JPH02280400A - Electronic parts packaging device - Google Patents

Electronic parts packaging device

Info

Publication number
JPH02280400A
JPH02280400A JP1103210A JP10321089A JPH02280400A JP H02280400 A JPH02280400 A JP H02280400A JP 1103210 A JP1103210 A JP 1103210A JP 10321089 A JP10321089 A JP 10321089A JP H02280400 A JPH02280400 A JP H02280400A
Authority
JP
Japan
Prior art keywords
chip
directions
nozzle
optical element
transfer head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1103210A
Other languages
Japanese (ja)
Other versions
JPH088436B2 (en
Inventor
Masahide Koyama
賢秀 小山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1103210A priority Critical patent/JPH088436B2/en
Publication of JPH02280400A publication Critical patent/JPH02280400A/en
Publication of JPH088436B2 publication Critical patent/JPH088436B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Supply And Installment Of Electrical Components (AREA)
  • Automatic Assembly (AREA)

Abstract

PURPOSE:To enable four corner edge portions to be simultaneously observed by providing on a chip an optical element for deflecting light illuminated from the upper portion in four directions, and further providing four cameras on the element at four sides of the same. CONSTITUTION:A nozzle 9 of a transfer head is lowered to mount a chip P thereon and transfer the same to the upper portion of an optical element 11. The chip P is illuminated from the upper portion to observe the four corner edge portions of the chip P. In this case, the light illuminating the respective edge portions of the chip is retracted by prisms 11a-11d of a title device 11 in four directions and is incident upon respective cameras 13a-13d, so that positional displacements of the chip P in X, Y, theta directions can be detected with image processing means by simultaneously observing the four edge portions.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は電子部品実装装置に関し、移載ヘッドのノズル
に吸着されて基板に移送搭載されるチップの4隅のエツ
ジ部を同時に観察して、このチップの位置ずれを検出す
るようにしたものである。
Detailed Description of the Invention (Industrial Field of Application) The present invention relates to an electronic component mounting apparatus, in which the four corner edges of a chip that is attracted by a nozzle of a transfer head and transferred and mounted on a board are simultaneously observed. , the positional shift of this chip is detected.

(従来の技術) QFP、コンデンサチップ、抵抗チップなどの電子部品
(以下チップという)の実装装置はは、トレイ、テープ
フィーダ、チューブフィーダなどのチップ供給部のチッ
プを移載ヘッドのノズルに吸着して、位置決め部に位置
決めされた基板に移送搭載するようになっている。この
場合、ノズルに吸着されたチップは、XYθ方向の位置
ずれを有しており、この位置ずれを補正したうえで、基
板に移送搭載される。
(Prior art) A mounting device for electronic components (hereinafter referred to as chips) such as QFPs, capacitor chips, and resistor chips sucks chips from a chip supply section such as a tray, tape feeder, or tube feeder into a nozzle of a transfer head. Then, the substrate is transferred and mounted on the substrate positioned in the positioning section. In this case, the chip attracted to the nozzle has a positional shift in the XYθ directions, and after correcting this positional shift, the chip is transferred and mounted on the substrate.

第7図は従来のチップ(QFP)Pの位置ずれ観察手段
を示すものであって、100はノズル、101はカメラ
である。チップ供給部のチップPを吸着したノズル10
0は、このチ・7プPをカメラ101の上方に移送し、
そのXYθ方向の位置ずれを観察する。そしてXY力方
向位置ずれは、ノズル100のXY力方向ストロ−りを
加減することにより補正し、またθ方向く回転方向)の
位置ずれは、モータによりノズル100を軸心を中心に
回転させることにより補正する。
FIG. 7 shows a conventional means for observing positional deviation of a chip (QFP) P, in which 100 is a nozzle and 101 is a camera. Nozzle 10 that adsorbs chips P in the chip supply section
0 transports this chip 7P above the camera 101,
Observe the positional shift in the XYθ directions. The positional deviation in the XY force direction is corrected by adjusting the stroke of the nozzle 100 in the XY force direction, and the positional deviation in the θ direction (rotation direction) is corrected by rotating the nozzle 100 around the axis using a motor. Corrected by

ところで、例えば4方向に多数本のり−ドLを有するq
Fplは、きわめて高い実装精度が要求されるものであ
り、したがってカメラ101の倍率を上げて、4隅のエ
ツジ部を観察することにより、正確に位置ずれを検出す
ることが望ましい。しかしながら倍率を上げると、カメ
ラ101の視野はそれだけ小さくなり、4隅のエツジ部
を同時に観察することは困難となる。
By the way, for example, q having a large number of guides L in four directions
Fpl requires extremely high mounting accuracy, and therefore it is desirable to increase the magnification of the camera 101 and observe the four corner edges to accurately detect positional deviations. However, as the magnification increases, the field of view of the camera 101 becomes smaller, making it difficult to observe the four corner edges at the same time.

このため、従来、チップPをカメラ101の上方へ移送
したならば、ノズル100とカメラ101を相対的にX
Y力方向移動させることにより、4隅のエツジ部e1〜
e4をカメラ101の視野aに入れて観察していた(第
6図参照)。
For this reason, conventionally, if the chip P is transferred above the camera 101, the nozzle 100 and the camera 101 are relatively
By moving in the Y force direction, the four corner edge parts e1~
e4 was placed in the field of view a of the camera 101 and observed (see FIG. 6).

(発明が解決しようとする課題) しかしながら、上記のようにノズル100とカメラ10
1をXY力方向移動させながら各エツジ部e1〜e4を
順に観察する手段は、移載ヘッド若しくはカメラ101
の移動と停止を繰り返さねばならないことから、かなり
の観察時間を要し、ひいてはチップPの実装速度があが
らない問題があった。
(Problem to be Solved by the Invention) However, as described above, the nozzle 100 and the camera 10
The means for sequentially observing each edge portion e1 to e4 while moving the edge portion 1 in the XY force direction is a transfer head or a camera 101.
Since the movement and stopping of the chip P must be repeated, a considerable amount of observation time is required, and as a result, there is a problem that the mounting speed of the chip P cannot be increased.

そこで本発明は、チップの4隅のエツジ部を同時に観察
できる手段を備えた電子部品実装装置を提供することを
目的とする。
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide an electronic component mounting apparatus equipped with a means for simultaneously observing the four corner edge portions of a chip.

(課題を解決するための手段) このために本発明は、チップ供給部と、基板の位置決め
部と、チップ供給部のチップをノズルに吸着して位置決
め部の基板に移送搭載する移載ヘッドとを備えた電子部
品実装装置において、上記移載ヘッドの移送路の下方に
、上記ノズルに吸着されたチップに上方から照射された
光を4方向に屈折させる光学素子を設けるとともに、こ
の光学素子の4側方に、この4方向に屈折された光が入
射することにより、チップの4隅のエツジ部を観察する
4個のカメラを設けたものである。
(Means for Solving the Problems) For this purpose, the present invention includes a chip supply section, a substrate positioning section, and a transfer head that adsorbs the chips of the chip supply section to a nozzle and transfers and mounts them on the substrate of the positioning section. In the electronic component mounting apparatus, an optical element is provided below the transfer path of the transfer head to refract light irradiated from above onto the chip adsorbed by the nozzle in four directions, and an optical element is provided below the transfer path of the transfer head. Four cameras are provided on four sides to observe the edge portions at the four corners of the chip by the incidence of light refracted in these four directions.

(作用) 上記構成において、ノズルに吸着されたチップに上方か
ら照射された光は、光学素子により4方向に屈折し、こ
の4方向の屈折光をそれぞれカメラにより観察すること
により、チップの4隅のエツジ部を同時に観察して、そ
の位置ずれを検出する。
(Function) In the above configuration, the light irradiated from above onto the chip adsorbed by the nozzle is refracted in four directions by the optical element, and by observing the refracted light in each of the four directions with a camera, the four corners of the chip can be detected. At the same time, the edges of the edges are observed and their positional deviations are detected.

(実施例1) 次に、図面を参照しながら本発明の詳細な説明する。(Example 1) Next, the present invention will be described in detail with reference to the drawings.

第1図は電子部品実装装置の全体図であって、1は本体
ボックス、2はその上部に設けられた駆動部ボックスで
ある。本体ケース1の上面には、基板3をクランプして
位置決めする位置決め部4が設けられている。5,6は
基板3をこの位置決め部4に搬入したまま搬出するコン
ベヤである。位置決め部4の手前側には、トレイから成
るチップ供給部7が設けられている。10は駆動部ボッ
クス2に垂設された移載ヘッドであって、駆動部ボック
ス2に内蔵されたXY方向移動装置に駆動されて、チッ
プ供給部7と基板30間を往復動じ、チップ供給部7の
チップをノズル9に吸着して基板3に移送搭載する。
FIG. 1 is an overall view of an electronic component mounting apparatus, in which 1 is a main body box, and 2 is a drive unit box provided on the top thereof. A positioning section 4 for clamping and positioning the substrate 3 is provided on the upper surface of the main body case 1. 5 and 6 are conveyors that carry the substrate 3 into the positioning section 4 and then carry it out. On the front side of the positioning section 4, a chip supply section 7 consisting of a tray is provided. Reference numeral 10 denotes a transfer head installed vertically in the drive unit box 2, and is driven by an XY direction moving device built in the drive unit box 2 to reciprocate between the chip supply unit 7 and the substrate 30, and moves the transfer head between the chip supply unit 7 and the substrate 30. Chip No. 7 is attracted to the nozzle 9 and transferred and mounted on the substrate 3.

8はモニター用カメラである。11はトレイ7と基板3
の間の移載ヘッド10の移送路に設けられたチップの位
置ずれ検出用光学素子であり、次に第2図と第3図を参
照しながら、その詳細を説明する。
8 is a monitor camera. 11 is the tray 7 and the board 3
This is an optical element for detecting a positional deviation of a chip, which is provided in the transfer path of the transfer head 10 between the two, and its details will be explained next with reference to FIGS. 2 and 3.

光学素子11は、4個のプリズムlla〜1】dを一体
的に形成して構成されており、各プリズム11a〜li
dは、上方から照射された光を外方へ屈折させる。各プ
リズムlla〜11dの下部4側方には、屈折された光
が入射するカメラ13a〜1’3dが設けられており、
光学素子11に照射された光をそれぞれ各プリズムll
a〜lidにより4方向へ屈折させることにより、チッ
プPの4隅のエツジ部を同時に観察する。このチップP
は4方向に多数本のり−ドLを有するQFPであり、各
リードLを基板3に塗布されたボンドに正確に合致させ
て搭載する為に、高い実装精度が要求される。第3図に
おいて、12は移載ヘッド10の下部に設けられたリン
グ状の光源である。
The optical element 11 is constituted by integrally forming four prisms 11a to 1]d, each of which has an integral structure.
d refracts light emitted from above outward. Cameras 13a to 1'3d, through which the refracted light enters, are provided at the lower 4 sides of each prism lla to 11d.
The light irradiated onto the optical element 11 is transmitted to each prism ll.
By refracting the beam in four directions by a to lid, the four corner edges of the chip P can be observed simultaneously. This chip P
is a QFP having a large number of leads L in four directions, and high mounting accuracy is required in order to mount each lead L in exact alignment with the bond applied to the substrate 3. In FIG. 3, reference numeral 12 denotes a ring-shaped light source provided at the bottom of the transfer head 10.

本装置は上記のような構成より成り、次に動作の説明を
行う。
This device has the above-mentioned configuration, and its operation will be explained next.

コンベヤ5により、基板3が位置決め部4に搬入されて
位置決めされると、移載ヘッド10はxy力方向移動を
開始する。移載ヘッド10は、まずチップ供給部7の上
方に移動し、ノズル9は’A−降してチップPを吸着し
てティクアップし、光学素子11の上方に移送する。そ
こで千ノブPに光を照射して、チップPのエツジ部e1
〜e4を観察する(第6図参照)。この場合、上述のよ
うに、チップPのエツジ部e1〜e4に照射された光は
、プリズムlla〜11dにより4方向に屈折して、各
カメラ13a〜13dに入射するので、4隅の工・ノジ
部e1〜e4を同時に観察し、周知画像処理手段により
、チップPのXYθ方向の位置ずれを検出する。
When the substrate 3 is carried into the positioning section 4 and positioned by the conveyor 5, the transfer head 10 starts moving in the xy force directions. The transfer head 10 first moves above the chip supply unit 7, and the nozzle 9 descends to adsorb and tick up the chip P, and transfers it above the optical element 11. Therefore, by irradiating the Sennobu P with light, the edge part e1 of the chip P is
Observe ~e4 (see Figure 6). In this case, as described above, the light irradiated on the edge portions e1 to e4 of the chip P is refracted in four directions by the prisms lla to 11d and is incident on each of the cameras 13a to 13d. The nozzle parts e1 to e4 are simultaneously observed, and a positional shift of the chip P in the XYθ directions is detected by a well-known image processing means.

