JPH02291333A - Frame conveying device - Google Patents

Abstract

PURPOSE:To reduce the possibility of occurrence of a bite on conveyance by forming projecting parts, respectively on the center parts of a pair of conveying rails so as to project in the closing direction of the pair of conveying rails, and by setting the space between the projecting parts on both conveying rails to a value which is smaller than the space between both end parts of two projecting rails, so as to eliminate the interference between a frame and the conveying rails. CONSTITUTION:When a frame 1 is clamped in its entirely after conveying rails 2, 3 being moved in its closing direction, projecting parts 15, 16 are formed on the center sections of the conveying rails 2, 3 so as to be projected in a closing direction, and the space between the projecting parts 15, 16 of both conveying rails 2, 3 is set to a value which is smaller than the space between both end parts 2a, 3a of two conveying rails 2, 3. Accordingly, even though one end part of the frame 1 makes contact with the conveying rails 2, 3 due to a warp of the frame 1 upon clamping, the conveying rails 2, 3 and the frame make contact with each other while being inclined in one and the same direction so that the contact angle therebetween becomes smaller, thereby it is possible to prevent the interference between the frame and the conveying rails 2, 3 even though the width of the warp of the frame 1 is present.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a frame transport device, and more particularly to a frame transport device that transports and positions an entire frame in a semiconductor device manufacturing process.

<Prior art> In order to reduce the number of manufacturing steps, frames for semiconductor devices on which semiconductor elements such as transistors and light emitting elements are mounted are connected in the semiconductor manufacturing process by connecting multiple lead terminal plates on which semiconductor elements are mounted. A comb-shaped structure connected and supported by the body is used.

Since only one end of the lead terminal is connected and supported by the connecting body, this frame has a structure in which the lead terminal is easily stretched and bowed.

In addition, there is an increasing tendency for frames to become longer in order to reduce material costs, and warpage is further increasing. Furthermore, in order to reduce the number of manufacturing steps, manufacturing equipment is becoming more and more multi-headed, and it is now necessary to position the entire warped frame at once.

Therefore, the conventional frame transport device that transports and positions the entire frame during the process has a pair of transport rails 2 and 3 for transporting the semiconductor device frame 1, as shown in FIG.
and an opening/closing mechanism 4 that opens and closes both transport rails 2.3 in a direction orthogonal to the transport direction of the frame 1 and positions the frame I in the closed state.

This opening/closing mechanism 4 includes a drive gear 5 rotated by a drive device such as a motor or an actuator, a driven gear 6 that meshes with the drive gear 5 and rotates, and abuts against the inner surface of both ends of the conveyance rail 2.3. Eccentric cams 7 and 8 for opening and closing the transport rails 2.3 by rotation; a drive shaft 9 transmitting the rotation of the drive gear 5 to the cam 7; and a drive shaft 9 transmitting the rotation of the driven gear 6 to the cam 8. It consists of a driven shaft IO and a spring 11.12 which biases the transport rail 2.3 against the cam 7.8.

In addition, in the figure, 13.14 is a base to which the conveyance rail 2.3 is slidably attached.

<Problems to be Solved by the Invention> In the conventional frame transport device, the positioning of the frame l is performed by adjusting the distance between the transport rails 2 and 3 by (the width of the frame l) +
(o, 1 to 0.2 mm), the opening/closing mechanism 4 limits the displacement of the frame 1, and the positioning pin is inserted into the positioning hole on the coupling body side of the frame 1 from above.

However, in the conventional frame conveying device, as shown in Fig. 3,
Since the frame contact portion of the transport rail 2.3 is formed flat, the operating rate of the device itself is reduced or the frame is damaged by 1G due to the following reasons.

(1) The frame I is suspended or pushed out by the frame transport tool and transported to the transport rail 2.3. At this time, as shown in Fig. 4, the frame I
may be placed on the transport rail 2.3 in a rotated and diagonally shifted state. Therefore, if the opening/closing mechanism 4 attempts to clamp the transport rails 2.3 at narrow intervals in order to position the frame 1, the contact angle between the frame 1 and the contact portion of the transport rail 2.3 increases.

That is, the frame I and the conveyance rail 2.3 interfere with each other due to a deviation in the rotational direction of the frame I, making it easy for them to jam, resulting in a frame conveyance root and making it impossible to clamp the frame I.

(2) As shown in FIG. 5, in order to position the frame 1 having the warp width D, the opening/closing mechanism 4 widens the interval between the transport rails 2.3 and clamps the frame I at the maximum width of the entire frame. When this happens, the clamping force is concentrated at the center of the frame 1 (point A) and at both ends of the frame 1 (points B and C).

