JPH05157947A - Assembly device for optical element module - Google Patents

Assembly device for optical element module

Info

Publication number
JPH05157947A
JPH05157947A JP3321765A JP32176591A JPH05157947A JP H05157947 A JPH05157947 A JP H05157947A JP 3321765 A JP3321765 A JP 3321765A JP 32176591 A JP32176591 A JP 32176591A JP H05157947 A JPH05157947 A JP H05157947A
Authority
JP
Japan
Prior art keywords
holder
optical element
optical
stage
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3321765A
Other languages
Japanese (ja)
Other versions
JP3116481B2 (en
Inventor
Yoshimoto Nakajima
與元 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP03321765A priority Critical patent/JP3116481B2/en
Publication of JPH05157947A publication Critical patent/JPH05157947A/en
Application granted granted Critical
Publication of JP3116481B2 publication Critical patent/JP3116481B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To provide the assembly device which facilitates optical-axis adjusting operation for aligning the axis of light emitted by an optical element with the optical axis of an optical fiber and operation for fixing an optical element holder and an optical fiber holder in operation for assembling the optical element module, and facilitates the operation that a skilled operator requires a long time for. CONSTITUTION:The assembly device is enabled to move in the directions of two X and Y axes between an optical element holder 1 and a lens holder 2 by a motor-driven stage 9 moving linearly and move in the directions of the X, Y, and Z axes between an optical fiber holder 7 and the optical element holder 1 by a stage 19 moving vertically on the stage 18, and consists of a slanting stage 12 positioned in two axial directions so as to adjust the relative tilt angle of the contact part between the optical element holder 1 and lens holder 2 after the optical axes of three components are adjusted, a mechanism for a vertical stage 14 where the lens holder 2 can slide upward and downward following the stage 12, and a magnet scale 15 which measures the quantity of vertical displacement on the lens holder 2.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は半導体レーザや発光ダ
イオード等の発光素子と光ファィバーを結合する発光モ
ジュールの光軸の調整と接合を行う組立装置に関するも
のである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an assembling apparatus for adjusting and joining an optical axis of a light emitting module for connecting a light emitting element such as a semiconductor laser or a light emitting diode to an optical fiber.

【0002】[0002]

【従来の技術】図2は対象とする光素子モジュールの構
造の一例を示す図である。図において、1は光素子ホル
ダ、2はレスンズを保持するためのレンズホルダ、3は
光ファィバー、4は半導体レーザや発光ダイオード等の
発光素子、5は形状として球状や柱状や凸状のものがあ
るが集光する機能を持っているレンズ、6は光ファィバ
ー端末、7は光ファィバーを保持するための光ファイバ
ーホルダ、8は光素子ホルダ1とレンズホルダ2を溶接
して固定するための溶接ケ所である。
2. Description of the Related Art FIG. 2 is a diagram showing an example of the structure of a target optical element module. In the figure, 1 is an optical element holder, 2 is a lens holder for holding a lens, 3 is an optical fiber, 4 is a light emitting element such as a semiconductor laser or a light emitting diode, and 5 is a spherical, columnar or convex shape. A lens having a light collecting function, 6 is an optical fiber terminal, 7 is an optical fiber holder for holding the optical fiber, and 8 is a welding place for fixing the optical element holder 1 and the lens holder 2 by welding. Is.

【0003】組立装置が対象とする作業は光素子ホルダ
1とレンズホルダ2と光ファィバーホルダ7との3部品
を最適な位置に調整し固定することをいう。発光素子4
から出た光はレンズ5により集光されて光ファィバー端
末6で保持された光ファィバー3へ入射して外部機器へ
出射される。
The work targeted by the assembling apparatus is to adjust and fix the three parts of the optical element holder 1, the lens holder 2 and the optical fiber holder 7 to optimum positions. Light emitting element 4
The light emitted from the optical fiber is condensed by the lens 5, enters the optical fiber 3 held by the optical fiber terminal 6, and is emitted to the external device.

【0004】光ファィバー端末6の位置を移動しなが
ら、光ファィバー3での光の量をモニタすると、パワー
が最大になる位置が存在するが、その状態で溶接ケ所8
aと溶接ケ所8bから同時にYAGレーザを発射して光
素子ホルダ1とレンズホルダ2を固定する。
When the amount of light at the optical fiber 3 is monitored while moving the position of the optical fiber terminal 6, there is a position where the power becomes maximum.
A YAG laser is simultaneously emitted from a and the welding place 8b to fix the optical element holder 1 and the lens holder 2.

【0005】従来の光素子モジュールの組立装置は以上
のように構成されているので、光素子ホルダ1、及びレ
ンズホルダ2の接合面との間の位置決めは水平方向でし
かできないため溶接のために必要な光素子ホルダ1とレ
ンズホルダ2の接合面の平行度が保てず溶接時に軸ずれ
を起こすことが多く、これを回避するためには部品及び
保持治具の直角度を高精度で加工しなければならず、さ
らに作業時には保持治具間の平行度を極力角度を持たな
いようにセッティングすることが必要であり、部品の価
格が高価になるとともに、熟練作業者でも光素子モジュ
ールの組立作業が難しく長時間を要し、製品の生産コス
トが高くつくという問題点があった。
Since the conventional optical element module assembling apparatus is configured as described above, the positioning between the optical element holder 1 and the lens holder 2 can be performed only in the horizontal direction for welding. Since the required parallelism between the joint surfaces of the optical element holder 1 and the lens holder 2 cannot be maintained, axis misalignment often occurs during welding. In order to avoid this, the squareness of the component and the holding jig is processed with high accuracy. In addition, it is necessary to set the parallelism between the holding jigs so that there is no angle as much as possible during work, and the price of parts becomes expensive, and even skilled workers can assemble the optical element module. There was a problem that the work was difficult and required a long time, and the production cost of the product was high.

【0006】[0006]

【発明が解決しようとする課題】この発明は、かかる課
題を解決するためになされたものであり、光素子から発
光された光の軸と光ファィバの光軸を合わせる光軸調整
作業と光素子ホルダとレンズホルダをYAGレーザで溶
接する接合作業を行えるようにし、従来は熟練作業者が
長時間をかけていた光素子モジュールの組立作業を簡単
に行えるような組立装置を提供することを目的としてい
る。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an optical axis adjusting operation for aligning an optical axis of light emitted from an optical element with an optical axis of an optical fiber and an optical element. An object of the present invention is to provide an assembling apparatus that enables a joining work of welding a holder and a lens holder with a YAG laser to easily perform an assembling work of an optical element module, which conventionally takes a long time for a skilled worker. There is.

【0007】光ファィバー3と光ファィバー端末6が生
産しようとする製品の一部であるピグテール構造の物
と、製品ではなく、製造設備の治具である光コネクタ式
のものがあるが、この発明の光素子モジュールの組立装
置としては基本的にはどちらの場合にも対応できるの
で、以下ではピグテール構造のものについて説明する。
The optical fiber 3 and the optical fiber terminal 6 have a pigtail structure which is a part of a product to be produced, and an optical connector type which is not a product but a jig for manufacturing equipment. Since the optical device module assembling device of (1) can basically support both cases, the pigtail structure will be described below.

【0008】光素子ホルダ1と光ファィバホルダ7との
2部品を最適な位置に調整し固定する組立方法及び装置
については別途出願しており、ここではレンズホルダ2
を加えての3部品を最適な位置に調整し固定する組立装
置について提案する。
A separate application has been filed for an assembling method and apparatus for adjusting and fixing the two parts of the optical element holder 1 and the optical fiber holder 7 at optimal positions, and here, the lens holder 2 is used.
We propose an assembling device that adjusts and fixes the three parts including the above to the optimum position.

【0009】[0009]

【課題を解決するための手段】光ファイバホルダとレン
ズホルダと光素子ホルダを別々に保持し、このレンズホ
ルダを光ファイバホルダの下方で光素子ホルダの上方に
配置し、この光ファイバホルダとレンズホルダと光素子
ホルダの相対位置を調整する機構を持ち、レンズホルダ
と光素子ホルダを接触させた状態で、その接触部分にレ
ーザ光を照射してレンズホルダと光素子ホルダを組立て
るための光素子モジュールの組立装置において、光素子
ホルダを水平方向で移動させた時の光素子から発光され
た光を光ファィバで受光し光の強さを測定し、レンズホ
ルダと光素子ホルダとの相対位置を調整するために光素
子ホルダを水平方向で2軸方向に移動する手段と、光の
強度を測定しながら光素子ホルダを水平方向でモータ駆
動の直進ステージを2軸方向に移動して光素子ホルダを
最適な位置へ調整し、レンズホルダが光素子ホルダのあ
おり手段に追従して上下方向にスライドできる機構と、
レンズホルダの上下方向の変位量を測定し、レンズホル
ダと光素子ホルダとの相対傾き角を調整するために光素
子ホルダを2軸方向に傾斜ステージであおり、上下方向
の変位量を測定しながら光素子ホルダを2軸方向にあお
り、光素子ホルダを最適な相対傾き角を調整できる機構
を具備したものである。
An optical fiber holder, a lens holder, and an optical element holder are separately held, and the lens holder is arranged below the optical fiber holder and above the optical element holder. An optical element for assembling the lens holder and the optical element holder by irradiating the contact portion with laser light while the lens holder and the optical element holder are in contact with each other, having a mechanism for adjusting the relative position of the holder and the optical element holder. In the module assembly device, the light emitted from the optical element when the optical element holder is moved in the horizontal direction is received by the optical fiber, the intensity of the light is measured, and the relative position between the lens holder and the optical element holder is measured. A means for moving the optical element holder in two axial directions in the horizontal direction for adjustment, and a motor-driven linear stage for moving the optical element holder in the horizontal direction while measuring the intensity of light. Go to 2 axially to adjust the optical element holder to an optimal position, a mechanism capable of sliding in the vertical direction the lens holder to follow the tilt means of the optical element holder,
The optical element holder is a two-axis tilt stage for measuring the vertical displacement of the lens holder and adjusting the relative tilt angle between the lens holder and the optical element holder. The optical element holders are arranged in the biaxial directions, and the optical element holders are provided with a mechanism capable of adjusting the optimum relative tilt angle.

【0010】[0010]

【作用】上記のように構成された機構により、光素子か
らの光のパワーを光ファィバへ供給される光の量が最大
になるように光ファィバホルダとレンズホルダと光素子
ホルダとの相対位置を調整する動作に加え、下方の光素
子ホルダに追従して上下する上方のレンズホルダのZ方
向で最も下がった状態を検出できるようにし、溶接され
る2つの部品の接触面間での隙間をなくし極めて高精度
に平行を保つことができ、レーザ溶接した後も軸ずれが
生じることなく組み立てることができ、光パワーの調整
作業とレーザ溶接器による接合作業を行えるようにして
いる。
With the mechanism configured as described above, the relative positions of the optical fiber holder, the lens holder, and the optical element holder are adjusted so that the power of the light from the optical element is maximized to be supplied to the optical fiber. In addition to the adjustment operation, the lowest position of the upper lens holder that moves up and down following the lower optical element holder can be detected, and the gap between the contact surfaces of the two parts to be welded is eliminated. The parallelism can be maintained with extremely high precision, and the laser welding can be performed without any misalignment, so that the optical power adjustment work and the laser welding machine joining work can be performed.

