fixed to the arm plate 21 across the elastic body 41, an X-Y fine adjusting device 20 is driven to slides the flange 11a on the surface 2a of a base 1. The lower end surface of the flange 11a, therefore, contacts the surface 2a of the base 1 and there is no gap left. In this state, the holder outer cylinder 11 is welded to a top surface plate part 2 with a laser and then a welding defect is prevented from being generated. Consequently, the lens and photoconductor assembly which has the high degree of optical coupling and is stable is obtained.

Description

【発明の詳細な説明】 〔概要〕 発光素子、受光素子等の光半導体素子とレンズとを、光
結合するように組合わせた、レンズ・光半導体アセンブ
リの組立方法に関し、 レンズと光半導体素子との関係位置が確保され、光結合
度が高くて安定したレンズ・光半導体アセンブリを提供
することを目的とし、 軸心孔にレンズを押入・挿着したホルダ内筒、及び軸心
に該ホルダ内筒が螺着するねじ孔を有するホルダ外筒よ
りなるレンズホルダと、基台の上面板部を垂直に貫通す
る貫通孔の中心線上で、該上面板部の下方の所望の位置
に搭載された光半導体素子とを備え、該ホルダ外筒の筒
部を該貫通孔に遊挿し、該ホルダ外筒のフランジの下端
面を該上面板部の表面に当接した状態で、該レンズホル
ダを該基台に固定して、該光半導体素子と該レンズとが
光結合するよう構成したレンズ・光半導体アセンブリの
組立にあたり、X−Y微動装置のアーム板の下面に、弾
性体を介して一対の挟持体を固着し、該挟持体の下端部
のテーパー面で該ホルダ外筒のフランジの縁を押圧しな
がら、該X−Y微動装置を駆動することで、該レンズの
X−Y方向の位置を調整し、調整ドライバを用いて、該
ホルダ内筒を螺回することで該レンズのZ方向の位置を
調整した後に、該ホルダ外筒を該上面板部に、該ホルダ
内筒を該ホルダ外筒に、それぞれレーザ溶接するという
構成とする。
[Detailed Description of the Invention] [Summary] This invention relates to a method for assembling a lens/optical semiconductor assembly in which an optical semiconductor element such as a light emitting element or a light receiving element is combined with a lens so as to optically couple the lens, the optical semiconductor element, etc. The objective is to provide a stable lens/optical semiconductor assembly with a high degree of optical coupling, in which the relative position of A lens holder consisting of a holder outer cylinder having a threaded hole into which the cylinder is screwed, and a lens holder mounted at a desired position below the top plate of the base on the center line of a through hole that vertically passes through the top plate of the base. The cylindrical part of the holder outer cylinder is loosely inserted into the through hole, and the lens holder is inserted into the lens holder with the lower end surface of the flange of the holder outer cylinder in contact with the surface of the upper plate part. When assembling a lens/optical semiconductor assembly that is fixed to a base so that the optical semiconductor element and the lens are optically coupled, a pair of The position of the lens in the X-Y direction is adjusted by fixing the clamping body and driving the X-Y fine movement device while pressing the edge of the flange of the holder outer cylinder with the tapered surface of the lower end of the clamping body. After adjusting the position of the lens in the Z direction by screwing the holder inner cylinder using an adjustment driver, attach the holder outer cylinder to the upper plate part and the holder inner cylinder to the holder. The configuration is such that each of the outer cylinders is laser welded.

〔産業上の利用分野] 本発明は、発光素子、受光素子等の光半導体素子とレン
ズとを、光結合するように組合わせた、レンズ・光半導
体アセンブリの組立方法に関す。
[Industrial Application Field] The present invention relates to a method for assembling a lens/optical semiconductor assembly in which an optical semiconductor element such as a light emitting element or a light receiving element and a lens are combined so as to be optically coupled.

近年は第3図に示すようなレンズ・光半導体アセンブリ
が提供されている。
In recent years, a lens/optical semiconductor assembly as shown in FIG. 3 has been provided.

第3図において、1は、本体の上部に庇状の上面板部2
を水平に突出した、ステンレス鋼等よりなる基台であっ
て、上面板部2の中心部に、上面板部2を垂直に貫通す
る内径が所望に大きい貫通孔3を設けである。
In Fig. 3, 1 is an eave-shaped top plate part 2 on the top of the main body.
This is a base made of stainless steel or the like, which protrudes horizontally, and is provided with a through hole 3 having a desirably large inner diameter and extending vertically through the upper plate part 2 at the center of the upper plate part 2.

5は、素子実装板6に搭載された発光素子、受光素子等
の光半導体素子である。光半導体素子5の発光面(また
は受光面)が貫通孔3の中心線にほぼ一致するように素
子実装板6は、垂直の一側面が基台1の側壁にレーザ溶
接されて、上面板部2の下方に固着されている。
Reference numeral 5 denotes optical semiconductor elements such as a light emitting element and a light receiving element mounted on the element mounting board 6. One vertical side of the element mounting board 6 is laser welded to the side wall of the base 1 so that the light emitting surface (or light receiving surface) of the optical semiconductor element 5 substantially coincides with the center line of the through hole 3, and the upper surface plate part It is fixed below 2.

