JPH0228597Y2 - - Google Patents

Info

Publication number
JPH0228597Y2
JPH0228597Y2 JP1982051531U JP5153182U JPH0228597Y2 JP H0228597 Y2 JPH0228597 Y2 JP H0228597Y2 JP 1982051531 U JP1982051531 U JP 1982051531U JP 5153182 U JP5153182 U JP 5153182U JP H0228597 Y2 JPH0228597 Y2 JP H0228597Y2
Authority
JP
Japan
Prior art keywords
electrode
plasma
chamber
hcd
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982051531U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58154554U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5153182U priority Critical patent/JPS58154554U/ja
Publication of JPS58154554U publication Critical patent/JPS58154554U/ja
Application granted granted Critical
Publication of JPH0228597Y2 publication Critical patent/JPH0228597Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP5153182U 1982-04-09 1982-04-09 高周波イオン源 Granted JPS58154554U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5153182U JPS58154554U (ja) 1982-04-09 1982-04-09 高周波イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5153182U JPS58154554U (ja) 1982-04-09 1982-04-09 高周波イオン源

Publications (2)

Publication Number Publication Date
JPS58154554U JPS58154554U (ja) 1983-10-15
JPH0228597Y2 true JPH0228597Y2 (en:Method) 1990-07-31

Family

ID=30062239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5153182U Granted JPS58154554U (ja) 1982-04-09 1982-04-09 高周波イオン源

Country Status (1)

Country Link
JP (1) JPS58154554U (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0740468B2 (ja) * 1984-12-11 1995-05-01 株式会社日立製作所 高周波プラズマ発生装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2627284C2 (de) * 1976-06-18 1982-11-11 Wabco Fahrzeugbremsen Gmbh, 3000 Hannover Antiblockierregelsystem für druckmittelbetätigte Fahrzeugbremsen, insbesondere für Straßenfahrzeuge
JPS56148862U (en:Method) * 1980-04-09 1981-11-09

Also Published As

Publication number Publication date
JPS58154554U (ja) 1983-10-15

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