JPH0228247B2 - - Google Patents

Info

Publication number
JPH0228247B2
JPH0228247B2 JP59178433A JP17843384A JPH0228247B2 JP H0228247 B2 JPH0228247 B2 JP H0228247B2 JP 59178433 A JP59178433 A JP 59178433A JP 17843384 A JP17843384 A JP 17843384A JP H0228247 B2 JPH0228247 B2 JP H0228247B2
Authority
JP
Japan
Prior art keywords
substrate
cushion
cover
fibers
substrate holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59178433A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6158260A (ja
Inventor
Muneharu Komya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP59178433A priority Critical patent/JPS6158260A/ja
Publication of JPS6158260A publication Critical patent/JPS6158260A/ja
Publication of JPH0228247B2 publication Critical patent/JPH0228247B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/0432—
    • H10P72/50—
    • H10W40/00—

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP59178433A 1984-08-29 1984-08-29 基板の冷却装置 Granted JPS6158260A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59178433A JPS6158260A (ja) 1984-08-29 1984-08-29 基板の冷却装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59178433A JPS6158260A (ja) 1984-08-29 1984-08-29 基板の冷却装置

Publications (2)

Publication Number Publication Date
JPS6158260A JPS6158260A (ja) 1986-03-25
JPH0228247B2 true JPH0228247B2 (OSRAM) 1990-06-22

Family

ID=16048424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59178433A Granted JPS6158260A (ja) 1984-08-29 1984-08-29 基板の冷却装置

Country Status (1)

Country Link
JP (1) JPS6158260A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62201936U (OSRAM) * 1986-06-16 1987-12-23
JPH08165571A (ja) * 1994-12-08 1996-06-25 Nissin Electric Co Ltd 基板保持装置およびその製造方法

Also Published As

Publication number Publication date
JPS6158260A (ja) 1986-03-25

Similar Documents

Publication Publication Date Title
KR100314573B1 (ko) 반도체 웨이퍼 냉각 방법 및 장치
US3025335A (en) Flexible solar energy converter panel
US3454835A (en) Multiple semiconductor device
JPH0228247B2 (OSRAM)
JPH0228248B2 (OSRAM)
US2826725A (en) P-n junction rectifier
JPH0313703B2 (OSRAM)
US3082136A (en) Semiconductor devices and method of manufacturing them
US4536223A (en) Method of lowering contact resistance of implanted contact regions
US3253320A (en) Method of making semi-conductor devices with plated area
JPH0648831Y2 (ja) 基板冷却装置用パッド
JPH0418197Y2 (OSRAM)
JPS61197500A (ja) 基板の冷却装置
JPS5817625A (ja) 半導体装置の製造方法
JPS6429815A (en) Optical switching element
JPH0212383B2 (OSRAM)
JPS5694736A (en) Manufacturing method of semiconductor device
JPS5565446A (en) Semiconductor device
JPS5638863A (en) Semiconductor device
JPS622770Y2 (OSRAM)
JPS57148364A (en) Semiconductor integrated circuit device
JPS54162483A (en) Semiconductor device
JPS5550661A (en) Insulated gate type field effect semiconductor device
JPS6230115B2 (OSRAM)
JPS57126181A (en) Super conductor element