10は、ホルダ外筒11と、軸心孔12aの下部にレン
ズ15を圧入したホルダ内筒12とで構成された、ステ
ンレス鋼等よりなるレンズホルダである。
Reference numeral 10 denotes a lens holder made of stainless steel or the like, which is composed of a holder outer cylinder 11 and a holder inner cylinder 12 in which a lens 15 is press-fitted into the lower part of an axial hole 12a.

ホルダ外筒11は、軸心を貫通ずるねし孔を有する円筒
で、筒部の外形は貫通孔3の内径よりも小さい。またホ
ルダ外筒11の筒部の上端面にはフランジllaを設け
である。
The holder outer cylinder 11 is a cylinder having a slotted hole passing through the axis, and the outer diameter of the cylinder portion is smaller than the inner diameter of the through hole 3. Further, a flange lla is provided on the upper end surface of the cylindrical portion of the holder outer cylinder 11.

外周面にねし山を螺刻したホルダ内筒I2は、そのねじ
部がホルダ外筒11のねじ孔に螺合することで、ホルダ
外筒11の軸心部に挿着されている。
The holder inner cylinder I2, which has threads carved on its outer peripheral surface, is inserted into the axial center of the holder outer cylinder 11 by having its threaded portion screwed into a screw hole of the holder outer cylinder 11.

レンズホルダ10は、ホルダ外筒11の筒部を基台1の
貫通孔3に遊挿し、フランジIlaの下端面を上面板部
2の表面2aに当接させることで、基台1に装着される
The lens holder 10 is attached to the base 1 by loosely inserting the cylindrical part of the holder outer cylinder 11 into the through hole 3 of the base 1 and bringing the lower end surface of the flange Ila into contact with the surface 2a of the upper plate part 2. Ru.

そして、レンズ15と光半導体素子5とが光結合するよ
うレンズ15の位置を調整した後に、ホルダ外筒11を
上面板部2に、レーザ溶接(図示したM点)し、ホルダ
内筒12をホルダ外筒11にレーザ溶接(図示したN点
)して組立てである。
After adjusting the position of the lens 15 so that the lens 15 and the optical semiconductor element 5 are optically coupled, the holder outer cylinder 11 is laser welded to the upper plate part 2 (point M in the figure), and the holder inner cylinder 12 is It is assembled by laser welding (point N in the figure) to the holder outer cylinder 11.

したがって、光半導体素子5が発光素子の場合は、発光
素子からほぼ円錐体状に拡開して出射され光は、レンズ
15により平行ビームになって直進し、図示省略した光
学素子(例えば光ファイバにづ− 入射する。
Therefore, when the optical semiconductor element 5 is a light emitting element, the light emitted from the light emitting element is expanded into a substantially conical shape, and is converted into a parallel beam by the lens 15 and travels straight through an optical element (for example, an optical fiber), which is not shown. Nizu- Inject.

また、光半導体素子5が受光素子の場合は、図示省略し
た光学素子側からレンズ15に投射された光ビームが、
レンズ15によって受光素子の受光面に集光する。
In addition, when the optical semiconductor element 5 is a light receiving element, the light beam projected onto the lens 15 from the optical element side (not shown) is
The lens 15 focuses the light onto the light receiving surface of the light receiving element.

上述のようなレンズ・光半導体アセンブリを組立てるに
は、レンズホルダ10を基台1の上面板部2上で移動調
整するのに、X−Y微動装置を用い、ホルダ内筒12を
上下方向に移動調整するのに、調整ドライバを用いてい
る。
To assemble the lens/optical semiconductor assembly as described above, an X-Y fine movement device is used to move and adjust the lens holder 10 on the top plate 2 of the base 1, and the holder inner tube 12 is moved vertically. An adjustment driver is used to adjust the movement.

〔従来の技術〕[Conventional technology]

第4図は従来の組立方法を示す断面図である。 FIG. 4 is a sectional view showing a conventional assembly method.

第4図において、25は、外周面にねじを螺刻した細長
い筒状の調整ドライバであって、軸心には光ビームが通
過する貫通孔26を穿設しである。そして、調整ドライ
バ25を回転操作し得るように、ねじ部27の上部に、
手で把持することが容易な形状の頭部を設けである。
In FIG. 4, reference numeral 25 denotes an elongated cylindrical adjustment driver with a screw threaded on its outer circumferential surface, and has a through hole 26 in its axis through which the light beam passes. Then, on the top of the threaded portion 27, so that the adjustment driver 25 can be rotated,
The head is shaped so that it can be easily held by hand.

また、調整ドライバ25のねじ部27の先端部の外径を
、ホルダ外筒11のねし孔に挿入し得るように小さく加
工し、さらにその先端にホルダ内筒12の上端面に設け
たずり割りに係合する一文字形刃先を設けである。
In addition, the outer diameter of the tip of the threaded portion 27 of the adjustment driver 25 is made small so that it can be inserted into the threaded hole of the holder outer cylinder 11, and a shear provided on the upper end surface of the holder inner cylinder 12 is added to the tip. It is equipped with a single character-shaped cutting edge that engages with the split.

21は、X−Y微動装置20に連結されたアーム板であ
って、x−Y微動装置20を駆動することで、基台1の
表面2aに平行する面」−を、X軸方向、及びY軸方向
に微細に移動する。
21 is an arm plate connected to the X-Y fine movement device 20, and by driving the x-Y fine movement device 20, the surface parallel to the surface 2a of the base 1 can be moved in the Move minutely in the Y-axis direction.

アーム板21の所望の位置にねじ孔21aを設げ、この
ねじ孔21aにねじ部27を螺合させて、刃先を下方に
して垂直に調整ドライバ25をアーム板21に装着しで
ある。
A screw hole 21a is provided at a desired position on the arm plate 21, a screw portion 27 is screwed into the screw hole 21a, and the adjusting driver 25 is mounted vertically on the arm plate 21 with the cutting edge facing downward.

一方、31は、下端面をほぼZ形にした固定挟持板であ
り、32は、下端面をほぼZ形にした可動挟持板32で
ある。
On the other hand, 31 is a fixed clamping plate whose lower end surface is approximately Z-shaped, and 32 is a movable clamping plate 32 whose lower end surface is approximately Z-shaped.

固定挟持板31は、アーム板21の下面に垂直に突出す
るよう固着しである。
The fixed clamping plate 31 is fixed to the lower surface of the arm plate 21 so as to protrude perpendicularly thereto.

固定挟持板31には、互いに平行し水平になるように、
操作バー33とガイドバー35とを装着しである。
On the fixed clamping plate 31, parallel to each other and horizontally,
An operation bar 33 and a guide bar 35 are attached.

= 7− 一方、可動挟持板32は、調整ドライバ25を挟んで固
定挟持板31とは反対側に位置した状態で、ガイドバー
35が孔を遊貫することで垂直に固定挟持板31に対向
して支持されている。
= 7- On the other hand, the movable clamping plate 32 is located on the opposite side of the fixed clamping plate 31 with the adjustment driver 25 in between, and the guide bar 35 passes freely through the hole, so that the movable clamping plate 32 faces the fixed clamping plate 31 vertically. and is supported.

操作バー33は、固定挟持板31に設けた孔を水平に遊
挿され、頭部と頚に嵌入したリングとで、固定挟持板3
1を挟持することで、固定挟持板31に装着されている
The operation bar 33 is inserted loosely horizontally into a hole provided in the fixed clamping plate 31, and is connected to the fixed clamping plate 3 by a ring fitted into the head and neck.
1 is mounted on the fixed clamping plate 31.

そして、操作バー33のねじ部を可動挟持板32のねし
孔に螺合させである。
Then, the threaded portion of the operation bar 33 is screwed into the threaded hole of the movable clamping plate 32.

したがって、操作バー33を回動することで、可動挟持
板32は固定挟持板31側に平行に引き寄せられたり、
或いは引き離なされる。
Therefore, by rotating the operation bar 33, the movable clamping plate 32 is drawn parallel to the fixed clamping plate 31,
Or be separated.

よって、可動挟持板32を引き寄せることで、固定挟持
板31と可動挟持板32のそれぞれのZ形端面が、レン
ズホルダ10のフランジの外周部を挟持する。
Therefore, by pulling the movable clamping plate 32, the Z-shaped end surfaces of the fixed clamping plate 31 and the movable clamping plate 32 clamp the outer peripheral portion of the flange of the lens holder 10.

上述のように構成した装置を用いて、レンズ・光半導体
アセンブリを組み立てるには、先ず、ホルダ外筒11の
筒部を基台1の貫通孔3に遊挿し、ホルダ外筒11のフ
ランジllaの下端面を」二面板部2の表面2aに当接
させて、レンズホルダ10を基台1に装着する。
To assemble a lens/optical semiconductor assembly using the apparatus configured as described above, first, the cylindrical part of the holder outer cylinder 11 is loosely inserted into the through hole 3 of the base 1, and the flange lla of the holder outer cylinder 11 is inserted. The lens holder 10 is mounted on the base 1 with its lower end surface in contact with the surface 2a of the diagonal plate 2.

そして、レンズ・光半導体アセンブリをX−Y微動装置
20にセントする。
Then, the lens/optical semiconductor assembly is placed in the X-Y fine movement device 20.

操作バー33を操作して一対の固定挟持板3■と可動挟
持板32とで、レンズホルダ10のフランジllaの外
周部を挟持する。
The operation bar 33 is operated to sandwich the outer circumference of the flange lla of the lens holder 10 between the pair of fixed clamping plates 3■ and the movable clamping plate 32.

また、調整ドライバ25を手で螺回操作して、その刃先
をホルダ内筒12に係合させる。
Further, the adjusting driver 25 is screwed by hand to engage its cutting edge with the holder inner cylinder 12.

一方、光半導体素子5が発光素子の場合は、発光素子を
発光状態にし、第4図に図示したように調整ドライバ2
5の上方に光出力を測定する検知器30をセットする。
On the other hand, when the optical semiconductor element 5 is a light emitting element, the light emitting element is brought into a light emitting state, and the adjustment driver 2
A detector 30 for measuring light output is set above 5.

そして、X−Y微動装置20を駆動して、レンズホルダ
10を表面2a上を摺動移動させて、レンズ15のX−
Y方向の位置を調整する。
Then, by driving the X-Y fine movement device 20, the lens holder 10 is slid on the surface 2a, and the X-Y movement of the lens 15 is moved.
Adjust the position in the Y direction.

また、調整ドライバ25を手で回転操作してホルダ内筒
12を上下方向に移動させて、レンズ15のZ方向の位
置を調整する。
Further, the position of the lens 15 in the Z direction is adjusted by rotating the adjustment driver 25 by hand to move the holder inner cylinder 12 in the vertical direction.

そして、検知器30が受光する光パワーが、最大値にな
るレンズ位置を求め、その状態でフランジ11aを上面
板部2にレーザ溶接して固着する。
Then, the lens position where the optical power received by the detector 30 becomes the maximum value is determined, and in this state, the flange 11a is laser welded and fixed to the upper plate portion 2.

次に調整ドライバ25.即ちアーム板21を上方に持ち
上げ、ホルダ内筒12の上端面をホルダ外筒11のねし
孔部分にレーザ溶接して固着することで、レンズ・光半
導体アセンブリの組立が終了する。
Next, adjustment driver 25. That is, the assembly of the lens/optical semiconductor assembly is completed by lifting the arm plate 21 upward and fixing the upper end surface of the holder inner cylinder 12 to the threaded hole of the holder outer cylinder 11 by laser welding.

なお、光半導体素子5が受光素子の場合は、調整ドライ
バ25の貫通孔26に平行ビーム光を投射し、受光素子
の光電流を測定する検知器を、受光素子に接続する。そ
して、発光素子の場合と同手順により、レンズホルダ1
0を基台1に、ホルダ内筒12をボルダ外筒11にレー
ザ溶接して固着する。
In addition, when the optical semiconductor element 5 is a light receiving element, a parallel beam of light is projected into the through hole 26 of the adjustment driver 25, and a detector for measuring the photocurrent of the light receiving element is connected to the light receiving element. Then, using the same procedure as for the light emitting element, attach the lens holder 1.
0 to the base 1 and the holder inner cylinder 12 to the boulder outer cylinder 11 by laser welding.

また、調整後の光半導体素子5とレンズ15との間隙は
、20μm前後の小さいものである。
Further, the gap between the optical semiconductor element 5 and the lens 15 after adjustment is as small as about 20 μm.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかしながら上記従来の組立方法は、一対の固定挟持板
31と可動挾持板32とで、レンズホルダ10のフラン
ジllaを挟持して、基台1の表面2a上を摺動移動さ
せている。
However, in the conventional assembly method described above, the flange lla of the lens holder 10 is held between a pair of fixed holding plates 31 and a movable holding plate 32, and is slid on the surface 2a of the base 1.

よって、表面2aとフランジllaの下端面の間にわず
かながら間隙があり、この状態でボルダ外筒11が基台
1にレーザ溶接される。
Therefore, there is a slight gap between the surface 2a and the lower end surface of the flange lla, and the boulder outer cylinder 11 is laser welded to the base 1 in this state.

したがって、この間隙が存在することにより溶接クラッ
ク等の溶接不良が発生して、レンズボルダ10の固定が
不充分になり、レンズ15とレンズ15との関係位置が
ずれて、光結合度が低下するという問題点があった。
Therefore, due to the existence of this gap, welding defects such as welding cracks occur, and the lens boulder 10 is insufficiently fixed, the relative positions of the lenses 15 are shifted, and the degree of optical coupling is reduced. There was a problem.

本発明はこのような点に鑑みて創作されたもので、レン
ズと光半導体素子との関係位置が確保され、光結合度が
高くて安定したレンズ・光半導体アセンブリを提供する
ことを目的としている。
The present invention was created in view of these points, and an object of the present invention is to provide a stable lens/optical semiconductor assembly in which the relative position between the lens and the optical semiconductor element is secured, the degree of optical coupling is high, and the optical semiconductor element is stable. .

〔課題を解決するための手段] 上記の目的を達成するために本発明は、第1図に例示し
たように、軸心孔L2aにレンズ15を押入・挿着した
ホルダ内筒12、及び軸心にボルダ内筒12が螺着する
ねし孔を有するホルダ外筒11よりなるレンズホルダ1
0と、基台1の上面板部2を垂直に貫通する貫通孔3の
中心線上で、上面板部2の下方の所望の位置に搭載され
た光半導体素子5とを備え、ボルダ外筒11の筒部を貫
通孔3に遊挿し、ホルダ外筒11のフランジの下端面を
上面板部2の表面に当接した状態でレンズホルダ10を
基台1に固定して、光半導体素子5とレンズ15とが光
結合するよう構成したレンズ・光半導体アセンブリを、
下記のようにして組み立てる。
[Means for Solving the Problems] In order to achieve the above object, the present invention provides a holder inner cylinder 12 in which a lens 15 is pushed and inserted into the shaft center hole L2a, and a shaft as illustrated in FIG. A lens holder 1 consisting of a holder outer cylinder 11 having a threaded hole in the center into which a boulder inner cylinder 12 is screwed.
0 and an optical semiconductor element 5 mounted at a desired position below the top plate part 2 on the center line of the through hole 3 vertically penetrating the top plate part 2 of the base 1. The lens holder 10 is loosely inserted into the through hole 3, and the lens holder 10 is fixed to the base 1 with the lower end surface of the flange of the holder outer cylinder 11 in contact with the surface of the upper plate part 2, and the optical semiconductor element 5 and A lens/optical semiconductor assembly configured to be optically coupled with the lens 15,
Assemble as shown below.

xx−y微動装置20のアーム板21の下面に、弾性体
41を介して−・対の挟持体40を固着し、挟持体40
の下端部のテーパー面でホルダ外筒11のフランジIl
aの縁を押圧しながら、X−Y微動装置20を駆動する
ことで、レンズ15のχ−Y方向の位置を調整する。
A pair of clamping bodies 40 are fixed to the lower surface of the arm plate 21 of the xx-y fine movement device 20 via an elastic body 41.
The flange Il of the holder outer cylinder 11 is connected to the tapered surface of the lower end of the
By driving the X-Y fine movement device 20 while pressing the edge of the lens 15, the position of the lens 15 in the χ-Y direction is adjusted.

また、アーム板21に螺合した調整ドライバ25を用い
て、ホルダ内筒12を螺回することで、レンズ15のZ
方向の位置を調整する。
In addition, by screwing the holder inner cylinder 12 using the adjustment driver 25 screwed onto the arm plate 21, the Z of the lens 15 can be adjusted.
Adjust the position of the direction.

その後、ホルダ外筒11を上面板部2に、ホルダ内筒1
2をホルダ外筒11に、それぞれレーザ溶接するものと
する。
After that, the holder outer cylinder 11 is attached to the upper plate part 2, and the holder inner cylinder 1 is attached to the top plate part 2.
2 shall be laser welded to the holder outer cylinder 11, respectively.

〔作用〕[Effect]

上述のように弾性体41を介してアーム板21に固着し
た一対の挟持体40で、ホルダ外筒11のフランジll
aの縁を押圧しながら、X−Y微動装置20を駆動して
、フランジllaを基台1の表面2aを摺動移動させて
いる。
As described above, the pair of clamping bodies 40 fixed to the arm plate 21 via the elastic body 41 are used to hold the flange ll of the holder outer cylinder 11.
While pressing the edge of a, the X-Y fine movement device 20 is driven to slide the flange lla on the surface 2a of the base 1.

したがって、フランジllaの下端面は基台1の表面2
aに密接していて間隙がない。このうような状態でホル
ダ外筒11を上面板部2にレーザ溶接しているので、溶
接不良が発生ずる恐れがない。
Therefore, the lower end surface of the flange lla is the surface 2 of the base 1.
It is in close contact with a and there is no gap. Since the holder outer cylinder 11 is laser welded to the top plate part 2 in this state, there is no possibility of welding defects occurring.

即ち、光結合度が高くて安定したレンズ・光半導体アセ
ンブリが得られる。
That is, a stable lens/optical semiconductor assembly with a high degree of optical coupling can be obtained.

〔実施例〕〔Example〕

以下図を参照しながら、本発明を具体的に説明する。な
お、企図を通じて同一符号は同一対象物を示す。
The present invention will be specifically described below with reference to the drawings. Note that the same reference numerals refer to the same objects throughout the plan.

第1回は本発明方法を示す実施例の断面図、第2図は本
発明方法の実施例の要部を示す斜視図である。
The first part is a sectional view of an embodiment of the method of the present invention, and FIG. 2 is a perspective view of a main part of the embodiment of the method of the present invention.

第1図において、外周面にねじを螺刻した細長い筒状の
調整ドライバ25には、軸心に光ビームが通過する貫通
孔26を穿設しである。また調整ドライバ25のねじ部
27の先端部には、レンズ・光半導体アセンブリのレン
ズホルダ10のホルダ内筒12の上端面に設けたすり割
りに係合する一文字形刃先を設けである。
In FIG. 1, an elongated cylindrical adjusting driver 25 with a screw threaded on its outer peripheral surface is provided with a through hole 26 at its axis through which a light beam passes. Further, the tip of the screw portion 27 of the adjustment driver 25 is provided with a single-letter-shaped cutting edge that engages with a slot provided on the upper end surface of the holder inner cylinder 12 of the lens holder 10 of the lens/optical semiconductor assembly.

このような調整ドライバ25を、x−Y微動装置20に
連結されたアーム板21のねし孔に螺合することで、刃
先を下方にして垂直にアーム板21に装着しである。
By screwing the adjustment driver 25 into a threaded hole in the arm plate 21 connected to the x-y fine movement device 20, it can be mounted vertically on the arm plate 21 with the cutting edge facing downward.

41は、例えば弾性あるゴムよりなる、筒形の弾性体4
1であって、中心を調整ドライバ25が貫通するように
、アーム板21の下面に接着剤を用いて固着しである。
41 is a cylindrical elastic body 4 made of elastic rubber, for example.
1, which is fixed to the lower surface of the arm plate 21 with adhesive so that the adjustment driver 25 passes through the center.

40は、平面視が弾性体41の外径に等しい金属よりな
る筒体を、垂直に切断して構成した、はぼ角柱形の挟持
体であって、第2図に示したように、その下端面は側面
視でテーパー面40aに形成しである。
Reference numeral 40 denotes a substantially prismatic holding body constructed by vertically cutting a cylinder made of metal whose plan view is equal to the outer diameter of the elastic body 41, and as shown in FIG. The lower end surface is formed into a tapered surface 40a when viewed from the side.

このように構成した一対の挟持体40を、テーパー面4
0aが内側に対向し、弾性体41の軸心に対称に、弾性
体41の下端面に接着剤を用いて固着しである。
A pair of clamping bodies 40 configured in this way are connected to the tapered surface 4
0a faces inside and is fixed to the lower end surface of the elastic body 41 using an adhesive, symmetrically with respect to the axis of the elastic body 41.

上Jのように構成した装置を用いて、レンズ・光半導体
アセンブリを組み立てるには、先ず、ホルダ外筒11の
筒部を基台1の貫通孔3に遊挿し、ホルダ外筒11のフ
ランジllaの下端面を上面板部2の表面2aに当接さ
せて、レンズホルダ10を基台1に装着する。
To assemble a lens/optical semiconductor assembly using the apparatus configured as above J, first, the cylindrical part of the holder outer cylinder 11 is loosely inserted into the through hole 3 of the base 1, and the flange lla of the holder outer cylinder 11 is inserted. The lens holder 10 is mounted on the base 1 with the lower end surface of the lens holder 10 in contact with the surface 2a of the upper plate portion 2.

そして、レンズ・光半導体アセンブリをx−Y微動装置
20にセットする。
Then, the lens/optical semiconductor assembly is set in the x-y fine movement device 20.

次にアーム板21を下降して、一対の挟持体40のそれ
ぞれのテーパー面40aで、ホルダ外筒11のフランジ
llaの縁を挟持押圧して、フランジ1.1aの下端面
を上面板部2の表面2aに弾接させる。
Next, the arm plate 21 is lowered, and the tapered surfaces 40a of the pair of clamping bodies 40 are used to clamp and press the edge of the flange lla of the holder outer cylinder 11, so that the lower end surface of the flange 1.1a is pressed onto the upper plate portion 2. is brought into elastic contact with the surface 2a.

なおこの際、アーム板21に螺合した調整ドライバ25
の刃先が、ホルダ内筒12のすり割りに係合するように
、予め調整ドライバ25の高さを設定しておくと、以後
の調整作業が容易である。
At this time, the adjustment driver 25 screwed onto the arm plate 21
If the height of the adjustment driver 25 is set in advance so that the cutting edge engages with the slot in the holder inner cylinder 12, subsequent adjustment work will be facilitated.

そして、検知器30で光結合度を観測しながら、X−Y
微動装置20を駆動して、レンズホルダ10を表面2a
上を摺動移動させて、レンズ15のX−Y方向の位置を
調整し、光半導体素子5とレンズ15の軸心を一致させ
る。
Then, while observing the degree of optical coupling with the detector 30,
Drive the fine movement device 20 to move the lens holder 10 to the surface 2a.
The upper part is slid to adjust the position of the lens 15 in the X-Y direction, and the axes of the optical semiconductor element 5 and the lens 15 are aligned.

また、調整ドライバ25を手で回転操作してホルダ内筒
12をホルダ外筒11のねじ孔内で上下方向に移動させ
て、レンズ15のZ方向の位置を調整して、レンズ15
の焦点位置を光半導体素子5の発光面(または受光面)
に一致させる。
Further, the adjustment driver 25 is rotated by hand to move the holder inner cylinder 12 in the vertical direction within the screw hole of the holder outer cylinder 11 to adjust the position of the lens 15 in the Z direction.
The focal position of the light emitting surface (or light receiving surface) of the optical semiconductor element 5
match.

調整作業が終了すると、挟持体40でレンズホルダ10
を押圧した状態で、フランジIlaの外周面の下部にレ
ーザを照射して、ホルダ外筒11を上面板部2にレーザ
溶接して固着する。
When the adjustment work is completed, hold the lens holder 10 with the holding body 40.
While pressed, a laser is irradiated to the lower part of the outer peripheral surface of the flange Ila to laser weld and fix the holder outer cylinder 11 to the upper plate part 2.

次に調整ドライバ25.即ちアーム板21を上方に持ち
上げ、ホルダ内筒12の上端面をホルダ外筒11のねし
孔部分にレーザ溶接して固着して、レンズ・光半導体ア
センブリの組立を終了させる。
Next, adjustment driver 25. That is, the arm plate 21 is lifted upward, and the upper end surface of the holder inner cylinder 12 is laser welded and fixed to the threaded hole portion of the holder outer cylinder 11, thereby completing the assembly of the lens/optical semiconductor assembly.

上述のように弾性体41を介してアーム板21に固着し
た一対の挟持体40で、ホルダ外筒11のフランll− ジllaの縁を押圧しながら、x−Y微動装置20を駆
動して、レンズホルダ10を基台1の表面2.IJ二を
摺動移動させているので、フランジIlaの下端面は基
台1の表面2aに弾接し密接している。
As described above, the x-Y fine movement device 20 is driven while pressing the edges of the flanges ll and lla of the holder outer cylinder 11 with the pair of clamping bodies 40 fixed to the arm plate 21 via the elastic body 41. , the lens holder 10 is placed on the surface 2. of the base 1. Since the IJ2 is slid, the lower end surface of the flange Ila is in elastic contact with the surface 2a of the base 1 and in close contact with it.

したがって、フランジllaの下端面と上面板部2の表
面2aとの間に間隙がなくて、溶接不良が発生ずる恐れ
がない。
Therefore, there is no gap between the lower end surface of the flange lla and the surface 2a of the upper plate portion 2, and there is no possibility of welding defects occurring.

また、弾性体41を設けであるので、挟持体40がフラ
ンジllaを押圧する力か弱すぎること或いは強すぎる
ことがな(て、X−Y方向の調整移動が円滑に行われる
Further, since the elastic body 41 is provided, the force with which the clamping body 40 presses the flange lla is neither too weak nor too strong (and adjustment movement in the X-Y direction is performed smoothly).

なお、弾性体41はゴムとは限らず、例えば板ばねであ
っても、同様の機能を果たす。
Note that the elastic body 41 is not limited to rubber; for example, a plate spring may perform the same function.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は、弾性体を介してアーム板
に固着した挟持体を用いて、ホルダ外筒をX−Y方向に
微細に移動調整するというレンズ・光半導体アセンブリ
の組立方法であって、得られるレンズ・光半導体アセン
ブリが、レンズと光半導体素子との関係位置がずれる恐
れがなくて、光結合度が高く、且つ安定しているという
、実用上で優れた効果がある。
As explained above, the present invention is a method for assembling a lens/optical semiconductor assembly in which the holder outer cylinder is finely moved and adjusted in the X-Y direction using a clamping body fixed to an arm plate via an elastic body. Therefore, the resulting lens/optical semiconductor assembly has excellent practical effects in that there is no fear that the relative position between the lens and the optical semiconductor element will shift, and the degree of optical coupling is high and stable.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明方法を示す実施例の断面図、第2図は本
発明方法の実施例の要部を示す斜視図、 第3図はレンズ・光半導体アセンブリの断面図、第4図
は従来方法を示す断面図である。 図において、 ■は基台、      2は上面板部、3は貫通孔、 
    5は光半導体素子、6は素子実装板、   1
0はレンズホルダ、11はホルダ外筒、   llaは
フランジ、12はホルダ内筒、   12aは軸心孔、
15はレンズ、 20はx−y微動装置、 21はアーム板、 25は調整ドライバ、 26は貫通孔、 30は検知器、 40は挟持体、 41は弾性体をそれぞれ示す。 肥      d マ   −
Fig. 1 is a cross-sectional view of an embodiment of the method of the present invention, Fig. 2 is a perspective view of the main part of the embodiment of the method of the present invention, Fig. 3 is a cross-sectional view of a lens/optical semiconductor assembly, and Fig. 4 is a cross-sectional view of an embodiment of the method of the present invention. FIG. 2 is a cross-sectional view showing a conventional method. In the figure, ■ is the base, 2 is the top plate, 3 is the through hole,
5 is an optical semiconductor element, 6 is an element mounting board, 1
0 is a lens holder, 11 is a holder outer cylinder, lla is a flange, 12 is a holder inner cylinder, 12a is an axial hole,
15 is a lens, 20 is an x-y fine movement device, 21 is an arm plate, 25 is an adjustment driver, 26 is a through hole, 30 is a detector, 40 is a clamping body, and 41 is an elastic body. fertilizer d ma -

Claims (1)

