JP2634239B2 - Clean air production equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a clean air manufacturing apparatus used in a semiconductor manufacturing industry, a food manufacturing industry, a medical product manufacturing industry, and the like, and an industrial emission that causes air pollution. , A bio-related effluent removal device and the like.

[Conventional technology]

2. Description of the Related Art Conventional clean air manufacturing apparatuses include an electrostatic electric dust collector and a filtration dust collector for removing dust. As for air pollution, a cleaning method or the like is used for the purpose of deodorization and degassing in addition to the above-mentioned conventional apparatus.

[Problems to be solved by the invention]

In the conventional apparatus, there is a lower limit to the size of dust that can be removed, and in any case, it is very difficult to remove dust (fine particles) of 0.1 μm (submicron) or less.

An object of the present invention is to provide a clean air producing apparatus capable of removing dust in the air of submicron size or less and simultaneously performing deodorization and degassing (water-soluble gas).

[Means for solving the problem]

The present invention provides a compressor for compressing raw air, a humidifier for humidifying the compressed air, and expanding and cooling the humidified air to solve the conventional problem. An expansion turbine that condenses the moisture with dust as a core, a centrifugal separator that separates the condensed droplets, and a generator that is driven by the expansion turbine and supplies generated power to the humidifier. A clean air producing apparatus, and a compressor that compresses the raw air, a humidifier that humidifies the compressed air, and expands and cools the humidified air to remove dust contained in the air. An expansion turbine that condenses the moisture as a nucleus, a centrifugal separator and an electrostatic precipitator that separates the condensed droplets, and the electric power that is driven by the expansion turbine and that generates power is used as the humidifier and the electric precipitator. It proposes a clean air manufacturing apparatus characterized by comprising a generator for supplying the vessel.

[Action]

After compressing the raw material air with a compressor, the relative humidity
Humidify with water or the like so as to be about 60 to 90%. The steam is then rapidly expanded and cooled using an expansion turbine to condense the vapor in the form of drops. Thereafter, the droplets are separated from the atmosphere by a centrifuge and, if necessary, by an electrostatic precipitator.

Dust contained in the air is taken into the droplets as condensation nuclei and separated from the air. In the condensation of water vapor (heterogeneous condensation) in such a case, fine particles (dust) having a diameter of several nm or more act as condensation nuclei. Therefore, it is necessary to sufficiently remove fine particles with a diameter of about nm or submicron contained in the air. Can be. That is, dust is captured by condensation of water vapor.

The energy of the compressed raw material air is recovered by a generator connected to an expansion turbine and used for operating a humidifier or an electric dust collector.

〔Example〕

 FIG. 1 is a system diagram showing one embodiment of the present invention.

The raw air (1) containing fine dust is preliminarily dust-removed (mainly dust having a diameter of 1 μm or more) by a pre-duster (pre-filter) (2), and then compressed by a compressor (3) to form an expansion turbine (5). ). If the relative humidity of the incoming compressed air is lower than 60%,
Humidify with a humidifier (4) to about 90%. Since the compressed air expands rapidly in the expansion turbine (5) and is cooled, water vapor is condensed by micro-dust (dust that cannot be removed by the pre-duster (2)) in the compressed air, and droplets are formed. Occurs. The generated droplets are separated from air by a cyclone-type centrifuge (7) and collected as condensed water (8).

Here, the odor molecules serving as the base of the odor and the molecules of the water-soluble gas to be degassed also act as condensation nuclei similarly to the fine dust, and further collide with the generated droplets or are absorbed by them. In the droplets. Therefore, by separating such droplets from the gas, dust removal, dehumidification, deodorization, and degassing are simultaneously achieved, and are discharged as clean air (11) via the silencer (10). The energy of the compressed air is collected by a generator (6) connected to the expansion turbine (5) and used as electric power for a humidifier (4).

FIG. 2 is a schematic diagram showing a change in the pressure of wet air and a change in the state of steam when compressed raw air (humid air) expands inside the expansion turbine. Point A indicates the state of the expansion turbine inlet, point B indicates the drop-like condensation start point, point C indicates the point at which the generation of droplets is almost finished, and point D indicates the state of the expansion turbine outlet. Point E is the expansion turbine outlet condition assuming that no condensation occurs. Droplet condensation is almost completed between BC (the incorporation of dust into the droplet is completed), and the droplet grows in a state of saturated expansion between CD. The inlet state of the droplet separator is point D. The rise in the pressure of the humid air from point B to point C is due to the latent heat release accompanying the condensation.

FIG. 3 is a system diagram showing another embodiment of the present invention.
In this figure, the same parts as those in the first embodiment described with reference to FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

In this embodiment, droplets generated by condensation of water vapor in the expansion turbine (5) are first separated from air by a centrifugal separator (7), and then separated by an electrostatic electrostatic precipitator (9). More separated. While passing through the centrifugal separator (7) and the electrostatic precipitator (9), dehumidification, deodorization and degassing are achieved at the same time as dust removal, and are discharged as clean air (11) through the silencer (10). . Droplets removed from the air by the centrifuge (7) and the electrostatic precipitator (9) are collected as condensed water (8).
The energy of the compressed air is collected by the generator (6) when expanding in the expansion turbine (5), and is used as electric power for the humidifier (4) and the electric dust collector (9).

〔The invention's effect〕

ADVANTAGE OF THE INVENTION According to the clean air manufacturing apparatus of this invention, the dust in the air whose diameter is less than submicron which cannot be removed by the prior art can be removed, and the moisture is also removed at the same time. Furthermore, deodorization and degassing (water-soluble gas) can be performed.

[Brief description of the drawings]

FIG. 1 is a system diagram showing one embodiment of the present invention, FIG. 2 is a diagram showing a change in pressure of humid air in an expansion turbine and a change in a state of steam, and FIG. 3 shows another embodiment of the present invention. It is a system diagram. (1) ... material air (dust-containing air), (2) ... pre-duster, (3) ... compressor, (4) ... humidifier, (5) ...
... Expansion turbine, (6) ... Generator, (7) ... Centrifuge, (8) ... Condensed water, (9) ... Electric dust collector, (1
0) Silencer, (11) Clean air.

Continuation of the front page (51) Int.Cl. ⁶ Identification number Agency reference number FI Technical display location F01K 27/00 F01K 27/00 A (72) Inventor Nobuhiro Takahira 1-1-1, Akunouracho, Nagasaki City, Nagasaki Prefecture Mitsubishi Heavy Industries (72) Inventor Masaaki Taniguchi 1-1, Akunouramachi, Nagasaki City, Nagasaki Prefecture Mitsubishi Heavy Industries, Ltd. Nagasaki Laboratory (72) Inventor Gentaka Tsujimura 1-1-1, Akunouramachi, Nagasaki City, Nagasaki Mitsubishi Heavy Industry Co., Ltd.

Claims (2)

(57) [Claims] 1. A compressor for compressing raw material air, a humidifier for humidifying the compressed air, an expansion and cooling of the humidified air, and the humidification of the humidified air using dust contained in the air as a core. A clean air producing apparatus comprising: an expansion turbine for condensing; a centrifugal separator for separating the condensed droplets; and a generator driven by the expansion turbine and supplying generated power to the humidifier. . 2. A compressor for compressing raw air, a humidifier for humidifying the compressed air, and expanding and cooling the humidified air to remove the moisture by using dust contained in the air as a core. An expansion turbine for condensing, a centrifugal separator and an electrostatic precipitator for separating the condensed droplets, and a generator driven by the expansion turbine and supplying generated power to the humidifier and the electric precipitator. A clean air production apparatus comprising: