JPH0229720Y2 - - Google Patents

Info

Publication number
JPH0229720Y2
JPH0229720Y2 JP1987103853U JP10385387U JPH0229720Y2 JP H0229720 Y2 JPH0229720 Y2 JP H0229720Y2 JP 1987103853 U JP1987103853 U JP 1987103853U JP 10385387 U JP10385387 U JP 10385387U JP H0229720 Y2 JPH0229720 Y2 JP H0229720Y2
Authority
JP
Japan
Prior art keywords
turntable
cradle
cylinder
wafers
cradles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987103853U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6375036U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987103853U priority Critical patent/JPH0229720Y2/ja
Publication of JPS6375036U publication Critical patent/JPS6375036U/ja
Application granted granted Critical
Publication of JPH0229720Y2 publication Critical patent/JPH0229720Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Centrifugal Separators (AREA)
  • Drying Of Solid Materials (AREA)
JP1987103853U 1987-07-08 1987-07-08 Expired JPH0229720Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987103853U JPH0229720Y2 (enEXAMPLES) 1987-07-08 1987-07-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987103853U JPH0229720Y2 (enEXAMPLES) 1987-07-08 1987-07-08

Publications (2)

Publication Number Publication Date
JPS6375036U JPS6375036U (enEXAMPLES) 1988-05-19
JPH0229720Y2 true JPH0229720Y2 (enEXAMPLES) 1990-08-09

Family

ID=30976801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987103853U Expired JPH0229720Y2 (enEXAMPLES) 1987-07-08 1987-07-08

Country Status (1)

Country Link
JP (1) JPH0229720Y2 (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6444242B2 (ja) * 2015-03-30 2018-12-26 トミー工業株式会社 遠心分離機

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1450141A (en) * 1973-04-13 1976-09-22 Skf Uk Ltd Clutch release bearings
JPS5032750A (enEXAMPLES) * 1973-07-27 1975-03-29
JPS5478079A (en) * 1977-12-05 1979-06-21 Hitachi Ltd Wafer washing and drying unit

Also Published As

Publication number Publication date
JPS6375036U (enEXAMPLES) 1988-05-19

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