JPH02298309A - Clean air manufacturing device - Google Patents
Clean air manufacturing deviceInfo
- Publication number
- JPH02298309A JPH02298309A JP1116067A JP11606789A JPH02298309A JP H02298309 A JPH02298309 A JP H02298309A JP 1116067 A JP1116067 A JP 1116067A JP 11606789 A JP11606789 A JP 11606789A JP H02298309 A JPH02298309 A JP H02298309A
- Authority
- JP
- Japan
- Prior art keywords
- air
- expansion turbine
- dust
- humidifier
- moisture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000000428 dust Substances 0.000 claims abstract description 25
- 239000012717 electrostatic precipitator Substances 0.000 claims description 8
- 238000009833 condensation Methods 0.000 abstract description 11
- 230000005494 condensation Effects 0.000 abstract description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 11
- 238000007872 degassing Methods 0.000 abstract description 7
- 238000004332 deodorization Methods 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 6
- 239000012716 precipitator Substances 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 3
- 230000003584 silencer Effects 0.000 description 3
- 238000003915 air pollution Methods 0.000 description 2
- 238000007791 dehumidification Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 239000002440 industrial waste Substances 0.000 description 1
- 229940127554 medical product Drugs 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Separation Of Particles Using Liquids (AREA)
- Electrostatic Separation (AREA)
- Engine Equipment That Uses Special Cycles (AREA)
- Separating Particles In Gases By Inertia (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野］
本発明は、半導体製造産業２食品製造産業、医療品製造
産業等で使用されるクリーンエア製造装置や、大気汚染
の元になる工業排出物、バイオ関連排出物の除去装置等
に関連する。[Detailed Description of the Invention] [Industrial Application Field] The present invention is applicable to clean air production equipment used in the semiconductor manufacturing industry, food manufacturing industry, medical product manufacturing industry, etc., and industrial waste that causes air pollution. , related to bio-related waste removal equipment, etc.
従来のクリーンエア製造装置には、除塵を目的とした静
電式電気集塵装置や濾過式集塵装置がある。また大気汚
染に関しては、上記従来装置の他に脱臭、脱ガスを目的
として洗浄法などが用いられている。Conventional clean air production devices include electrostatic precipitators and filtering precipitators for the purpose of removing dust. Regarding air pollution, in addition to the conventional devices mentioned above, cleaning methods are also used for the purpose of deodorization and degassing.
従来の装置においては、除去可能な塵埃の大きさに下限
があり、いずれの場合も０．１μ＠（サブミクロン）以
下の塵埃（微粒子）の除去は非常に難しかった。In conventional devices, there is a lower limit to the size of dust that can be removed, and in any case, it is extremely difficult to remove dust (fine particles) of 0.1 μ@ (submicron) or less.
本発明は１、サブミクロン以下の空気中塵埃を取り除く
と同時に、脱臭と脱ガス（水溶性ガス）をも行なうこと
のできる、クリーンエア製造装置を提供しようとするも
のである。The present invention aims to provide a clean air production device that can remove submicron or smaller airborne dust and at the same time deodorize and degas (water-soluble gas).
〔課題を解決するための手段］
本発明は、前記従来の課題を解決するために、原料空気
を圧縮する圧縮機と、上記圧縮された空気を加湿する加
湿器と、上記加湿された空気を膨張冷却し、上記空気中
に含まれる塵埃を核として上記湿分を凝縮させる膨張タ
ービンと、上記凝縮液滴を分離する遠心分離器と、上記
膨張タービンにより駆動され、発生した電力を上記加湿
器に供給する発電機とを備えたことを特徴とするクリー
ンエア製造装置、ならびに原料空気を圧縮する圧縮機と
、上記圧縮された空気を加温する加湿器と、上記加湿さ
れた空気を膨張冷却し、上記空気中に含まれる塵埃を核
として上記湿分を凝縮させる膨張タービンと、上記凝縮
液滴を分離する遠心分離器および電気集塵器と、上記膨
張タービンにより駆動され、発生した電力を上記加湿器
および上記電気集塵器に供給する発電機とを備えたこと
を特徴とするクリーンエア製造装置を提案するものであ
る。[Means for Solving the Problems] In order to solve the conventional problems, the present invention provides a compressor that compresses raw air, a humidifier that humidifies the compressed air, and a humidifier that humidifies the humidified air. an expansion turbine that expands and cools the air and condenses the moisture using dust contained in the air as a nucleus; a centrifugal separator that separates the condensed droplets; and a centrifugal separator that separates the condensed droplets. A clean air production device characterized in that it is equipped with a generator that supplies air to the air, a compressor that compresses raw air, a humidifier that heats the compressed air, and an air generator that expands and cools the humidified air. and an expansion turbine that condenses the moisture using dust contained in the air as a core, a centrifugal separator and an electric precipitator that separate the condensed droplets, and an electric power generated by the expansion turbine. The present invention proposes a clean air production device comprising the humidifier and a generator that supplies the electric precipitator.
