JPH0227726U - - Google Patents
Info
- Publication number
- JPH0227726U JPH0227726U JP10570288U JP10570288U JPH0227726U JP H0227726 U JPH0227726 U JP H0227726U JP 10570288 U JP10570288 U JP 10570288U JP 10570288 U JP10570288 U JP 10570288U JP H0227726 U JPH0227726 U JP H0227726U
- Authority
- JP
- Japan
- Prior art keywords
- generation chamber
- plasma generation
- plasma
- coil
- member located
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002826 coolant Substances 0.000 claims description 2
- 239000003302 ferromagnetic material Substances 0.000 claims 1
- 230000005291 magnetic effect Effects 0.000 claims 1
- 239000000696 magnetic material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988105702U JPH0648832Y2 (ja) | 1988-08-09 | 1988-08-09 | プラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988105702U JPH0648832Y2 (ja) | 1988-08-09 | 1988-08-09 | プラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0227726U true JPH0227726U (de) | 1990-02-22 |
| JPH0648832Y2 JPH0648832Y2 (ja) | 1994-12-12 |
Family
ID=31338555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988105702U Expired - Lifetime JPH0648832Y2 (ja) | 1988-08-09 | 1988-08-09 | プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648832Y2 (de) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6267822A (ja) * | 1985-09-20 | 1987-03-27 | Hitachi Ltd | プラズマ処理装置 |
| JPS62197847U (de) * | 1986-06-06 | 1987-12-16 |
-
1988
- 1988-08-09 JP JP1988105702U patent/JPH0648832Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6267822A (ja) * | 1985-09-20 | 1987-03-27 | Hitachi Ltd | プラズマ処理装置 |
| JPS62197847U (de) * | 1986-06-06 | 1987-12-16 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648832Y2 (ja) | 1994-12-12 |