JPS63109433U - - Google Patents
Info
- Publication number
- JPS63109433U JPS63109433U JP173787U JP173787U JPS63109433U JP S63109433 U JPS63109433 U JP S63109433U JP 173787 U JP173787 U JP 173787U JP 173787 U JP173787 U JP 173787U JP S63109433 U JPS63109433 U JP S63109433U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- arc discharge
- discharge vessel
- magnetic field
- cusp magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010891 electric arc Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 239000000696 magnetic material Substances 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP173787U JPS63109433U (de) | 1987-01-09 | 1987-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP173787U JPS63109433U (de) | 1987-01-09 | 1987-01-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63109433U true JPS63109433U (de) | 1988-07-14 |
Family
ID=30779925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP173787U Pending JPS63109433U (de) | 1987-01-09 | 1987-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63109433U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012190658A (ja) * | 2011-03-10 | 2012-10-04 | Nissin Ion Equipment Co Ltd | イオン源 |
-
1987
- 1987-01-09 JP JP173787U patent/JPS63109433U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012190658A (ja) * | 2011-03-10 | 2012-10-04 | Nissin Ion Equipment Co Ltd | イオン源 |