JPH02277568A - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPH02277568A
JPH02277568A JP678690A JP678690A JPH02277568A JP H02277568 A JPH02277568 A JP H02277568A JP 678690 A JP678690 A JP 678690A JP 678690 A JP678690 A JP 678690A JP H02277568 A JPH02277568 A JP H02277568A
Authority
JP
Japan
Prior art keywords
plasma
plasma gas
injection
jet
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP678690A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0416218B2 (cs
Inventor
Katsuhide Manabe
勝英 真部
Yasuhiko Ogisu
康彦 荻巣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyoda Gosei Co Ltd
Original Assignee
Toyoda Gosei Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyoda Gosei Co Ltd filed Critical Toyoda Gosei Co Ltd
Priority to JP678690A priority Critical patent/JPH02277568A/ja
Publication of JPH02277568A publication Critical patent/JPH02277568A/ja
Publication of JPH0416218B2 publication Critical patent/JPH0416218B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Nozzles (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP678690A 1990-01-16 1990-01-16 プラズマ処理装置 Granted JPH02277568A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP678690A JPH02277568A (ja) 1990-01-16 1990-01-16 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP678690A JPH02277568A (ja) 1990-01-16 1990-01-16 プラズマ処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4693190A Division JPH0379638A (ja) 1990-02-26 1990-02-26 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH02277568A true JPH02277568A (ja) 1990-11-14
JPH0416218B2 JPH0416218B2 (cs) 1992-03-23

Family

ID=11647859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP678690A Granted JPH02277568A (ja) 1990-01-16 1990-01-16 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH02277568A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000073029A (ja) * 1998-08-26 2000-03-07 Nitto Denko Corp 粘着部材及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000073029A (ja) * 1998-08-26 2000-03-07 Nitto Denko Corp 粘着部材及びその製造方法

Also Published As

Publication number Publication date
JPH0416218B2 (cs) 1992-03-23

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