【0011】[0011]

【実施例】【Example】

実施例1.図1はこの発明のステージ構成の一実施例を
示す図であり、図において、9はモータ駆動の直線ステ
ージ、10は水平定盤、11は垂直定盤、12は光素子
ホルダ1とレンズホルダ2の接合面に回転中心を持つモ
ータ駆動の傾斜ステージ、13は回転ステージ、14は
垂直スライド、15は上記垂直スライド14の移動量を
検出するためのマグネスケール、16は上記垂直スライ
ド14の落下防止のためのストッパー、17は発光器用
保持部、18は直進ステージ(2)、19は垂直ステー
ジ、20は光ファィバー端末保持具、21はレンズホル
ダ保持具である。1〜8は上記製品構造の説明と全く同
一のものである。
Example 1. FIG. 1 is a diagram showing an embodiment of a stage configuration of the present invention. In the figure, 9 is a motor driven linear stage, 10 is a horizontal surface plate, 11 is a vertical surface plate, 12 is an optical element holder 1 and a lens holder. A motor-driven tilt stage having a rotation center on the joint surface of 2, a rotary stage 13, a vertical slide 14, a magnet scale for detecting the amount of movement of the vertical slide 14, and a drop 16 of the vertical slide 14. A stopper for prevention, 17 is a holder for the light emitter, 18 is a linear stage (2), 19 is a vertical stage, 20 is an optical fiber terminal holder, and 21 is a lens holder holder. 1 to 8 are exactly the same as the above description of the product structure.

【0012】図1のステージのように構成され、モータ
駆動で直線上に移動するステージ9aとステージ9aに
直角方向へ移動するステージ9bを重ね、平面上でXY
2軸方向で移動できるように構成し、水平定盤10の上
に置かれ、光素子ホルダ1はステージ9bの上に保持さ
れ、レンズホルダ2は光素子ホルダ1の上に載せられ垂
直定盤11に連結されて固定され、光素子ホルダ1とレ
ンズホルダ2を光軸調整した後その接触部分に光素子ホ
ルダ1とレンズホルダ2との相対傾き角を調整するため
に光素子ホルダ1を2軸方向にあおる傾斜ステージ12
と、傾斜ステージ12の上に載せられた発光器用保持部
13は光素子ホルダ1を機械的に保持し、光素子4へ電
気的に接続されており、光素子ホルダ1のあおり動作に
追従してレンズホルダ2が上下方向にスライドできる垂
直スライド14の機構と、レンズホルダ2の上下方向の
変位量を測定するマグネスケール15、垂直スライド1
4の落下防止の為のストッパー16より構成されてい
る。17は発光器用保持部、18は水平定盤10の上に
配置されたステージ9とは別の直進ステージ(2)、1
9は垂直ステージ、20は光ファィバ端末6を固定する
ための光ファィバ端末保持具、21はレンズホルダ保持
具である。なお、垂直ステージ14、マグネスケール1
5、ストッパー16は垂直定盤11上に固定されてい
る。
A stage 9a which is constructed like the stage shown in FIG. 1 and which moves in a straight line by driving a motor and a stage 9b which moves in a direction perpendicular to the stage 9a are superposed, and XY is formed on a plane.
It is constructed so that it can be moved in two axial directions, is placed on a horizontal surface plate 10, the optical element holder 1 is held on a stage 9b, and the lens holder 2 is placed on the optical element holder 1 and is a vertical surface plate. The optical element holder 1 and the lens holder 2 are connected to each other and fixed, and the optical element holder 1 and the lens holder 2 are attached to the optical element holder 1 to adjust the relative tilt angle between the optical element holder 1 and the lens holder 2 at the contact portion. Axial tilting stage 12
Then, the light emitter holder 13 mounted on the tilt stage 12 mechanically holds the optical element holder 1 and is electrically connected to the optical element 4, and follows the tilting operation of the optical element holder 1. Mechanism for vertically sliding the lens holder 2 in the vertical direction, a magnescale 15 for measuring the vertical displacement of the lens holder 2, the vertical slide 1
4 is composed of a stopper 16 for preventing falling. Reference numeral 17 is a holder for the light emitter, 18 is a rectilinear stage (2) different from the stage 9 arranged on the horizontal surface plate 10, and 1
9 is a vertical stage, 20 is an optical fiber terminal holder for fixing the optical fiber terminal 6, and 21 is a lens holder holder. The vertical stage 14 and Magnescale 1
5. The stopper 16 is fixed on the vertical surface plate 11.

【0013】光素子ホルダ1の内部にある半導体レーザ
や発光ダイオード等の発光素子4から出た光は光ファィ
バー端末6で保持された光ファィバー3へ入射して光フ
ァィバー3から光の量を電気信号へ変換した後に制御装
置へ送られる。光ファィバホルダ2と光素子ホルダ1と
の相対位置を調整するために光素子ホルダ1を水平方向
で移動する手段としてステージ9、光ファィバホルダ2
が光素子ホルダ1のあおり動作に追従して上下方向にス
ライドできる機構として垂直ステージ14、光ファィバ
ホルダ2の上下方向の変位量を測定する手段のマグネス
ケール15と、光ファィバホルダ2と光素子ホルダ1と
の相対傾き角を調整するために光素子ホルダ1を2軸方
向にモータ駆動の傾斜ステージ12であおり、上下方向
の変位量をマグネスケール15で検出しマグネスケール
測定器で測定することにより光素子ホルダ1を2軸方向
にあおる手段を駆動して光素子ホルダ1を最適な相対傾
き角を調整する。
Light emitted from a light emitting element 4 such as a semiconductor laser or a light emitting diode inside the optical element holder 1 is incident on an optical fiber 3 held by an optical fiber terminal 6 and the amount of light is converted from the optical fiber 3 into electricity. After being converted into a signal, it is sent to the control device. The stage 9 and the optical fiber holder 2 are provided as means for moving the optical element holder 1 in the horizontal direction in order to adjust the relative position between the optical fiber holder 2 and the optical element holder 1.
As a mechanism capable of sliding in the vertical direction following the tilting movement of the optical element holder 1, a vertical stage 14, a magnet scale 15 for measuring the vertical displacement of the optical fiber holder 2, the optical fiber holder 2 and the optical element holder 1. The optical element holder 1 is a motor-driven tilt stage 12 for adjusting the relative tilt angle with respect to and the vertical displacement is detected by a magnescale 15 and measured by a magnescale measuring device. The optimum relative tilt angle of the optical element holder 1 is adjusted by driving the device holder 1 in the biaxial direction.

【0014】光素子モジュールは円筒形でできているの
で、XY面の固定はつき合わせ部分の円周上で数点回転
ステージ13を回転させて溶接を行って組み立てる。
Since the optical element module is made of a cylindrical shape, the XY plane is fixed by rotating the several-point rotary stage 13 on the circumference of the abutting portion and performing welding.

【0015】ステージ18の上に配置された光ファィバ
ホルダ6を3次元で動かすための垂直ステージ19、垂
直ステージ19から光ファィバー端末6を固定するため
の光ファィバー端末保持具20、垂直ステージ14から
レンズホルダ5を固定するためのレンズホルダ保持具2
1である。
A vertical stage 19 for moving the optical fiber holder 6 arranged on the stage 18 in three dimensions, an optical fiber terminal holder 20 for fixing the optical fiber terminal 6 from the vertical stage 19, and a lens from the vertical stage 14 Lens holder holder 2 for fixing the holder 5
It is 1.

【0016】光素子モジュールは円筒形でできているの
で、XY面の固定はつき合わせ部分の円周上で数点(例
えば3点×2回)行って引っ張り強度等に耐えられるよ
うに組み立てる。よって、全周が溶接完了が満足される
まで溶接角度回転を行って溶接作業を終了し、最終的に
パワーレベルの確認を行い、規格内に入っていることを
確認して光素子モジュールの調整作業と接合作業からな
る組立を完了する。
Since the optical element module is made of a cylindrical shape, the XY plane is fixed at several points (for example, 3 points × 2 times) on the circumference of the abutting portion and assembled so as to withstand the tensile strength. Therefore, the welding angle is rotated until the welding is completed on the entire circumference, the welding work is completed, and finally the power level is confirmed, and the optical element module is adjusted after confirming that it is within the standard. Complete the assembly consisting of work and joining work.

【0017】また、上記実施例では光素子として発光素
子を例にとり説明したが、受光素子の場合も同様の方法
及び装置で光の向きを逆にして生産できることが容易に
推察できる。
In the above embodiment, the light emitting element was used as an example of the optical element. However, it can be easily inferred that the light receiving element can be produced by reversing the light direction by the same method and apparatus.

【0018】[0018]

【発明の効果】この発明は以上説明したとおり、光素子
モジュールの組立装置において、光素子から発光された
光の強度を測定しながらレンズホルダと光素子ホルダと
の水平方向での相対位置を調整することと、下方の光素
子ホルダに追従して上下する上方のレンズホルダのZ方
向で最も下がった状態を検出できるようにし、光パワー
の調整作業とレーザ溶接器による接合作業を行えるよう
にしたことにより、従来は熟練作業者が長時間をかけて
行っていた光素子モジュールの組立作業が簡単に行える
ようになった。
As described above, according to the present invention, in the optical element module assembling apparatus, the relative position in the horizontal direction between the lens holder and the optical element holder is adjusted while measuring the intensity of the light emitted from the optical element. In addition, it is possible to detect the lowermost state in the Z direction of the upper lens holder that moves up and down following the lower optical element holder, and to perform the optical power adjustment work and the joining work by the laser welder. As a result, it has become possible for the skilled worker to easily perform the assembling work of the optical element module, which conventionally takes a long time.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の一実施例であるステージの構成を示
す図である。
FIG. 1 is a diagram showing a configuration of a stage that is an embodiment of the present invention.

【図2】対象とする光素子モジュールの構造の一例を示
す図である。
FIG. 2 is a diagram showing an example of a structure of a target optical element module.

【符号の説明】[Explanation of symbols]

1 光素子ホルダ 2 レンズホルダ 3 光ファィバー 4 発光素子 5 レンズ 6 光ファィバー端末 7 光ファイバホルダ 8 溶接箇所 9 直進ステージ1 10 水平定盤 11 垂直定盤 12 モータ駆動の傾斜ステージ 13 回転ステージ 14 垂直スライド 15 マグネスケール 16 ストッパー 17 発光器用保持部 18 直進ステージ2 19 垂直ステージ 20 光ファィバー端末保持具 21 レンズホルダ保持具 1 Optical Element Holder 2 Lens Holder 3 Optical Fiber 4 Light Emitting Element 5 Lens 6 Optical Fiber Terminal 7 Optical Fiber Holder 8 Welding Point 9 Linear Stage 1 10 Horizontal Surface Plate 11 Vertical Surface Plate 12 Motorized Tilt Stage 13 Rotation Stage 14 Vertical Slide 15 Magnescale 16 Stopper 17 Light emitter holder 18 Straight stage 2 19 Vertical stage 20 Optical fiber terminal holder 21 Lens holder holder

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 光素子モジュールの光ファイバホルダと
レンズホルダと光素子ホルダを光軸調整した後にレーザ
光を照射して固定する組立装置において、レンズホルダ
を光ファイバホルダの下方で光素子ホルダの上方に配置
し、光素子ホルダに追従して上下するレンズホルダのZ
方向での変位を検出しながら、前記光素子ホルダを2軸
方向にあおり、最も下がった状態を検出する第1の手段
と、前記光素子ホルダを前記レンズホルダに対してXY
平面内を等間隔で移動する第2の手段と、前記光ファイ
バホルダを前記レンズホルダに対してXYZ3軸方向で
移動する第3の手段と、前記第2の手段と前記第3の手
段を繰り返し行って前記光素子ホルダの内部の光素子か
ら出てくる光が光ファィバーへ最も多く入る位置を5次
元内で見つける第4の手段と、その位置で、前記光素子
ホルダと前記レンズホルダをYAG溶接によりXY面の
付き合わせ部分を固定する第5の手段により調整作業と
接合作業を行うことを特徴とする光素子モジュールの組
立装置。
1. An assembly device for fixing an optical fiber holder, a lens holder, and an optical element holder of an optical element module by irradiating a laser beam after adjusting the optical axes of the optical element holder and fixing the lens holder below the optical fiber holder. Z of the lens holder that is placed above and moves up and down following the optical element holder
The optical element holder in the biaxial direction while detecting the displacement in the direction, and a first means for detecting the lowest position, and the optical element holder with respect to the lens holder in XY
Second means for moving in the plane at equal intervals, third means for moving the optical fiber holder in the XYZ three-axis directions with respect to the lens holder, and the second means and the third means are repeated. A fourth means for finding the position in the five dimensions where the light emitted from the optical element inside the optical element holder enters the optical fiber most, and at that position, the optical element holder and the lens holder are YAG. An apparatus for assembling an optical element module, characterized in that an adjusting work and a joining work are performed by a fifth means for fixing a matching portion of the XY plane by welding.
JP03321765A 1991-12-05 1991-12-05 Optical device module assembly equipment Expired - Fee Related JP3116481B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03321765A JP3116481B2 (en) 1991-12-05 1991-12-05 Optical device module assembly equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03321765A JP3116481B2 (en) 1991-12-05 1991-12-05 Optical device module assembly equipment

Publications (2)

Publication Number Publication Date
JPH05157947A true JPH05157947A (en) 1993-06-25
JP3116481B2 JP3116481B2 (en) 2000-12-11

Family

ID=18136191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP03321765A Expired - Fee Related JP3116481B2 (en) 1991-12-05 1991-12-05 Optical device module assembly equipment

Country Status (1)

Country Link
JP (1) JP3116481B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002228870A (en) * 2001-02-02 2002-08-14 Mutsuo Munekata Aligning device for optical axis and method for aligning optical axis
US7119895B2 (en) 2000-11-28 2006-10-10 Honda Giken Kogyo Kabushiki Kaisha Method of and apparatus for adjusting optical component, and optical unit
CN102508344A (en) * 2011-11-30 2012-06-20 成都储翰科技有限公司 Automatic coupling device for semiconductor laser diode and implementation method for automatic coupling device
CN111193182A (en) * 2020-01-08 2020-05-22 联耀光学(深圳)有限公司 Multi-single-tube semiconductor laser coupled single-core optical fiber assembling and adjusting device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100594302B1 (en) 2004-11-17 2006-06-30 삼성전자주식회사 Base plate, cover plate, and hard disc drive

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7119895B2 (en) 2000-11-28 2006-10-10 Honda Giken Kogyo Kabushiki Kaisha Method of and apparatus for adjusting optical component, and optical unit
JP2002228870A (en) * 2001-02-02 2002-08-14 Mutsuo Munekata Aligning device for optical axis and method for aligning optical axis
JP4537591B2 (en) * 2001-02-02 2010-09-01 株式会社ナノコントロール Optical axis alignment apparatus and optical axis alignment method
CN102508344A (en) * 2011-11-30 2012-06-20 成都储翰科技有限公司 Automatic coupling device for semiconductor laser diode and implementation method for automatic coupling device
CN111193182A (en) * 2020-01-08 2020-05-22 联耀光学(深圳)有限公司 Multi-single-tube semiconductor laser coupled single-core optical fiber assembling and adjusting device
CN111193182B (en) * 2020-01-08 2021-06-01 联耀光学(深圳)有限公司 Multi-single-tube semiconductor laser coupled single-core optical fiber assembling and adjusting device

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