（作 用〕
原料大気をコンプレッサで圧縮したのち、相対湿度が６
０〜９０％程度となるように水などで加湿する。それか
ら膨張タービンを用いて急激に膨張冷却して、蒸気を滴
状に凝縮させる。その後、遠心分離器で、さらに必要な
らば電気集塵器で、大気中から液滴を分離する。(Function) After compressing the raw material atmosphere with a compressor, the relative humidity becomes 6.
Humidify with water etc. so that the humidity is about 0 to 90%. The steam is then rapidly expanded and cooled using an expansion turbine to condense the steam into droplets. Thereafter, the droplets are separated from the atmosphere using a centrifuge and, if necessary, an electrostatic precipitator.
大気中に含まれている塵埃は、凝縮核として液滴中に取
込まれ、大気中から分離される。このような場合の水蒸
気の凝縮（不均一凝縮）では、直径が数ｎｓ以上の微粒
子（ダスト）が凝＊ 積として作用するので、空気中に
含まれる直径ｎ１１ないしサブミクロン程度の微粒子も
十分取り除くことができる。すなわち、水蒸気の凝縮で
ダストを捕獲するのである。Dust contained in the atmosphere is taken into the droplets as condensation nuclei and separated from the atmosphere. In the condensation of water vapor (heterogeneous condensation) in such cases, fine particles (dust) with diameters of several ns or more act as condensates, so it is necessary to sufficiently remove fine particles with diameters of n11 to submicron contained in the air. be able to. In other words, dust is captured by condensing water vapor.
なお、圧縮した原料大気のエネルギは膨張タービンに接
続した発電機で回収し、加湿器や電気集塵器を働かせる
のに用いる。The energy from the compressed raw material atmosphere is recovered by a generator connected to the expansion turbine and used to operate the humidifier and electrostatic precipitator.
第１図は本発明の一実施例を示す系統図である。 FIG. 1 is a system diagram showing one embodiment of the present invention.
微小塵埃を含む原料空気（１）は、あらかじめプレダス
タ−（プレフィルタ−）（２）で除ＩＩ！（主に１μ園
以上の塵埃を除去）された後に、圧縮機（３）で圧縮さ
れ、膨張タービン（５）へ流入する。流入する圧縮空気
の相対湿度が６０％よりも低い場合には、相対湿度が６
０〜９０％程度になるように加湿器（４）で加湿する。The raw air (1) containing minute dust is removed in advance with a pre-duster (pre-filter) (2) II! (Mainly removes dust of 1 μm or more) After that, it is compressed by a compressor (3) and flows into an expansion turbine (5). If the relative humidity of the incoming compressed air is lower than 60%, the relative humidity is 60%.
Humidify with a humidifier (4) so that the temperature is about 0 to 90%.
圧縮空気は、膨張タービン（５）内で急激に膨張して冷
却されるため、圧縮空気中の微小塵埃（プレダスタ−（
２）で除去できなかった塵埃）を核として水蒸気が凝縮
し、液滴が発生する０発生した液滴は、サイクロン型の
遠心分離器（７）で空気より分離され凝縮水（８）とし
て収集される。Since the compressed air is rapidly expanded and cooled in the expansion turbine (5), fine dust (pre-duster) in the compressed air is generated.
The water vapor condenses using the dust that could not be removed in step 2) as a core, and droplets are generated.The generated droplets are separated from the air in a cyclone-type centrifuge (7) and collected as condensed water (8). be done.
