JPH02283969A - 'o' ring - Google Patents

Abstract

PURPOSE:To make it possible to make up an 'O' ring lubricant applied on which will never be evaporated in a high vacuum by applying a solid lubricant by means of sputtering, ion plating, gaseous phase growing method or the like. CONSTITUTION:An 'O' ring is molded out of biton made of fluoro-rubber, nitro butadien rubber or the like, and is applied with a solid lubricating film 2 the surface of which is made up out of solid lubricant. As solid lubricant, a material is used, which has low vapor pressure, a low frictional coefficient, soft and slippery nature, and easily becomes familiar with the other parties. Coating is effected by means of sputtering, ion plating, gaseous phase growing method or the like so that its film is as thin as several mum to tens of mum. Then, when the 'O' ring 1 the surface of which is applied with the solid lubricating film, and each back-up ring 4 are fitted onto a vacuum container in interchangeable relation via a presser cap 5, which results in the presence of the solid lubricating film between a quartz reactor 3 and the 'O' ring 1 so that the quartz reactor 3 can be smoothly fitted onto the vacuum container.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an O-ring used as a sealing means for a vacuum device.

[Prior Art] Conventionally, in a vacuum evaporation apparatus as shown in FIG. 3, in order to create an ultra-high vacuum inside the vacuum chamber 6 and the quartz reactor 3, a O-ring 1
is interposed. When setting the quartz reactor 3 in the vacuum chamber 6 as shown in FIG. lubricant was applied.

[Problem that the invention aims to solve] However, when an O-ring coated with lubricant such as grease or oil is used for an ultra-high vacuum seal in a vacuum evaporation device, the grease or oil evaporates due to the low vacuum. There is a drawback that these carbon components are incorporated into the film during film formation in a vacuum evaporation apparatus, reducing the purity of the film and resulting in a deterioration in film formation.

Therefore, in the case of an apparatus that requires high-purity film formation, an O-ring that is not coated with a lubricant such as grease or oil is used. For this reason, when setting the quartz reactor 3 in the vacuum chamber 6, as shown in FIG. Therefore, there are drawbacks such as improper insertion of the quartz reactor 3 into the O-ring 1 and damage to the quartz reactor and the O-ring.

An object of the present invention is to eliminate the above-mentioned drawbacks and provide an O-ring in which the lubricant on the O-ring surface does not evaporate under high vacuum.

[Means for solving the problem] In order to achieve the above object, the O-ring in the present invention has the following features:
The surface is coated with a solid lubricant using methods such as sputtering, ion blasting, and vapor phase growth.

[Example] Next, the present invention will be explained with reference to the drawings.

FIG. 1 shows an O-ring showing an embodiment of the present invention.

In FIG. 1, the O-ring 1 is made of fluoro rubber Paiton (trade name) or nitrile butadiene rubber (NBR
), the surface of which is coated with a solid lubricant film 2 made of a solid lubricant. Solid lubricants include MoS2, Au, and A, which have low vapor pressure and friction coefficient, and are soft materials that have good compatibility with and slip on the mating material.
g5P b, I n shade is used. This coating is
For example, sputtering, ion plating, vapor phase growth (
CVD), and the film thickness is, for example, several microns.
m to several tens of micrometers.

FIG. 2 is a front view of a vacuum evaporation device (the embodiment is an ion plating device) for coating the surface of the O-ring 1 with the evaporator 8.

In FIG. 2, the vacuum evaporation apparatus includes an electron gun 7 that performs electron beam heating, an evaporation material 8 that is heated and evaporated by the electron gun 7 and coated on the surface of the O-ring 1 to form a solid lubricant film, and an RF ( a high frequency) coil 9, a rolling mesh-like AIO, a motor 11 for drying the mesh-like cage 1O, a high-frequency power source 12 for the RF (high frequency) coil 9, a substrate power source 13, a gas It is composed of an inlet 14.

The operation of coating the surface of the O-ring with evaporation 1a using the vacuum evaporation apparatus described above will be explained.

An O-ring 1 is set in a mesh-like cage 10, and the O-ring 1 is rolled by a motor 11.

The evaporation material 8 is evaporated using the evaporation source 12 to produce an evaporation component, and the evaporation component and a specific gas from the gas inlet 14 are mixed to produce a mixed gas.

The mixed gas is connected to an RF (high frequency) coil 9 and a high frequency type i.
! 'The mixed gas is ionized by passing through the high frequency discharge space discharged by XI2. The ionized vaporized gas is accelerated by the substrate power supply 13 to form a solid lubricant film on the surface of the O-ring 1.

In this example, an ion blating method was used to coat the surface of the O-ring with the evaporation material 8.
The same method can be used such as VD and sputtering.

By the above method, the O-ring whose surface is coated with a solid lubricant film and the backup ring 4 are alternately held and installed in a vacuum chamber via the cab 5, and then a solid lubricant film is formed between the quartz reactor 3 and the O-ring 1. exists, and the quartz reactor 3 is smoothly installed in the vacuum chamber.

[Effects of the invention] As explained above, the present invention can prevent vacuum leakage and damage due to improper insertion of the quartz reactor into the O-ring by coating the surface of the O-ring with a solid lubricant. Since the solid lubricant does not evaporate even under ultra-high vacuum conditions, it is possible to form a film with high purity.

[Brief explanation of drawings]

Fig. 1 is an external view showing the construction of an O-ring according to an embodiment of the present invention; Fig. 2 is a front view of a vacuum evaporation device for coating the surface of the O-ring 1 with an evaporating agent; The figure is a vertical cross-sectional view of a vacuum apparatus showing a state in which a quartz reactor has been completely set in a vacuum chamber, and Figure 4 is a partial vertical cross-sectional view of a vacuum evaporation apparatus equipped with a conventional O-ring. , 2... Solid lubricant film, 3... Quartz reactor, 4... Backup ring, 5... Holder cap, 6... Vacuum chamber, 7... Electron gun, 8... Evaporation material, 9 ...RF coil, 10...mesh-like cage,
11... Motor, 12... High frequency power supply, 13... Board power supply, 14. Gas inlet. Figure 1 Figure 2 Procedure:? rt3 Ordinary text (method) % formula % Name of the invention O-ring 3゜Relationship with the person who makes the amendment

Claims (1)

[Claims] 1. An O-ring whose surface is coated with a solid lubricant by a method such as sputtering, ion plating, or vapor phase growth.