As a result, the stopping position of the frame I becomes unstable, and the positioning holes of the frame 1 interfere with the positioning bins, causing deformation of the positioning holes and distortion of the frame I, resulting in failure of the frame I.

SUMMARY OF THE INVENTION In view of the above-mentioned problems, it is an object of the present invention to provide a frame conveying device that can improve the operating rate of the device itself and prevent frame failure.

Means for solving the problem> The means for solving the problem according to claim 1 of the present invention is as shown in FIG.
A pair of transport rails 2.3 for transporting the frame l, and an opening/closing mechanism 4 for opening and closing both the transport rails 2.3 in a direction orthogonal to the transport direction of the frame l, the center of the transport rails 2.3 A convex portion 15.1 protruding in the blank direction of the portion
6 are formed respectively, and the convex portions 15 of both conveyance rails 2 and 3 are formed.
．． The interval between the two transport rails 2.1 and 16 is narrower than the interval between the two transport rails 2.3.

Further, the problem solving means according to claim 2 of the present invention, as shown in FIG. At least one of the transport rails 2 and 3 is divided into a plurality of rail blocks 23 to 32, and each of the rail blocks 23 to 32 opens and closes independently. It is.

Effect> In the problem-solving means according to claim 1, the opening/closing mechanism 4
The transport rail 2.3 is moved in the opening direction, and the transport rail 2.3 is in the open state. At this time, the transport rail 2.3
Since the interval is widened, even if the frame I placed on the transport rail 2.3 has a warp width D, it can be transported without interfering with the transport rails 2, 3. Next, the transport rail 2.3 is moved in the closing direction again by the opening/closing mechanism 4, and the transport rail 2.3 enters the closed state. At this time, the interval between the transport rails 2.3 is narrowed, and positioning is performed by clamping the entire frame l.

As described above, when the transport rails 2.3 are moved in the closing direction relative to each other to clamp the entire frame 1, the transport rails 2.
．． Convex portion 1 protruding in the closing direction at the center of 3 5.1
6, and the convex portions 15 and 16 of both conveyor rails 2 and 3
Since the spacing between the two transport rails 2.3 is narrower than the spacing between the ends 2a and 3a of both transport rails 2.3, the ends of the frame l and the transport rails 2.3 may come into contact with each other due to the warping of the frame 1 during clamping. However, the transport rail 2.3 and the frame l contact each other while tilting in the same direction, and the contact angle is smaller than that of conventional frame transport devices, and even if the frame l has a warped width. The frame l and the transport rail 2.3 no longer interfere with each other. Along with this, biting is less likely to occur, and frame conveyance roots are also less likely to occur.
The frame can be transported and positioned regardless of frame warpage.

Furthermore, even if the frame controller is conveyed obliquely to the conveyor rail 2.3 in a state where it is shifted in the rotational direction, since the convex portion 15.16 is formed in the center of the conveyor rail 2.3,
First, since the convex portions 15, 16 come into contact with the ends of the frame I, the deviation in the rotational direction of the frame I is corrected, and the frame I can be clamped at the correct position.

Furthermore, since the distance between the convex portions 15.16 of both transport rails 2, 3 is narrower than the distance between the ends of both transport rails 2.3, distortion of the frame l due to clamping is less likely to accumulate. Therefore, deformation of the frame l is small and deformation of the pin hole when inserting the positioning pin can be prevented.

Further, in the problem solving means according to claim 2, at least one of the transport rails 2.3 is divided into a plurality of rail blocks 23 to 32, and each rail block 2.3 is divided into a plurality of rail blocks 23 to 32.
32 are provided so that they can be opened and closed independently, so when clamping the frame l, the frame l is clamped starting from the central rail block 25.30, and then the rail blocks on both sides of the rail block 25.30 are sequentially clamped. Rail block 24.29 and 2 6, 3 1, rail block 2
Clamp frame 1 by 3.28 and 27.32.

Therefore, even if the frame I is conveyed obliquely to the transport rails 2 and 3 with a deviation in the rotational direction, the clamping force distributed by the central rail block 25.30 will cause the frame I to shift in the rotational direction to some extent. is corrected, and then sequentially corrected with rail blocks on both sides,
Finally, frame 1 is positioned in the correct position. At this time, even if a jam occurs at one location, the position of the frame l can be corrected by using rail blocks in other parts to release the jam, and the frame can be clamped at the correct position.

In this way, since the clamping force is distributed over the entire frame, distortion of the frame due to the clamp can be prevented.

Example Embodiments of the present invention will be described below with reference to the drawings.

[First Embodiment] First, a first embodiment of a frame conveying device corresponding to claim 1 of the present invention will be described based on FIG.

FIG. 1 is a perspective view of a frame conveying device showing a first embodiment corresponding to claim 1 of the present invention. Note that the same reference numerals are given to the same functional parts as those of the prior art shown in FIG. 3.

As shown in the figure, the frame transport device of this embodiment includes a pair of transport rails 2 and 3 for transporting a semiconductor device frame l;
Frame both transport rails 2.3! 5. An opening/closing mechanism 4 that opens and closes in a direction perpendicular to the conveyance direction of the conveyor rails 2.3, and a convex groove 1 protruding in the closing direction at the center of both conveyance rails 2.3.
1 and 6 are formed, respectively, and the distance between the convex portions 15 and 16 of both conveyance rails 2.3 is equal to the distance between both ends 2 of both conveyance rails 2.3.
a, 3 The spacing between the two a is narrower than that between the two a.

The transport rail 2.3 has frame mounting holes 17a, 17b on which the frame 1 is placed, and frame mounting holes 17a, 17b.
It is formed into an L-shape and includes a frame contacting part 18al8b which projects perpendicularly from the frame 1 and comes into contact with the edge of the frame 1.

The transport rail 2.3 has a base 13.3 disposed below it.
14, respectively, so as to be slidable. The contact portion 18a. 18b has a convex portion 15.
16, respectively, and are sloped downward from the convex portions 1 5, 1 6 to the ends of the contact portions 18a, 18b.

It is desirable that the amount of protrusion of the convex portions 1 5 , 1 6 be formed in accordance with the maximum curvature of the warp of the frame l.

The opening/closing mechanism 4 includes a drive gear 5 that rotates counterclockwise by a drive device such as a motor or an actuator, and a driven gear 6 that meshes with and follows the drive gear 5 and rotates clockwise.
, an eccentric cam 7 for opening and closing the rail that comes into contact with both ends 17A of the mounting section 17a of the transport rail 2 and opens and closes the transport rail 2 by its rotation, and both ends 1 of the mounting section 17b of the transport rail 3.
an eccentric cam 8 for opening/closing the rail which abuts on the cam 7B and opens/closes the transport rail 3 by its rotation; a drive shaft 9 transmitting the rotation of the drive gear 5 to the cam 7; and a drive shaft 9 transmitting the rotation of the driven gear 6 to the cam 8. The driven shaft lO and the conveyor rail 2 are connected to the cam 7.
a spring l1 that urges the conveyor rail 3 in the closing direction so that it comes into contact with the cam 8; and a spring 12 that urges the conveyor rail 3 in the closing direction so that it comes into contact with the cam 8.
It is composed of.

The driving gear 5 is fixed to one end of the drive shaft 9, and the cam 7 is fixed to the other end.

The driven shaft 10 has the driven gear 6 fixed to one end thereof,
A cam 8 is fixed to the other side.

The spring 11 has one end engaged with a protrusion 19a protruding from a lower end on the contact portion 18a side of the side surface of the conveyor rail 2, and the other end thereof protruding from an end portion on the side surface of the base l3 on the conveyor rail 3 side. The transport rail 2 is engaged with the projection 20a, which urges the transport rail 2 in the closing direction. The spring 12 has one end engaged with a protrusion +9b protruding from the lower end of the side surface of the conveyor rail 3 on the side of the contact portion 18b, and the other end thereof protruding from the end of the side surface of the base I4 on the side of the conveyor rail 2. The transport rail 3 is engaged with the projection 20b, which urges the transport rail 3 in the closing direction.

The frame 1 is formed in a comb shape by a plurality of lead terminals 2l on which semiconductor elements such as transistors and light emitting elements are mounted, and a connecting body 22 that connects and supports these lead terminals 2l.

In the frame transport device described above, the frame I is transported and positioned as follows.

First, when transporting the frame, when the driving gear 5 is rotated counterclockwise by a driving device such as a motor or an actuator, the driven gear 6 follows the driving gear 5 and rotates clockwise. Then, the rotation of the drive gear 5 and the driven gear 6 is transmitted to the rail opening/closing cam 7 through the drive shaft 9 and the driven shaft IO.
8. At this time, transport rail 2.3 and spring 1
1.12 in the closing direction, the transport rails 2, 3 come into contact with the cams 7, 8, and the rotation of the cams 7.8 causes the transport rails 2.3 to move in the opening direction.

When the cam 7.8 reaches the top dead center, the drive gear 5 stops rotating and the transport rail 2.3 assumes an open position. At this time, the interval between transport rails 2 and 3 is (width of frame l)
+ (1-2 mm). Therefore, even if the frame 1 placed on the mounting portions 17a and +7b of the transport rails 2 and 3 has a warp width D, it can be transported without interfering with the transport rails 2.3.

Next, when positioning the frame 1, the drive device rotates the drive gear 5 counterclockwise again and the cam 7
．． 8 is rotated, and the transport rails 2 and 3 move in the closing direction.

When the cam 7.8 reaches the bottom dead center, the drive gear 5 stops rotating and the transport rail 2.3 assumes a closed position. At this time, the interval between the transport rails 2.3 is (width of frame I)
It is narrowed to +0.1~0.2mm, and the frame l
The whole is clamped, and then the connecting body 22 of the frame 1 is
Position the frame l by inserting a positioning pin into the positioning hole.

As described above, when the transport rails 2.3 are moved in the closing direction relative to each other to clamp the entire frame 1, the transport rails 2.
．． Convex portion 1 protruding in the closing direction at the center of 3 5.1
6, and the contact portion 18a, +8 of the conveyor rail 2.3
Since b is inclined toward the end, the end of frame 1 and transport rail 2 may be bent due to the warping of frame l during clamping.
．． Even if the transport rail 2.3 and the frame come into contact with each other! The two contact each other while being inclined in the same direction, and the contact angle is smaller than that of conventional frame conveying devices. will no longer interfere. Along with this, biting is less likely to occur, and frame conveyance roots are also less likely to occur.
The frame can be transported and positioned regardless of frame warpage.

Furthermore, even if the frame l is conveyed obliquely to the conveyor rail 2.3 in a state where it is shifted in the rotational direction, the convex portion 15.16 is formed in the center of the conveyor rail 2.3, so that the convex portion 15. Since the shaped portions 15, 16 touch the ends of the frame 1,
The misalignment of the frame l in the rotational direction is corrected, and the frame l can be clamped at the correct position.

Furthermore, the distance between the convex portions 1, 5, 1, and 6 of both transport rails 2.3 is such that the distance between the convex portions 1, 5, 1, and 6 of both transport rails 2.3 is the same as that of both ends 2a, 3a of both transport rails 2.3.
Since the spacing is narrower than the spacing between the locating pins, distortion of the frame 1 due to the clamp is less likely to accumulate, and the deformation of the frame 1 is reduced, thereby preventing deformation of the pin hole when inserting the positioning pin.

Therefore, the operating rate of the device itself can be improved and damage to the frame can be prevented.

[Second Embodiment] Next, a second embodiment of the frame conveying device corresponding to claim 2 of the present invention will be described based on FIG. 2.

FIG. 2 is a perspective view of a frame conveying device showing a second embodiment corresponding to claim 2 of the present invention.

As shown in the figure, the frame conveying device of this embodiment has a plurality of (five each) rail blocks 23 to
32, and each of the rail blocks 23 to 32 opens and closes independently.

The rail blocks 23 to 32 have frame mounting portions 17a and 17b on which the frame 1 is placed, respectively, and frame mounting portions 17a and 17b on which the frame 1 is placed.
The rail blocks 23 to 32 are formed into an L-shape by frame contact holes 18a and 18b that vertically protrude from the rail blocks 7a and 17b and come into contact with the frame l.
1.1 and 2 bias each other in the closing direction and the cams 7.8
is in contact with.

Then, the cam 7 that comes into contact with each rail block 23 to 32
．． 8, the distances from the axis 9, IO to the top dead center and the bottom dead center are the same, but when clamping the frame l, from the central rail block 2 5.3 0 to the rail blocks 24.29 on both sides and 26.31, rail blocks 2, 3.2, 8 and 27.32 are changed in shape so as to move in the closing direction in this order. Therefore, the contact portions 18a and 18b of each rail block 23 to 32 are connected to the cam 7.
．． 8 reach the top dead center and bottom dead center and assume the open and closed states, they are arranged in a straight line.

Note that the frame contact portions 18a and 18b are flat and parallel to the conveying direction of the frame I.

The other configurations are the same as in the first embodiment.

In the above configuration, the transport rail 2.3 is divided into a plurality of rail blocks 23 to 32, and each rail block 23 to 3 is divided into a plurality of rail blocks 23 to 32.
2 open and close independently, and the shape of the cam 7.8 is so arranged that it moves about 5.30 degrees ahead of the center rail block 2, so when the frame l is clamped, the center rail blocks 25, 30 The frame l is then clamped by the rail blocks 24, 29 and 26, 31 and the rail blocks 23, 28 and 27, 32 on both sides of the rail block 25, 30 in order.

Therefore, even if the frame l is conveyed obliquely to the conveyor rail 2.3 in a state where it is shifted in the rotational direction, the entire frame l is divided into a plurality of pieces, each of the rail blocks 23 to 32 is shortened, and the central rail Block 2 5.3 0
The misalignment of the frame l in the rotational direction is corrected to some extent by the clamping force distributed by the clamping force, which is then successively corrected by the rail blocks on both sides, and finally the frame l is positioned at the correct position. At this time, even if biting occurs at one location, the position of the frame 1 can be corrected by using the rail blocks of other Φ parts to release the biting, and the frame 1 can be clamped at the correct position.

In this way, since the clamping force is distributed over the entire frame, the frame can be transported and positioned while preventing the frame from being distorted by the clamp, improving the operating rate of the device itself and preventing the frame from being damaged.

It should be noted that the present invention is not limited to the above embodiments, and it goes without saying that many modifications and changes can be made to the above embodiments within the scope of the present invention.

For example, in the second embodiment, only the transport rail 2 may be divided into a plurality of rail blocks, or the transport rail 3 may be divided into a plurality of rail blocks.

Effects of the Invention> As is clear from the above description, according to claim 1 of the present invention, a convex portion protruding in the closing direction is formed in the central part of the conveyor rail, and the distance between the convex portions of both conveyance rails is reduced. is narrower than the distance between both ends of both transport rails,
When the entire frame is clamped by moving the transport rails toward each other in the closing direction, even if the ends of the frame come into contact with the transport rail due to the warpage of the frame, the transport rail and frame will contact each other while tilting in the same direction. The contact angle is smaller than that of conventional frame conveyance devices, and even if the frame has a warped width, there is no interference between the frame and the conveyance rail, making it less likely that biting will occur, and frame conveyance roots will not occur. This makes it possible to transport and position the frame regardless of frame warpage.

In addition, even if the frame is conveyed diagonally to the conveyor rail in a state where it is shifted in the rotation direction, since the convex part is formed in the center of the conveyor rail, the convex part will first come into contact with the edge of the frame. Therefore, the deviation in the rotation direction of the frame is corrected,
You can clamp the frame in the correct position.

Furthermore, since the distance between the convex portions of the transport rail is narrower than the distance between the ends of both transport rails, distortion of the frame due to clamping is less likely to accumulate, and the frame is less deformed when inserting the positioning pin. can prevent deformation of the bottle hole.

According to claim 2, at least one of the transport rails is divided into a plurality of rail blocks, and each rail block is provided to open and close independently, so that when the frame is clamped, the center The frame is clamped starting with the rail block 1, and then the frame 1 is sequentially clamped using the rail blocks on both sides of the center rail block.

Therefore, if the frame is conveyed diagonally to the transport rail with a deviation in the rotational direction, the clamping force distributed by the central rail block will correct the deviation in the rotational direction of the frame to some extent, and then the rail blocks on both sides will sequentially correct the deviation in the rotational direction of the frame. It will be corrected and the frame will finally be positioned in the correct position. At this time, even if a jam occurs in one location, the frame can be corrected by using rail blocks in other parts to release the jam, and the frame can be clamped at the correct position.

In this way, since the clamping force is distributed over the entire frame, distortion of the frame due to the clamp can be prevented.

From the above, it is possible to provide a frame conveying device that can improve the operating rate of the device itself and prevent frame failure.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of a frame conveying device showing an embodiment corresponding to claim 1 of the present invention, and FIG. 2 is a perspective view of a frame conveying device showing an embodiment corresponding to claim 2 of the present invention. 3
The figure is a perspective view showing a conventional frame conveying device, FIG. 4 is a plan view showing a state in which the frame conveyed obliquely to the conveying rail in a state shifted in the rotational direction in the same frame conveying device is clamped, and FIG. The figure is a plan view showing a state in which a warped frame is clamped in the same frame conveying device. l: Frame, 2.3: Transport rail, 4/Opening/closing mechanism, 1
5.16: Convex portion, 23-32: Rail block.

Claims (2)

[Claims] 1. A pair of transport rails for transporting the frame, and an opening/closing mechanism for opening and closing both the transport rails in a direction perpendicular to the transport direction of the frame, and a convex portion protruding in the closing direction in the center of the transport rails. 1. A frame conveyance device characterized in that the distance between the convex portions of both conveyance rails is narrower than the distance between both end portions of both conveyance rails. 2. A pair of transport rails for transporting a frame, and an opening/closing mechanism for opening and closing both transport rails in a direction orthogonal to the transport direction of the frame, and at least one of the transport rails is divided into a plurality of rail blocks. is,
A frame conveyance device characterized in that each of the rail blocks opens and closes independently.