【特許請求の範囲】 軸心孔(12a)にレンズ(15)を押入・挿着したホ
ルダ内筒(12)、及び軸心に該ホルダ内筒(12)が
螺着するねじ孔を有するホルダ外筒(11)よりなるレ
ンズホルダ(10)と、基台(1)の上面板部(2)を
垂直に貫通する貫通孔(3)の中心線上で、該上面板部
(2)の下方の所望の位置に搭載された光半導体素子(
5)とを備え、 該ホルダ外筒(11)の筒部を該貫通孔(3)に遊挿し
、該ホルダ外筒(11)のフランジの下端面を該上面板
部(2)の表面に当接した状態で、該レンズホルダ(1
0)を該基台(1)に固定して、該光半導体素子(5)
と該レンズ(15)とが光結合するよう構成したレンズ
・光半導体アセンブリの組立にあたり、X−Y微動装置
(20)のアーム板(21)の下面に、弾性体(41)
を介して一対の挟持体(40)を固着し、該挟持体(4
0)の下端部のテーパー面で該ホルダ外筒(11)のフ
ランジの縁を押圧しながら、該X−Y微動装置(20)
を駆動することで、該レンズ(15)のX−Y方向の位
置を調整し、 調整ドライバ(25)を用いて、該ホルダ内筒(12)
を螺回することで該レンズ(15)のZ方向の位置を調
整した後に、 該ホルダ外筒(11)を該上面板部(2)に、該ホルダ
内筒(12)を該ホルダ外筒(11)に、それぞれレー
ザ溶接することを特徴とするレンズ・光半導体アセンブ
リの組立方法。
[Claims] A holder having a holder inner cylinder (12) in which a lens (15) is pushed and inserted into an axial center hole (12a), and a screw hole in the axial center into which the holder inner cylinder (12) is screwed. On the center line of the lens holder (10) consisting of an outer cylinder (11) and the through hole (3) that vertically passes through the upper plate part (2) of the base (1), below the upper plate part (2). The optical semiconductor element (
5), the cylindrical part of the holder outer cylinder (11) is loosely inserted into the through hole (3), and the lower end surface of the flange of the holder outer cylinder (11) is brought into contact with the surface of the upper plate part (2). While in contact with the lens holder (1
0) on the base (1), and the optical semiconductor element (5)
When assembling the lens/optical semiconductor assembly configured to optically couple the lens (15) and the lens (15), an elastic body (41) is attached to the lower surface of the arm plate (21) of the
A pair of clamping bodies (40) are fixed through the clamping bodies (40).
0) while pressing the edge of the flange of the holder outer cylinder (11) with the tapered surface of the lower end of the X-Y fine movement device (20).
The position of the lens (15) in the X-Y direction is adjusted by driving the holder inner cylinder (12) using the adjustment driver (25).
After adjusting the position of the lens (15) in the Z direction by screwing the (11) A method for assembling a lens/optical semiconductor assembly, which comprises performing laser welding.
JP12246089A 1989-05-16 1989-05-16 Method for assembling lens and optical semiconductor assembly Pending JPH02301705A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12246089A JPH02301705A (en) 1989-05-16 1989-05-16 Method for assembling lens and optical semiconductor assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12246089A JPH02301705A (en) 1989-05-16 1989-05-16 Method for assembling lens and optical semiconductor assembly

Publications (1)

Publication Number Publication Date
JPH02301705A true JPH02301705A (en) 1990-12-13

Family

ID=14836406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12246089A Pending JPH02301705A (en) 1989-05-16 1989-05-16 Method for assembling lens and optical semiconductor assembly

Country Status (1)

Country Link
JP (1) JPH02301705A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0760489A2 (en) * 1995-08-31 1997-03-05 Fujitsu Limited Assembly of an optical module

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0760489A2 (en) * 1995-08-31 1997-03-05 Fujitsu Limited Assembly of an optical module
EP0760489A3 (en) * 1995-08-31 1998-01-14 Fujitsu Limited Assembly of an optical module
US5916458A (en) * 1995-08-31 1999-06-29 Fujitsu Limited Production of optical module assembly

Similar Documents

Publication Publication Date Title
EP0406413B1 (en) Scanning type tunnel microscope
JP4231924B2 (en) Micro processing equipment for transparent materials
JP2539714Y2 (en) Optical focusing device
JPH02301705A (en) Method for assembling lens and optical semiconductor assembly
US5745311A (en) Optical component welding apparatus
CN111829652B (en) Focusing light spot analysis platform of laser fiber field lens
CN210952694U (en) One-key type two-dimensional image measuring instrument
JP2002023019A (en) Assembling device for optical element module and optical axis control method
US20090101801A1 (en) Optical scanner device
JPS61236174A (en) Small light-emitting source module
JPH06229871A (en) Adjusting method for optical axis of optical component
CN218823994U (en) Light filter detection device
CN217385985U (en) Adjusting device for polarized Buerger's mirror
JPH05157947A (en) Assembly device for optical element module
JP3343867B2 (en) Centering device for cemented lenses
JP2587955Y2 (en) Optical fiber collimator
JP2524526Y2 (en) Laser injection unit
JP2936777B2 (en) Optical device module assembly equipment
KR0134791Y1 (en) Lens fine controlling unit of laser beam scanning apparatus
JP2000329772A (en) Scanning probe microscope and method and auxiliary jig for adjusting optical axis thereof
JPS63208008A (en) Method and device for assembling fiber module for optical communication
JPH01196187A (en) Optical apparatus and its manufacture
JPH0410562Y2 (en)
JPH0344605A (en) Method for assembling optical element module
JPH04157080A (en) Laser beam welding method and its jig