JP2634238B2 - Clean air production equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a clean air manufacturing apparatus used in a semiconductor manufacturing industry, a food manufacturing industry, a pharmaceutical manufacturing industry, or the like.
The present invention relates to a clean air production device used as a device for removing industrial and bio-related emissions related to air pollution.

[Conventional technology]

2. Description of the Related Art Conventional clean air manufacturing apparatuses include an electrostatic type electrostatic precipitator and an excessive type precipitator for dust removal. For the purpose of preventing air pollution, a cleaning method for deodorizing and degassing is used in addition to the above-mentioned apparatus.

[Problems to be solved by the invention]

In the conventional apparatus, there is a lower limit to the size of dust that can be removed, and in any case, it is very difficult to remove dust (fine particles) of 0.1 μm (submicron) or less.

An object of the present invention is to solve the above-mentioned problems and to provide a clean air production apparatus capable of removing dust of submicron size or less, and simultaneously performing deodorization and degassing.

[Means for solving the problem]

A device for cooling and supplying a source air containing dust, a device for supplying a condensable gas in a superheated state close to saturation, a cyclone-type centrifuge supplied with the cooled source air and the condensable gas, and A clean air producing apparatus comprising: an electrostatic dust collector and a dehumidifier provided on an air discharge pipe connected to a downstream side of the centrifuge.

[Action]

In the present invention, the raw material air and the condensable gas sent from the respective supply devices are swirled and mixed in the cyclone type centrifugal separator. Since the raw air is cooled, when it comes into contact with a condensable gas, droplets are generated with dust contained in the raw air as nuclei. Here, dust of submicron size or less also becomes a nucleus for generating droplets. The generated droplets are separated from air by a cyclone centrifuge. The air from which the droplets have been separated is discharged from an air discharge pipe connected downstream of the centrifugal separator, but still contains some droplets or moisture. These are removed by an electrostatic dust collecting device and a dehumidifying device provided on the discharge pipe, and the air becomes clean air containing no dust and having adjusted humidity. In addition, since odor molecules, water-soluble gas, and the like also act as condensation nuclei or are absorbed by the generated droplets, the device according to the present invention also has a function as a deodorizing device and a degassing device.

〔Example〕

FIG. 1 shows a system diagram of an embodiment of the present invention. In the figure, 1 is a cyclone type centrifugal separator, 2 is an outer cylinder of the separator, 3 is an inner cylinder of the separator, 4 is a pair of raw air nozzles connected in a tangential direction of the outer circumference of the outer cylinder 2, and 5 is Similarly, a pair of steam nozzles 6 connected in a direction tangential to the outer periphery of the outer cylinder 2 are discharge ports provided at a lower portion of the outer cylinder 2. Symbols 2 to 6 above
A cyclone-type centrifuge is constituted by the portion marked with. 7 is a raw air blower, 8 is a blower line connected to the blower, 9 is a raw material air cooler connected to the same line, 10 is connected to the cooler, and branched to form the centrifugal separator. A cooling air pipe connected to a pair of raw material air nozzles 4. The material air supply system is constituted by the parts denoted by reference numerals 7 to 10 as described above. 11
Is a steam generator that generates superheated steam near saturation,
Reference numeral 12 denotes a steam supply pipe connected to the steam generator, branched and connected to a pair of steam nozzles 5 of the centrifugal separator. A steam supply system is constituted by the parts denoted by the reference numerals 11 and 12. 13 is an air discharge pipe connected to the upper end of the inner cylinder 3 of the centrifugal separator, 14 is an electrostatic electrostatic precipitator provided on the air discharge pipe, and 15 is a discharge port provided in the precipitator. Reference numeral 16 denotes a dehumidifier provided on the air discharge pipe 13 downstream of the dust collector 14. An air discharging and dehumidifying system is constituted by the parts denoted by the reference numerals 13 to 16. In the figure, A is raw air, B is cooled raw air, C is steam, D is condensed water, E is air containing moisture, F is condensed water, and G is clean air.

In the present apparatus, the raw material air A is sent by a raw material air blower 7, passes through a raw material air cooler 9, and becomes cooled raw material air B, and is supplied from a raw material air nozzle 4 into the cyclone centrifuge 1. It is blown tangentially, producing a swirling flow. The steam C generated by the steam generator 11
Similarly, as described above, the gas is blown into the cyclone-type centrifugal separator 1 from the pair of steam nozzles 5 and turns. The cooled raw material air B has been cooled to the point X shown in FIG. 2 by the raw material air cooler 9, and the vapor C has the two gases in the centrifugal separator 1 because of the state at the point Y. Contact, droplet-like condensation occurs around dust containing submicron or less dust contained in the raw material air, and the pressure drops to the Z point. The droplets containing the dust are centrifuged from the air by a cyclone, and are discharged as condensed water D from a discharge port 6 at a lower portion of the centrifuge 1. After the condensed water D is removed, the air E is discharged from the air discharge pipe 13, and this air still contains some droplets or moisture.
The droplets not separated by the centrifugal separator 1 are separated from air by the following electrostatic electrostatic precipitator 14 and discharged from the outlet 15 as condensed water F. Further, the moisture in the air is finally removed by the dehumidifier 16 to produce clean air G containing no dust and having adjusted humidity.

As described in detail above, the apparatus according to the present embodiment has made it possible to remove ultra-fine particles of submicron or less in air, which were not possible in the past. In the present apparatus, deodorization and degassing (water-soluble gas) are performed simultaneously with the removal of reduced dust.

〔The invention's effect〕

The clean air production apparatus of the present invention is an apparatus for cooling and supplying a source air containing dust, an apparatus for supplying a condensable gas in a superheated state close to saturation, and a supply of the cooled source air and the condensable gas. Since it is provided with a cyclone-type centrifugal separator and an electrostatic precipitator and a dehumidifier provided on an air discharge pipe connected to the downstream side of the centrifugal separator, it contains submicron or less dust. Dust can be removed, and at the same time, deodorization, degassing, and humidity adjustment can be performed.

[Brief description of the drawings]

FIG. 1 is a system diagram of one embodiment of the present invention, and FIG. 2 is a diagram for explaining the principle of the embodiment. 1 Cyclone centrifuge, 2 outer cylinder, 3 inner cylinder, 4 raw air nozzle, 5 steam nozzle, 6
Outlet 7, Blower for air blow of raw material, 8 ... Blower line, 9 ... Cooler of raw air, 10 ... Cooling air pipe, 11 ...
Steam generator, 12 ... steam supply pipe, 13 ... air discharge pipe,
14: electrostatic electrostatic precipitator, 15: exhaust pipe, 16: dehumidifier, A: raw material air, B: cooled raw material air, C
... steam, D ... condensed water, E ... air, F ... condensed water,
G: Clean air.

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ Identification number Agency reference number FI Technical display location B03C 3/00 B03C 3/00 G

Claims (1)

(57) [Claims] An apparatus for cooling and supplying a raw air containing dust, an apparatus for supplying a condensable gas in a superheated state close to saturation,
A cyclone-type centrifuge to which the cooled raw material air and the condensable gas are supplied, and an electrostatic precipitator and a dehumidifier provided on an air discharge pipe connected to the downstream side of the centrifuge And a clean air producing apparatus comprising: