JPH0228362A - Semiconductor integrated circuit device - Google Patents
Semiconductor integrated circuit deviceInfo
- Publication number
- JPH0228362A JPH0228362A JP63143962A JP14396288A JPH0228362A JP H0228362 A JPH0228362 A JP H0228362A JP 63143962 A JP63143962 A JP 63143962A JP 14396288 A JP14396288 A JP 14396288A JP H0228362 A JPH0228362 A JP H0228362A
- Authority
- JP
- Japan
- Prior art keywords
- line
- voltage
- circuit
- transistor
- gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims description 13
- 238000010521 absorption reaction Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 4
- 101100489717 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) GND2 gene Proteins 0.000 abstract description 8
- 230000015556 catabolic process Effects 0.000 abstract description 5
- 101100489713 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) GND1 gene Proteins 0.000 abstract description 3
- 102100036285 25-hydroxyvitamin D-1 alpha hydroxylase, mitochondrial Human genes 0.000 abstract 1
- 241000272470 Circus Species 0.000 abstract 1
- 101000875403 Homo sapiens 25-hydroxyvitamin D-1 alpha hydroxylase, mitochondrial Proteins 0.000 abstract 1
- 230000005611 electricity Effects 0.000 description 6
- 230000003068 static effect Effects 0.000 description 6
- 208000035795 Hypocalcemic vitamin D-dependent rickets Diseases 0.000 description 5
- 208000033584 type 1 vitamin D-dependent rickets Diseases 0.000 description 5
- 230000006378 damage Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Dram (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は半導体集積回路装置に関し、特に、半導体基板
上に形成された複数のMOSトランジスタに動作電圧を
供給する経路(配線および端子)が複数、分離されて設
けられている半導体集積回路装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a semiconductor integrated circuit device, and in particular, to a semiconductor integrated circuit device having a plurality of paths (wirings and terminals) for supplying operating voltage to a plurality of MOS transistors formed on a semiconductor substrate. , relates to a semiconductor integrated circuit device that is provided separately.
第2図は入力端子に接続された初段回路と内部回路の電
源およびグランドが分離されている従来例の回路図であ
る。FIG. 2 is a circuit diagram of a conventional example in which the first stage circuit connected to the input terminal and the power supply and ground of the internal circuit are separated.
本従来例は、初段回路3に電源電圧VDDI、接地電圧
GND lをそれぞれ供給する動作電圧供給経路(以下
、単にラインという)Ll 、L2と、内部回路4に電
源電圧VDD2 、接地電圧GND2をそれぞれ供給す
るラインL3 、L4とを具備している。また、入力端
子(例えば、外部接続端子、パッド。This conventional example uses operating voltage supply paths (hereinafter simply referred to as lines) Ll and L2 that supply a power supply voltage VDDI and a ground voltage GND1 to the first stage circuit 3, respectively, and a power supply voltage VDD2 and a ground voltage GND2 to an internal circuit 4, respectively. It is equipped with supply lines L3 and L4. Also, input terminals (e.g. external connection terminals, pads).
リードピン等)5は初段回路3のゲートに接続されてお
り、入力保護回路としてPMO3)ランジスタlおよび
NMOS)ランジスタ2が設けられている。A lead pin etc.) 5 is connected to the gate of the first stage circuit 3, and a PMO 3) transistor 1 and an NMOS) transistor 2 are provided as an input protection circuit.
ラインLlとL3 、ラインL2とL4が分離されてい
るのは、内部回路4による電源電圧および接地電圧の揺
れが初段回路3に伝達され、この初段回路3の入力電圧
マージンが悪化しないようにするためである。また、入
力保護回路を構成するPMOSトランジスタ1.NMO
S)ランジスタ2は、静電気等の高電圧(過電圧)が印
加されてそれぞれのトランジスタの逆耐圧を越えた場合
に導通し、ラインLl 、L2を介して電源VDDI、
接地電圧GNDIへサージを逃がし、初段回路3のゲー
ト酸化膜の破壊を防止するものである。The reason why lines Ll and L3 and lines L2 and L4 are separated is to prevent fluctuations in the power supply voltage and ground voltage caused by the internal circuit 4 from being transmitted to the first stage circuit 3 and to prevent the input voltage margin of this first stage circuit 3 from deteriorating. It's for a reason. In addition, PMOS transistor 1 configuring the input protection circuit. N.M.O.
S) The transistor 2 becomes conductive when a high voltage (overvoltage) such as static electricity is applied and exceeds the reverse withstand voltage of each transistor, and the transistor 2 is connected to the power supply VDDI through the lines Ll and L2.
This is to prevent the gate oxide film of the first stage circuit 3 from being destroyed by dissipating the surge to the ground voltage GNDI.
入力端子5に加わる静電気等は極めて大きいので、入力
保護回路を構成するPMOSトランジスタ1、あるいは
NMOS)ランジスタ2が導通し、ラインLl 、L2
に電荷を逃がすだけでは初段回路3の保護が十分でない
場合がある。すなわち、ライy L 1 (VDDI)
tりはL 2 (GNDI)ニオイて、流入した静電気
等の電荷が多量に蓄積すると、サージバイパス(サージ
吸収)能力が弱まり、この場合、初段回路3のゲート酸
化膜の破壊が発生してしまう、また、ラインLl (V
DDI)またはL2 (GNDI)に蓄積した電荷は、
例えば、半導体基板(不図示)I:、に形成された絶縁
膜等を破壊り、 サラニラインL3 (VDD2)、
L4 (GND2)ニ流入してしまうことがある。Since the static electricity applied to the input terminal 5 is extremely large, the PMOS transistor 1 or NMOS transistor 2 that constitutes the input protection circuit becomes conductive, and the lines Ll and L2 become conductive.
In some cases, the protection of the first stage circuit 3 is not sufficient just by releasing the charge. That is, ray L 1 (VDDI)
t is L 2 (GNDI), and if a large amount of static electricity or other charges that have flowed into the circuit accumulate, the surge bypass (surge absorption) ability will weaken, and in this case, the gate oxide film of the first stage circuit 3 will be destroyed. , and the line Ll (V
The charge accumulated in DDI) or L2 (GNDI) is
For example, by destroying the insulating film formed on the semiconductor substrate (not shown) I:,
L4 (GND2) may flow in.
本発明の半導体集積回路装置は、
外部接続端子に入力端が接続されている第1の回路と、
該第1の回路に高レベル動作電圧および低レベル動作電
圧をそれぞれ供給するための第1および第2の電圧供給
経路と、
第2の回路と。The semiconductor integrated circuit device of the present invention includes a first circuit whose input terminal is connected to an external connection terminal, and a first circuit and a first circuit for supplying a high-level operating voltage and a low-level operating voltage to the first circuit, respectively. a second voltage supply path; and a second circuit.
該第2の回路に高レベル動作電圧および低レベル動作電
圧をそれぞれ供給するための第3および第4の電圧供給
経路とが同一半導体基板に形成され、前記第1および第
3の電圧供給経路、前記第2および第4の電圧供給経路
は、それぞれ、独立して設けられている半導体集積回路
装置において、
前記第1および第3の電圧供給経路間、ならびに前記第
2および第4の電圧供給経路間において、それぞれの電
圧供給経路間に過電圧が加わった場合に導通し、該過電
圧を吸収する過電圧吸収回路が設けられていることを特
徴とする。third and fourth voltage supply paths for respectively supplying a high level operating voltage and a low level operating voltage to the second circuit are formed on the same semiconductor substrate, the first and third voltage supply paths; The second and fourth voltage supply paths are provided between the first and third voltage supply paths and between the second and fourth voltage supply paths in a semiconductor integrated circuit device that is provided independently. The present invention is characterized in that an overvoltage absorption circuit is provided between the respective voltage supply paths, which conducts when an overvoltage is applied between the respective voltage supply paths and absorbs the overvoltage.
電源電圧供給経路間および接地電圧供給経路間に設けら
れた過電圧吸収回路が動作することにより、静電気、ノ
イズ等の電荷はすみやかに移動し、これにより電源電位
または接地電位を急速に安定させることができ、同時に
、入力段回路を構成するMOSトランジスタの破壊を防
ぐことができる。By operating the overvoltage absorption circuit provided between the power supply voltage supply path and the ground voltage supply path, charges such as static electricity and noise are quickly transferred, thereby rapidly stabilizing the power supply potential or ground potential. At the same time, it is possible to prevent destruction of the MOS transistors constituting the input stage circuit.
次に、本発明の実施例について図面を参照して説明する
。Next, embodiments of the present invention will be described with reference to the drawings.
第1図は本発明の一実施例の回路構成図である。FIG. 1 is a circuit diagram of an embodiment of the present invention.
本実施例が従来例と相違する点は、ラインL2(OND
I)とラインL4 (GNI12)との間に過電圧吸収
回路として、ゲートがラインL2に接続されたNMOS
トランジスタ6、ゲートがラインL4に接続されたPM
O3トランジスタ7が設けられている点、マタ、ライフ
L1 (VDDI)ト5 イアL3 (VDD2)との
間に、過電圧吸収回路として、ゲートがラインL1に接
続されたNMOSトランジスタ8゜ゲートがラインL3
に接続されたNMOSトランジスタ9が設けられている
点である。これらのMOSトランジスタは、いずれも、
ゲートに+15V以トの電圧が加わると導通するように
なっている。The difference between this embodiment and the conventional example is that line L2 (OND
I) and line L4 (GNI12) as an overvoltage absorption circuit, an NMOS whose gate is connected to line L2
Transistor 6, PM with gate connected to line L4
An NMOS transistor 8 whose gate is connected to the line L3 serves as an overvoltage absorption circuit between the O3 transistor 7 and the life L1 (VDDI) to the line L3 (VDD2).
The point is that an NMOS transistor 9 connected to is provided. All of these MOS transistors are
It becomes conductive when a voltage of +15V or more is applied to the gate.
次に、本実施例の動作を説明する。Next, the operation of this embodiment will be explained.
例えば、数kVの高電圧の静電気が入力端子5に加わっ
た場合を考える。この場合、例えば、NMOSトランジ
スタ2のソース電極とドレイン電極との間のパンチスル
ーによりゲート酸化膜破壊電圧以下でGNDI (ライ
ンL2)へ電荷が流れ、GN[l 1の電位が上昇する
。GNDIとGND2との間に接続されたNMOSトラ
ンジスタ6は、GNDI(7)電圧が15V以上上昇す
ると、導通し、入力端子5からGND 1へと流れ込ん
だ多くの電荷は、さらにGND2へと流れ、過度に電荷
が蓄積することがない、これによって、入力端子5にど
の電源もしくはGNDを基準として数kVの高電圧が加
わった場合でも、初段回路3のゲート電極にゲート酸化
膜破壊電圧以上の電圧が加わることがなくなるため、ゲ
ート酸化膜の破壊を防止することができる。また、NM
OSトランジスタ7のパンチスルーによってもGND2
へと電荷を逃がすことができる。For example, consider a case where high voltage static electricity of several kV is applied to the input terminal 5. In this case, for example, due to punch-through between the source electrode and drain electrode of the NMOS transistor 2, charges flow to GNDI (line L2) below the gate oxide film breakdown voltage, and the potential of GN[l1 increases. The NMOS transistor 6 connected between GNDI and GND2 becomes conductive when the GNDI (7) voltage increases by 15V or more, and much of the charge that has flowed from the input terminal 5 to GND1 further flows to GND2. As a result, even if a high voltage of several kV is applied to the input terminal 5 with reference to any power supply or GND, the gate electrode of the first stage circuit 3 will not have a voltage higher than the gate oxide film breakdown voltage. Since no more damage is applied, destruction of the gate oxide film can be prevented. Also, NM
GND2 is also connected by the punch-through of OS transistor 7.
charge can be released to the
NMO3)ランジスタ8.9についても、上述のNMO
Sトランジスタ6.7と同様なf@きをすることは明ら
かであり、また、NMO3)ランジスタロ、7,8.9
のしきい値電圧を本実施例では15Vとしているが、こ
れを製造プロセスの変更により変化させ、目的に応じて
能力を変えられることは言うまでもない。NMO3) Regarding transistor 8.9, the above-mentioned NMO
It is clear that it has a similar f@ to S transistor 6.7, and also NMO3) transistor, 7,8.9
In this embodiment, the threshold voltage is set to 15V, but it goes without saying that this can be changed by changing the manufacturing process to change the capability depending on the purpose.
以上説明したように本発明は1分離されている各電源、
接地ライフ間に過電圧吸収回路を設けることにより、電
源またはグランドの電位を安定させることができるとと
もに、静電気、ノイズ等に起因するMOSトランジスタ
の破壊を防ぐことができる効果がある。As explained above, the present invention provides one separate power supply,
By providing an overvoltage absorption circuit during the grounding life, it is possible to stabilize the potential of the power supply or the ground, and there is an effect that it is possible to prevent destruction of the MOS transistor due to static electricity, noise, etc.
第1図は本発明の半導体集積回路装置の一実施例の回路
構成図、第2図は従来例の回路構成図である。
l・・・PMOSトランジスタ(入力保護回路)、2・
・・NMO3)ランジスタ(入力保護回路)。
3・・・初段回路、
4・・・内部回路、
5・・・入力端子、
VDDI、 VDD2・・・電源電圧(高レベル動作電
圧)、GNDI、 GND2・・・接地電圧(低レベル
動作電圧)、Ll−L4・・・電圧供給経路(ライン)
。FIG. 1 is a circuit configuration diagram of an embodiment of a semiconductor integrated circuit device of the present invention, and FIG. 2 is a circuit configuration diagram of a conventional example. l...PMOS transistor (input protection circuit), 2.
...NMO3) transistor (input protection circuit). 3... First stage circuit, 4... Internal circuit, 5... Input terminal, VDDI, VDD2... Power supply voltage (high level operating voltage), GNDI, GND2... Ground voltage (low level operating voltage) , Ll-L4... Voltage supply path (line)
.
Claims (1)
と、 該第1の回路に高レベル動作電圧および低レベル動作電
圧をそれぞれ供給するための第1および第2の電圧供給
経路と、 第2の回路と、 該第2の回路に高レベル動作電圧および低レベル動作電
圧をそれぞれ供給するための第3および第4の電圧供給
経路とが同一半導体基板に形成され、前記第1および第
3の電圧供給経路、前記第2および第4の電圧供給経路
は、それぞれ、独立して設けられている半導体集積回路
装置において、 前記第1および第3の電圧供給経路間、ならびに前記第
2および第4の電圧供給経路間において、それぞれの電
圧供給経路間に過電圧が加わった場合に導通し、該過電
圧を吸収する過電圧吸収回路が設けられていることを特
徴とする半導体集積回路装置。[Claims] 1. A first circuit whose input end is connected to an external connection terminal, and first and second circuits for supplying a high-level operating voltage and a low-level operating voltage to the first circuit, respectively. A second voltage supply path, a second circuit, and third and fourth voltage supply paths for respectively supplying a high-level operating voltage and a low-level operating voltage to the second circuit are formed on the same semiconductor substrate. In the semiconductor integrated circuit device, the first and third voltage supply paths and the second and fourth voltage supply paths are provided independently, respectively; and between the second and fourth voltage supply paths, an overvoltage absorption circuit is provided which conducts when an overvoltage is applied between the respective voltage supply paths and absorbs the overvoltage. Semiconductor integrated circuit device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63143962A JPH0228362A (en) | 1988-06-10 | 1988-06-10 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63143962A JPH0228362A (en) | 1988-06-10 | 1988-06-10 | Semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0228362A true JPH0228362A (en) | 1990-01-30 |
Family
ID=15351102
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63143962A Pending JPH0228362A (en) | 1988-06-10 | 1988-06-10 | Semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0228362A (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04373162A (en) * | 1991-06-21 | 1992-12-25 | Nec Ic Microcomput Syst Ltd | Semiconductor integrated circuit device |
JPH06244371A (en) * | 1992-10-05 | 1994-09-02 | Matsushita Electric Ind Co Ltd | Semiconductor device |
EP0663694A1 (en) * | 1993-12-24 | 1995-07-19 | Nec Corporation | Semiconductor device having a protective circuit against electrostatic discharge |
JPH09191081A (en) * | 1995-12-29 | 1997-07-22 | Hyundai Electron Ind Co Ltd | Electrostatic protector |
JPH10224205A (en) * | 1996-11-04 | 1998-08-21 | Samsung Electron Co Ltd | Data output circuit for semiconductor device |
US6215157B1 (en) | 1998-07-31 | 2001-04-10 | Nec Corporation | Electrostatic discharge protection circuit for a semiconductor integrated circuit and layout thereof |
US6710991B2 (en) | 2002-05-28 | 2004-03-23 | Oki Electric Industry Co., Ltd. | Electrostatic-breakdown-preventive and protective circuit for semiconductor-device |
JP2007324345A (en) * | 2006-05-31 | 2007-12-13 | Nec Electronics Corp | Semiconductor device with protection circuit |
US7352031B2 (en) | 2002-05-28 | 2008-04-01 | Oki Electric Industry, Co., Ltd. | Electrostatic-breakdown-preventive and protective circuit for semiconductor-device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6014460A (en) * | 1983-07-04 | 1985-01-25 | Mitsubishi Electric Corp | Semiconductor integrated circuit |
JPS62216351A (en) * | 1986-03-18 | 1987-09-22 | Fujitsu Ltd | Semiconductor integrated circuit |
JPS62276867A (en) * | 1986-05-26 | 1987-12-01 | Hitachi Vlsi Eng Corp | Semiconductor integrated circuit device |
JPS6325962A (en) * | 1986-07-18 | 1988-02-03 | Hitachi Micro Comput Eng Ltd | Semiconductor integrated circuit device |
-
1988
- 1988-06-10 JP JP63143962A patent/JPH0228362A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6014460A (en) * | 1983-07-04 | 1985-01-25 | Mitsubishi Electric Corp | Semiconductor integrated circuit |
JPS62216351A (en) * | 1986-03-18 | 1987-09-22 | Fujitsu Ltd | Semiconductor integrated circuit |
JPS62276867A (en) * | 1986-05-26 | 1987-12-01 | Hitachi Vlsi Eng Corp | Semiconductor integrated circuit device |
JPS6325962A (en) * | 1986-07-18 | 1988-02-03 | Hitachi Micro Comput Eng Ltd | Semiconductor integrated circuit device |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04373162A (en) * | 1991-06-21 | 1992-12-25 | Nec Ic Microcomput Syst Ltd | Semiconductor integrated circuit device |
JPH06244371A (en) * | 1992-10-05 | 1994-09-02 | Matsushita Electric Ind Co Ltd | Semiconductor device |
EP0663694A1 (en) * | 1993-12-24 | 1995-07-19 | Nec Corporation | Semiconductor device having a protective circuit against electrostatic discharge |
US5521415A (en) * | 1993-12-24 | 1996-05-28 | Nec Corporation | Semiconductor device having a circuit for protecting the device from electrostatic discharge |
JPH09191081A (en) * | 1995-12-29 | 1997-07-22 | Hyundai Electron Ind Co Ltd | Electrostatic protector |
JPH10224205A (en) * | 1996-11-04 | 1998-08-21 | Samsung Electron Co Ltd | Data output circuit for semiconductor device |
US6215157B1 (en) | 1998-07-31 | 2001-04-10 | Nec Corporation | Electrostatic discharge protection circuit for a semiconductor integrated circuit and layout thereof |
US6710991B2 (en) | 2002-05-28 | 2004-03-23 | Oki Electric Industry Co., Ltd. | Electrostatic-breakdown-preventive and protective circuit for semiconductor-device |
US7352031B2 (en) | 2002-05-28 | 2008-04-01 | Oki Electric Industry, Co., Ltd. | Electrostatic-breakdown-preventive and protective circuit for semiconductor-device |
JP2007324345A (en) * | 2006-05-31 | 2007-12-13 | Nec Electronics Corp | Semiconductor device with protection circuit |
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