XYθ方向の位置ずれのうち、XY力方向位置ずれは、
移載ヘッド10のXY方向ストロークを加減することに
より補正される。またθ方向の位置は、移載ヘッド10
に内蔵されたモーフにより、ノズル9をθ方向に回転さ
せることにより補正する。このようにしてXYθ方向の
位置ずれを補正したうえで、チップPは基板3に搭載さ
れる。
Among the positional deviations in the XYθ directions, the positional deviations in the XY force direction are:
This is corrected by adjusting the stroke of the transfer head 10 in the XY directions. In addition, the position in the θ direction is the position of the transfer head 10.
Correction is made by rotating the nozzle 9 in the θ direction using a built-in morph. After correcting the positional deviation in the XYθ directions in this manner, the chip P is mounted on the substrate 3.

(実施例2) 第4図及び第5図において、14は光学素子である。こ
の光学素子14は斜上方に光を反射させる4個のミラ一
部14a〜14dを4角錐形に形成して構成されており
、各ミラ一部14a−14dの斜上方には、カメラ13
a〜13dがそれぞれ設けられている。したがってこの
ものも、チップPをこの光学素子14の上方へ移送し、
上方から光を照射することにより光をカメラ13a〜1
3d側へ屈折させて、チップPの4隅のエツジ部e1〜
e4を同時に観察できる。
(Example 2) In FIGS. 4 and 5, 14 is an optical element. This optical element 14 is constructed by forming four mirror parts 14a to 14d into a quadrangular pyramid shape to reflect light obliquely upward.
a to 13d are provided, respectively. Therefore, this also transfers the chip P above this optical element 14,
By irradiating light from above, the light is transmitted to the cameras 13a to 1.
3d side, and the four corner edges e1 of the chip P
e4 can be observed at the same time.

(発明の効果) 以上説明したように本発明は、チップ供給部と、基板の
位置決め部と、チップ供給部のチップをノズルに吸着し
て位置決め部の基板に移送搭載する移載ヘッドとを備え
た電子部品実装装置において、上記移載ヘッドの移送路
の下方に、上記ノズルに吸着されたチップに上方から照
射された光を4方向に屈折させる光学素子を設けるとと
もに、この光学素子の4側方に、この4方向に屈折され
た光が入射することにより、チップの4隅のエツジ部を
観察する4個のカメラを設けて成るので、ノズルに吸着
されたチップの4隅のエツジ部を同時に観察することが
でき、したがって従来手段よりも観察に要する時間を大
巾に短縮でき、ひいてはチップの実装速度を上げること
ができる。特に本発明は、要求される実装精度が高い為
に、カメラの倍率を上げてチップの4隅のエツジ部を精
密に観察せねばならないQFPの位置ずれ観察手段とし
て、その長所を発揮する。
(Effects of the Invention) As described above, the present invention includes a chip supply section, a substrate positioning section, and a transfer head that adsorbs chips in the chip supply section to a nozzle and transfers and mounts them on the substrate in the positioning section. In the electronic component mounting apparatus, an optical element is provided below the transfer path of the transfer head to refract light irradiated from above onto the chip adsorbed by the nozzle in four directions, and four sides of the optical element are provided. On the other hand, since the four cameras are installed to observe the edges of the four corners of the chip by the incident light refracted in these four directions, the edges of the four corners of the chip attracted by the nozzle can be observed. They can be observed simultaneously, and therefore the time required for observation can be significantly shortened compared to conventional means, and the chip mounting speed can be increased. In particular, the present invention exhibits its advantages as a means for observing positional deviations in QFPs, which requires high mounting accuracy and requires high camera magnification to precisely observe the edges of the four corners of the chip.

【図面の簡単な説明】[Brief explanation of drawings]

図は本発明の実施例を示すものであって、第1図は電子
部品実装装置の斜視図、第2図及び第3図は観察中の斜
視図及び側面図、第4図及び第5図は他の実施例の観察
中の斜視図及び側面図、第6図はカメラの視野の平面図
、第7図は従来装置の斜視図である。 3・・・基板 4・・・位置決め部 7・・・千ノブ供給部 9・・・ノズル 10・・・移載ヘッド 11.14・・・光学素子 12・・・光源部 133〜13d・・・カメラ
The figures show embodiments of the present invention, in which FIG. 1 is a perspective view of an electronic component mounting apparatus, FIGS. 2 and 3 are perspective views and side views during observation, and FIGS. 4 and 5. 6 is a perspective view and a side view of another embodiment during observation, FIG. 6 is a plan view of the field of view of the camera, and FIG. 7 is a perspective view of a conventional device. 3... Substrate 4... Positioning part 7... Knob supply part 9... Nozzle 10... Transfer head 11.14... Optical element 12... Light source part 133-13d... ·camera

Claims (1)

【特許請求の範囲】[Claims] チップ供給部と、基板の位置決め部と、チップ供給部の
チップをノズルに吸着して位置決め部の基板に移送搭載
する移載ヘッドとを備えた電子部品実装装置において、
上記移載ヘッドの移送路の下方に、上記ノズルに吸着さ
れたチップに上方から照射された光を4方向に屈折させ
る光学素子を設けるとともに、この光学素子の4側方に
、この4方向に屈折された光が入射することにより、チ
ップの4隅のエッジ部を観察する4個のカメラを設けた
ことを特徴とする電子部品実装装置。
An electronic component mounting apparatus comprising a chip supply section, a substrate positioning section, and a transfer head that adsorbs a chip from the chip supply section to a nozzle and transfers and mounts it on the substrate of the positioning section,
An optical element is provided below the transfer path of the transfer head to refract the light irradiated from above onto the chip adsorbed by the nozzle in four directions. An electronic component mounting apparatus characterized by being provided with four cameras that observe the edges of the four corners of a chip by incident refracted light.
JP1103210A 1989-04-20 1989-04-20 Electronic component mounting apparatus and electronic component mounting method Expired - Lifetime JPH088436B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1103210A JPH088436B2 (en) 1989-04-20 1989-04-20 Electronic component mounting apparatus and electronic component mounting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1103210A JPH088436B2 (en) 1989-04-20 1989-04-20 Electronic component mounting apparatus and electronic component mounting method

Publications (2)

Publication Number Publication Date
JPH02280400A true JPH02280400A (en) 1990-11-16
JPH088436B2 JPH088436B2 (en) 1996-01-29

Family

ID=14348146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1103210A Expired - Lifetime JPH088436B2 (en) 1989-04-20 1989-04-20 Electronic component mounting apparatus and electronic component mounting method

Country Status (1)

Country Link
JP (1) JPH088436B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05304394A (en) * 1992-02-24 1993-11-16 Matsushita Electric Works Ltd Method and device for mounting component
JPH0645796A (en) * 1992-07-23 1994-02-18 Matsushita Electric Works Ltd Part mounting method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05304394A (en) * 1992-02-24 1993-11-16 Matsushita Electric Works Ltd Method and device for mounting component
JPH0645796A (en) * 1992-07-23 1994-02-18 Matsushita Electric Works Ltd Part mounting method

Also Published As

Publication number Publication date
JPH088436B2 (en) 1996-01-29

Similar Documents

Publication Publication Date Title
JP2773307B2 (en) Electronic component mounting method
KR101506519B1 (en) Component mounting apparatus
JP2001136000A (en) Jig for detecting attaching accuracy of attaching apparatus and method for detecting attaching accuracy
KR102132094B1 (en) Electronic component mounting device and electronic component mounting method
JP2020183907A (en) Electronic component inspection device
JPH0810795B2 (en) Electronic component mounting apparatus and mounting method
CN109524320B (en) Semiconductor manufacturing apparatus and method for manufacturing semiconductor device
JP3744179B2 (en) Electronic component mounting method
JP2725702B2 (en) Electronic component mounting method
JPH02280400A (en) Electronic parts packaging device
US20170049016A1 (en) Delimitation for the deposition of electrical components on a base
JP2811856B2 (en) Electronic component mounting apparatus and mounting method
JPH056912A (en) Electronic-component mounting apparatus
JP2007003326A (en) Method and device for inspecting components on tray
JPH11219974A (en) Chip recognizing device and chip mounting device comprising the same
JP4386419B2 (en) Component recognition device, surface mounter equipped with the device, and component test device
JPH09186491A (en) Parts vacuum-suction state confirming method in parts mounting apparatus and its apparatus
KR20140071265A (en) Component mounting apparatus, head and method for recognizing component attitude
JPS5972145A (en) Device and method for flip chip bonding
JPH04107988A (en) Electronic parts packaging device
JPH056911A (en) Electronic-component mounting apparatus
JPH05249049A (en) Apparatus for inspecting external appearance of component
JPH08306764A (en) Method and machine for mounting semiconductor device
JPH03208400A (en) Method and relevant device for inspecting electronic component
KR0151084B1 (en) Chip mounter