ここで、奥の基となる奥分子や脱ガスの対象となる水溶
性ガスの分子も、微小塵埃と同様に凝縮核として作用し
、更には発生した液滴と衝突したり、これに吸収された
りして、液滴内に取り込まれる。したがって、このよう
な液滴を気体中から分離することにより、除塵、除湿、
脱臭、脱ガスが同時に達成され、消音器０［Ｉ）を介し
てクリーンエアθ１）として放出される。また、圧縮空
気のエネルギは膨張タービン（５）に接続された発電機
（６）で回収し、加湿器（４）などの電力として使用す
る。Here, the Oku molecules that form the base of Oku and the water-soluble gas molecules that are the target of degassing also act as condensation nuclei in the same way as microscopic dust, and furthermore, they collide with or are absorbed by the generated droplets. and is incorporated into the droplet. Therefore, by separating such droplets from the gas, dust removal, dehumidification,
Deodorization and degassing are achieved at the same time, and the air is discharged as clean air θ1) through the silencer 0 [I). Furthermore, the energy of the compressed air is recovered by a generator (6) connected to the expansion turbine (5) and used as power for a humidifier (4) and the like.
第、２図は、圧縮した原料空気（湿り空気）が膨張ター
ビン内を膨張する際の、湿り空気の圧力変化と水蒸気の
状態変化を示す模式図である。点Ａは膨張タービン入口
の状態、点Ｂは滴状凝縮開始点、点Ｃは液滴の発生がほ
ぼ終わる点、点りは膨張タービン出口の状態をそれぞれ
示す０点Ｅは、凝縮が起こらないと仮定した場合の膨張
タービン出口状態である。ＢＣ間で滴状凝縮がほぼ終了
（液滴への塵埃の取込みが完了）し、ＣＤ間の飽和膨張
状態で液滴が成長する。液滴分離器の入口状態は点りと
なる。なお、点Ｂから点Ｃにかけての湿り空気の圧力上
昇は凝縮に伴う潜熱放出による。FIGS. 2A and 2B are schematic diagrams showing changes in the pressure of the humid air and changes in the state of water vapor when the compressed feed air (humid air) expands in the expansion turbine. Point A is the state at the inlet of the expansion turbine, point B is the starting point of droplet condensation, point C is the point where droplet generation has almost finished, and dots are the state at the outlet of the expansion turbine.0 Point E is where no condensation occurs. This is the expansion turbine exit state assuming that Droplet condensation is almost completed between BC (incorporation of dust into the droplet is completed), and the droplet grows in a saturated expansion state between CD. The inlet state of the droplet separator is solid. Note that the pressure increase in humid air from point B to point C is due to latent heat release accompanying condensation.
第３図は、本発明の他の実施例を示す系統図である。こ
の図において、前記第１図によって説明した第１の実施
例と同様の部分については、同一の符号を付け、詳しい
説明を省略する。FIG. 3 is a system diagram showing another embodiment of the present invention. In this figure, the same parts as those in the first embodiment described with reference to FIG. 1 are given the same reference numerals, and detailed explanation will be omitted.
この実施例では、膨張タービン（５）内で水蒸気が凝縮
して生じた液滴は、まず遠心分離器（７）で空気より分
離され、更に静電式の電気集塵器（９）で空気より分離
される。遠心分離器（７）と電気集ｍ器（９）を通過す
る間に、除塵と同時に除湿、脱臭、脱ガスが達成され、
消音器Ｇｏ）を介してクリーンエア（１０として放出さ
れる。遠心分離器（７）と電気集塵器（９）で空気から
除去された液滴は凝縮水（８）として収集される。また
、圧縮空気のエネルギは膨張タービン（５）内を膨張す
る際に発電機（６）で回収し、加湿器（４）や電気集塵
器（９）などの電力として使用する。In this embodiment, droplets generated by condensing water vapor in the expansion turbine (5) are first separated from the air in a centrifugal separator (7), and then separated from the air in an electrostatic precipitator (9). more separated. While passing through the centrifugal separator (7) and the electric collector (9), dehumidification, deodorization, and degassing are achieved simultaneously with dust removal.
It is discharged as clean air (10) through a silencer (Go). The droplets removed from the air by a centrifuge (7) and an electrostatic precipitator (9) are collected as condensed water (8). The energy of the compressed air is recovered by the generator (6) when it expands in the expansion turbine (5) and used as power for the humidifier (4), the electric precipitator (9), etc.
本発明のクリーンエア製造装置によれば、従来の技術で
は除去できなかった直径がサブミクロン以下の空気中塵
埃を取り除くことができ、同時に湿分も除かれる。更に
は脱臭と脱ガス（水溶性ガス）をも行なうことができる
。According to the clean air production device of the present invention, it is possible to remove dust in the air with a diameter of submicron or less, which could not be removed using conventional techniques, and at the same time, moisture is also removed. Furthermore, deodorization and degassing (water-soluble gas) can also be performed.
第１図は本発明の一実施例を示す系統図、第２図は膨張
タービン内の湿り空気の圧力変化と水蒸気の状態変化を
示す図、第３図は本発明の他の実施例を示す系統図であ
る。
（１）・・・原料空気（含塵空気） 、 （２）・・・
プレダスタ−１（３）・・・圧縮機、（４）・・・加湿
器。
（５）・・・膨張タービン、（６）・・・発電機。
（７）・・・遠心分離器、（８）・・・４１縮水。
（９）・・・電気集塵器、００・・・消音器。
（１１）・・・クリーンエア。Fig. 1 is a system diagram showing one embodiment of the present invention, Fig. 2 is a diagram showing changes in the pressure of humid air and changes in the state of water vapor in the expansion turbine, and Fig. 3 shows another embodiment of the invention. It is a system diagram. (1)... Raw air (dust-containing air), (2)...
Pre-Duster-1 (3)... Compressor, (4)... Humidifier. (5)...expansion turbine, (6)...generator. (7)...Centrifugal separator, (8)...41 Water condensation. (9)... Electrostatic precipitator, 00... Silencer. (11)...Clean air.
Claims (2)
気を加湿する加湿器と、上記加湿された空気を膨張冷却
し、上記空気中に含まれる塵埃を核として上記湿分を凝
縮させる膨張タービンと、上記凝縮液滴を分離する遠心
分離器と、上記膨張タービンにより駆動され、発生した
電力を上記加湿器に供給する発電機とを備えたことを特
徴とするクリーンエア製造装置。(1) A compressor that compresses raw air, a humidifier that humidifies the compressed air, expands and cools the humidified air, and condenses the moisture using dust contained in the air as a core. A clean air production device comprising an expansion turbine, a centrifugal separator that separates the condensed droplets, and a generator that is driven by the expansion turbine and supplies generated power to the humidifier.
気を加湿する加湿器と、上記加湿された空気を膨張冷却
し、上記空気中に含まれる塵埃を核として上記湿分を凝
縮させる膨張タービンと、上記凝縮液滴を分離する遠心
分離器および電気集塵器と、上記膨張タービンにより駆
動され、発生した電力を上記加湿器および上記電気集塵
器に供給する発電機とを備えたことを特徴とするクリー
ンエア製造装置。(2) A compressor that compresses raw air, a humidifier that humidifies the compressed air, expands and cools the humidified air, and condenses the moisture using dust contained in the air as a core. An expansion turbine, a centrifugal separator and an electrostatic precipitator that separate the condensed droplets, and a generator driven by the expansion turbine to supply generated power to the humidifier and the electrostatic precipitator. A clean air production device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11606789A JP2634239B2 (en) | 1989-05-11 | 1989-05-11 | Clean air production equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11606789A JP2634239B2 (en) | 1989-05-11 | 1989-05-11 | Clean air production equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02298309A true JPH02298309A (en) | 1990-12-10 |
| JP2634239B2 JP2634239B2 (en) | 1997-07-23 |
Family
ID=14677890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11606789A Expired - Fee Related JP2634239B2 (en) | 1989-05-11 | 1989-05-11 | Clean air production equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2634239B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6530979B2 (en) * | 2001-08-03 | 2003-03-11 | Joseph Carl Firey | Flue gas cleaner |
-
1989
- 1989-05-11 JP JP11606789A patent/JP2634239B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6530979B2 (en) * | 2001-08-03 | 2003-03-11 | Joseph Carl Firey | Flue gas cleaner |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2634239B2 (en) | 1997-07-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |