CN218823994U

CN218823994U - Light filter detection device

Info

Publication number: CN218823994U
Application number: CN202223006573.4U
Authority: CN
Inventors: 金长利; 徐闰; 郭胜
Original assignee: Kejingruisi Suzhou Technology Co ltd
Current assignee: Kejingruisi Suzhou Technology Co ltd
Priority date: 2022-11-11
Filing date: 2022-11-11
Publication date: 2023-04-07
Anticipated expiration: 2032-11-11

Abstract

The utility model discloses a light filter detection device belongs to film optical element research application, including beam expanding laser, holder and CCD receiver have been arranged in order on the propagation path of beam expanding laser's light beam, the holder is used for the centre gripping perpendicular to the light filter that the light beam was placed, the CCD receiver slides and sets up and is on a parallel with on the guide rail of light beam, CCD receiver's camera lens is towards the light filter, and the camera lens adopts microscope camera lens. The utility model discloses an on the beam expanding laser shines the optical filter, utilize the microscope camera lens to enlarge laser image and by CCD receiver record, can detect the sand hole position and the quantity that the naked eye is difficult to observe, simultaneously, can adjust the magnification through removing the CCD receiver, can analyze the characteristics such as size, the area of sand hole.

Description

Light filter detection device

Technical Field

The utility model relates to a film optical element research application especially relates to an optical filter detection device.

Background

Some filter elements can form voids during fabrication and use, which are caused by fine soot particles, defects during film deposition, and damage during fabrication. The sand holes have important influence on the optical performance, the mechanical performance and the like of the filter disc, so that the detection of the sand holes of the filter disc has important significance. Generally, the filter disc with the thickness of micron order has few sand holes, the filter disc with the thickness below micron is more likely to have the sand holes, and most of the sand holes have small size and are difficult to observe by naked eyes. For the optical filter element in the extreme ultraviolet optical field, the thickness of the optical filter element is in the micrometer to nanometer magnitude, however, at present, no reliable detection method for detecting the sand holes of the optical filter element is available.

For example, chinese patent No. CN 104076039B discloses an automatic detection method for optical filter appearance defects, which includes the following steps: A. setting detection parameters of the appearance defects of the optical filter; B. selecting a detection range of an optical lens; C. detecting the low power lens, marking out obviously unqualified optical filters and storing the detection result; D. detecting the high power lens, and storing the detection results of the residual optical filters; E. classifying and marking the residual optical filters according to the detection result, and generating a corresponding MAP (namely a MAP); F. and automatically classifying and sorting the optical filters according to the MAP. According to the scheme, the automatic detection of various appearance defects of the optical filter is realized by setting a uniform standard, and the MAP is generated according to the detection result to sort the optical filter.

Further, as disclosed in chinese patent application publication No. CN 111638222a, a system and method for detecting defects of an optical filter are disclosed, wherein the system includes a detection station disposed on a workbench for carrying the optical filter, and a detection module disposed on one side of the detection station for detecting the optical filter; the detection module comprises a detection camera aligned with the detection station and a lower light source located below the detection station, and the irradiation angle of the lower light source is inclined to the vertical direction of the detection station. According to the scheme, the lower light source with the angle is arranged for defect detection, so that the detection light beam is irradiated upwards from the lower part of the optical filter to be detected to enter the camera, and the defects such as film cracking, shallow dirt and the like can be detected.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing an optical filter detection device to solve the problem that above-mentioned prior art exists, shine on the optical filter through the beam expanding laser emitting beam, utilize the microscope head to enlarge laser image and by CCD receiver record, can detect the sand hole position and the quantity that the naked eye is difficult to observe, simultaneously, can adjust the magnification through removing the CCD receiver, can analyze the characteristics such as size, the area of sand hole.

In order to achieve the above object, the utility model provides a following scheme:

the utility model provides a light filter detection device, including the beam expanding laser, holder and CCD receiver have been arranged in order on the propagation path of beam expanding laser's light beam, the holder is used for the centre gripping perpendicular to the light filter that the light beam was placed, the CCD receiver slides and sets up and be on a parallel with on the guide rail of light beam, the camera lens of CCD receiver is towards the light filter, and the camera lens adopts microscope camera lens.

Preferably, the holder includes a hollow holder body, the holder body includes a placement portion on an inner diameter side for placing the optical filter and a pressing portion on an outer diameter side for mounting the pressing structure.

Preferably, the placing part is a slope surface which becomes thinner from the outer diameter side to the inner diameter side.

Preferably, the compressing structure comprises a first threaded hole symmetrically arranged on the compressing part and a compressing screw installed in the first threaded hole.

Preferably, the spring piece comprises an installation section connected with the compression screw and a compression section which is connected to the installation section and is bent towards the direction of the bottom of the slope.

Preferably, the guide rail is fixedly mounted on the mounting platform.

Preferably, the CCD receiver is slidably mounted on the guide rail by an optical adjustment bracket.

Preferably, the beam expanding laser and the clamper are respectively slidably mounted on the guide rail through an optical adjustment frame.

Preferably, the bottom of each optical adjusting frame is provided with a sliding block, the sliding block is provided with a dovetail groove, and the guide rail is in a dovetail structure and matched with the dovetail groove.

Preferably, a second threaded hole is formed in one side of the sliding block in a penetrating mode, and a locking screw is connected in the second threaded hole.

The utility model discloses for prior art gain following technological effect:

(1) The utility model discloses a beam expanding laser sends the beam and shines on the filter, utilizes the microscope head to enlarge laser image and is recorded by the CCD receiver, can detect the sand hole position and the quantity that the naked eye is difficult to observe, simultaneously, can adjust the magnification through removing the CCD receiver, can analyze the characteristics such as size, area of sand hole;

(2) The utility model discloses the holder includes hollow centre gripping body, and the centre gripping body is including the portion of placing that is located the internal diameter side and the portion of compressing tightly that is located the external diameter side, and the portion of placing is used for placing the light filter, and the portion of compressing tightly is used for installing the compact structure, and hollow structure can guarantee the light transmission area, does not cause the shelter to laser, improves the imaging effect, and the compact structure is installed in the portion of compressing tightly of external diameter side, can avoid the contact to the light filter membrane face when guaranteeing stability, and the front region of furthest assurance light filter is not contaminated;

(3) The utility model discloses the portion of placing is domatic by external diameter side direction internal diameter side taper, is suitable for the light filter of most shapes, especially common circular or square light filter, and the light filter that can not equidimension of centre gripping and thickness detects moreover, simultaneously, can also adopt the spring leaf to compress tightly, has increased the degree of convenience of installation and dismantlement.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a top view of the holder of the present invention;

FIG. 3 is a cross-sectional view of FIG. 2;

1, a beam expanding laser; 11. a light beam; 2. a holder; 21. a pressing part; 22. a placement section; 23. a compression screw; 24. a spring plate; 3. a CCD receiver; 4. laser image; 5. mounting a platform; 6. an optical adjustment mount; 7. an optical filter; 71. and (4) sand holes.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The utility model aims at providing an optical filter detection device to solve the problem that prior art exists, shine on the optical filter through the beam expanding laser emission beam, utilize the microscope camera to enlarge laser image and by CCD receiver record, can detect the sand hole position and the quantity that the naked eye is difficult to observe, simultaneously, can adjust the magnification through removing the CCD receiver, can analyze the characteristics such as size, the area of sand hole.

In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the following detailed description.

As shown in fig. 1-3, the utility model provides an optical filter detection device, including expanding beam laser 1, holder 2 and CCD receiver 3 have been arranged in order on expanding beam laser 1's the light beam 11's the propagation path, and wherein, expanding beam laser 1 is used for launching beam 11 and shines and be used for the formation of image on the optical filter 7, and expanding beam laser 1's wavelength parameter can select 400 ~ 780nm scope, and power is 5-200mW and can adjust. For example, the beam expanding laser 1 may select a red laser with a wavelength of 650nm, the diameter of the light beam 11 is 10mm, and the laser power may be adjusted at 0-50 mW; in addition, the beam expanding laser 1 may be provided with an individual switch for control, and is turned on when detection is performed, and is turned off after detection is completed. The holder 2 is used for holding the filter 7 placed perpendicularly to the beam 11, and the beam 11 can be perpendicularly irradiated onto the filter 7, thereby forming the laser image 4 on the back surface of the filter 7. The clamp holder 2 can adopt an annular structure, the middle part of the clamp holder is provided with a light transmission hole, and the clamp holder is tightly pressed on the annular structure by a pressing structure; the clamper 2 may be configured to clamp and suspend the filter 7 at the edge thereof. The CCD receiver 3 is slidably disposed on a guide rail parallel to the light beam 11 and can slide on the guide rail toward or away from the filter 7 (the structure of the guide rail is not shown in the figure, and the guide rail may be a dovetail-type guide rail or a T-type guide rail, etc. commonly used in the art). The lens of the CCD receiver 3 faces the optical filter 7, and the lens adopts a microscope lens, and the microscope lens and the CCD receiver 3 are assembled before use. The effective pixel of the CCD receiver 3 can be 500 ten thousand, the pixel size is 2.2 multiplied by 2.2 microns, the CCD receiver is connected with a microscope lens, a detection image is output, and the size and the number of the sand holes 71 of the optical filter 7 are analyzed through an image processing program. The magnification and the diaphragm of the microscope lens can be adjusted, for example, the microscope lens purchased from industrial vision science and technology limited company can be adopted, the front and back adjustment range of the adopted microscope lens is 0-10 cm, 10-50 times of image amplification can be realized, the sand holes 71 with the diameter size of 0.5 micrometer to millimeter magnitude can be distinguished, and focusing is adjusted by moving on the guide rail. Meanwhile, the quantity characteristics of the sand holes 71 in all sizes can be obtained through software processing. The utility model discloses an on beam expanding laser 1 transmission beam 11 shines light filter 7, utilize the microscope head to enlarge laser image 4 and by CCD receiver 3 record, can detect the sand hole 71 position and the quantity that the naked eye is difficult to observe, simultaneously, can adjust the magnification through removing CCD receiver 3, can analyze the characteristics such as size, the area of sand hole 71.

Referring to fig. 2 to 3, the main material of the holder 2 may be duralumin, and the holder includes a hollow holder body, the holder body may be an annular structure, and the holder body includes a placing portion 22 located on the inner diameter side and a pressing portion 21 located on the outer diameter side, which are bonded together or integrally formed. The placing part 22 is used for placing the optical filter 7, and may be of a planar or concave structure, and when a planar structure is adopted, a positioning mark line or a stop block may be provided to ensure that the placing position is accurate. The pressing part 21 is used for installing a pressing structure, and can be installed in a screw or bolt mode, and the pressing structure can be a pressing sheet, a spring sheet 24 and the like. The utility model discloses the light transmission area can be guaranteed to 2 hollow structures of holder, does not lead to the fact laser to shelter from, improves the formation of image effect, and compact structure installs in the portion 21 that compresses tightly of external diameter side, can avoid the contact to the light filter 7 face in the time of guaranteeing stability, and the positive region of furthest assurance light filter 7 is not polluted.

Further, as shown in fig. 3, the placing portion 22 may be a slope surface gradually thinned from the outer diameter side to the inner diameter side, and different diameters are formed at different slope surface heights, so that the filter 7 with different diameters can be fixed, and the filter 7 with different diameters can be stably placed on the slope surface. Thereby the utility model discloses a holder 2 can be suitable for the light filter 7 of most shapes, especially common circular or square light filter 7, can detect by the light filter 7 of the not equidimension of centre gripping and thickness moreover.

The pressing structure may include a first threaded hole symmetrically provided in the pressing part 21 and a pressing screw 23 installed in the first threaded hole. The filter 7 with the screw hole can be installed and fixed through the first screw hole and the compression screw 23 which are symmetrical, and only the compression screw 23 needs to be screwed and unscrewed.

The optical filter holder can further comprise a spring piece 24, the spring piece 24 can be of a triangular metal sheet structure and comprises an installation section connected with the compression screw 23 and a compression section which is connected to the installation section and bent towards the direction of the bottom of the slope, therefore, the spring piece 24 can be installed on the holder 2 through the compression screw 23 and can be detached and installed according to needs (whether the optical filter 7 is installed by using a screw hole of the optical filter). The pressing section of the spring piece 24, namely the tip of the triangle presses the edge of the optical filter 7, and a certain pressing force can be generated for the placed optical filter 7, so that the optical filter 7 without screw holes can be pressed by the spring piece 24 (the optical filter 7 with screw holes can also be pressed by the spring piece 24), and the convenience degree of installation and disassembly is increased. The diameter of the filter 7 which can be fixed can be 20-100 mm by the arrangement of the spring piece 24.

As shown in fig. 1, a mounting platform 5 may be included, and the mounting platform 5 serves as a main supporting structure for each component and can be stably placed on a table for detection. The mounting platform 5 and the guide rail main body thereof may be made of duralumin, and the total length thereof is set according to the test requirements, and the length range is 1-2 m, for example, 1m. The guide rail can fixed mounting on mounting platform 5, according to the in-service use demand, can only slide CCD receiver 3 and set up on the guide rail, and at this moment, beam expanding laser 1 and holder 2 are fixed to be set up on mounting platform 5. Of course, the beam expanding laser 1 and the clamper 2 may be disposed on a guide rail, so as to adjust the distance between the elements and keep the elements on the same straight line along the propagation path of the light beam 11.

Further, the CCD receiver 3 may be slidably mounted on the guide rail through an optical adjusting frame 6, and the optical adjusting frame 6 is a structure commonly used in the optical testing field, and can adjust the height and the pitch angle, and is a structure known in the art, and therefore, the detailed description thereof is omitted here.

The beam expanding laser 1 and the clamper 2 can be respectively installed on a guide rail in a sliding way through an optical adjusting frame 6, or fixedly installed on the installation platform 5 through the optical adjusting frame 6, and of course, the height and the pitch angle can also be adjusted by the optical adjusting frame 6. Thus, the use of the optical adjustment frame 6 facilitates adjustment of the uniform optical axis.

In order to smoothly realize the sliding on the guide rail, a sliding block is arranged at the bottom of each optical adjusting frame 6, a dovetail groove is arranged on the sliding block, and the guide rail is in a dovetail structure and is matched with the dovetail groove. The optical adjusting frame 6 can be driven to move on the guide rail by moving the sliding block on the guide rail, and then the distance between the beam expanding laser 1, the CCD receiver 3 and the optical filter 7 is adjusted.

One side of the sliding block can be further provided with a second threaded hole which penetrates through the sliding block, a locking screw is connected in the second threaded hole, and the end head of the locking screw can be abutted to the guide rail. After the sliding block is moved to the designated position, the sliding block can be locked on the guide rail by screwing the locking screw.

The utility model discloses a theory of operation as follows:

firstly, the centers of the beam expanding laser 1, the clamper 2 and the microscope lens of the CCD receiver 3 are adjusted to the same optical axis by adjusting the position and the state of each optical adjusting frame 6 on the mounting platform 5. The filter 7 is fixed to the holder 2 and placed in the propagation path of the light beam 11. The CCD receiver 3 is connected with a computer, and the focal length and the translation position of the microscope lens are adjusted, so that the surface of the optical filter 7 can be clearly imaged in software. At the moment, all the ambient light sources are shielded to reach a darkroom environment, and the ambient illumination at any position is less than 0.01Lux before the laser works. The beam expanding laser 1 is turned on, and the power is adjusted, so that the image passing through the sand hole 71 is clearly imaged in software. The original detection result is a two-dimensional black-and-white image, and information such as the size, position and number of the sand holes 71 can be obtained through image light spot statistics. The method is based on the light diffraction principle, the size of the sand hole 71 which can be recorded by the CCD receiver 3 is far larger than the light wavelength, the diffraction effect is not obvious, the light is transmitted along a straight line, and a bright light circular spot which is calculated according to the straight line transmission is obtained in image processing software. The method has the advantages of large measurement range and easy realization of rapid measurement.

The utility model discloses can realize large tracts of land, short-term test of light filter 7 sand hole 71. In the process of detecting the sand hole 71, the holder 2 can stably fix the filter 7 without damaging the film surface. The position and quantity information of the sand holes 71 can be obtained through image processing, and the defect problem of the sand holes 71 can be effectively represented.

The utility model discloses a concrete example is applied to explain the principle and the implementation mode of the utility model, and the explanation of the above example is only used to help understand the method and the core idea of the utility model; meanwhile, for those skilled in the art, the idea of the present invention may be changed in the specific embodiments and the application range. In summary, the content of the present specification should not be construed as a limitation of the present invention.

Claims

1. An optical filter detection device, characterized in that: including beam expanding laser, holder and CCD receiver have been arranged in order on the propagation path of beam expanding laser's light beam, the holder is used for the centre gripping perpendicular to the light filter that the light beam was placed, the CCD receiver slides and sets up and is being on a parallel with on the guide rail of light beam, the camera lens of CCD receiver is towards the light filter, and the camera lens adopts microscope camera lens.

2. The filter detecting device according to claim 1, wherein: the clamp holder comprises a hollow clamp body, wherein the clamp body comprises a placing part and a compressing part, the placing part is located on the inner diameter side, the compressing part is located on the outer diameter side, the placing part is used for placing the optical filter, and the compressing part is used for installing the compressing structure.

3. The filter detecting device according to claim 2, wherein: the placing part is a slope surface which becomes thinner gradually from the outer diameter side to the inner diameter side.

4. The filter detecting device according to claim 3, wherein: the compressing structure comprises first threaded holes symmetrically arranged on the compressing part and compressing screws arranged in the first threaded holes.

5. The filter detecting device according to claim 4, wherein: the spring piece comprises an installation section and a compression section, wherein the installation section is connected with the compression screw, and the compression section is connected to the installation section and bends towards the direction of the bottom of the slope.

6. The filter detecting device according to any one of claims 1 to 5, wherein: the guide rail fixing device comprises a mounting platform, wherein the guide rail is fixedly mounted on the mounting platform.

7. The filter detecting device according to claim 6, wherein: the CCD receiver is slidably mounted on the guide rail through an optical adjusting frame.

8. The filter detecting device according to claim 7, wherein: the beam expanding laser and the clamper are respectively installed on the guide rail in a sliding way through an optical adjusting frame.

9. The filter detecting device according to claim 8, wherein: the bottom of each optical adjusting frame is provided with a sliding block, each sliding block is provided with a dovetail groove, and the guide rail is in a dovetail structure and is matched with the dovetail grooves.

10. The filter detecting device according to claim 9, wherein: and a penetrating second threaded hole is formed in one side of the sliding block, and a locking screw is connected in the second threaded hole.