JPH02270103A - Manufacture of magnetic head - Google Patents
Manufacture of magnetic headInfo
- Publication number
- JPH02270103A JPH02270103A JP9245189A JP9245189A JPH02270103A JP H02270103 A JPH02270103 A JP H02270103A JP 9245189 A JP9245189 A JP 9245189A JP 9245189 A JP9245189 A JP 9245189A JP H02270103 A JPH02270103 A JP H02270103A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic head
- block
- wafer
- cutting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 235000012431 wafers Nutrition 0.000 claims abstract description 26
- 238000005520 cutting process Methods 0.000 claims abstract description 17
- 238000004804 winding Methods 0.000 claims description 19
- 238000005498 polishing Methods 0.000 claims description 13
- 238000005304 joining Methods 0.000 claims description 9
- 239000000696 magnetic material Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 13
- 230000007423 decrease Effects 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 4
- 239000006061 abrasive grain Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 241000019011 Tasa Species 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気記録・再生装置に用いられる磁気ヘッドの
製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a magnetic head used in a magnetic recording/reproducing device.
従来の磁気ヘッドの製造方法は第2図に示すように、複
数個のコイル巻線用溝を具備する磁性体ブロックを前記
コイル巻線用溝と平行に切断し、1個のコイル巻線用溝
を具備する単一磁気ヘッドブロックにした後に、前記単
一磁気ヘッドブロックを所望の厚みに切断した後に、切
断時の加工変質層を除去する研摩をするという方法であ
った。As shown in FIG. 2, the conventional method for manufacturing a magnetic head is to cut a magnetic block having a plurality of coil winding grooves parallel to the coil winding grooves, and cut one coil winding groove. The method involved forming a single magnetic head block with grooves, cutting the single magnetic head block to a desired thickness, and then polishing it to remove a layer damaged by cutting.
しかしながら前述の従来技術では、単一磁気ヘッドブロ
ックから磁気ヘッドを切断した後に、磁気ヘッドの研摩
をするため、研摩工程の作業時において、磁気ヘッドが
小さいことによる取扱いによる不良が多く、歩留りを下
げてしまうという課題を有していた。しかも今後の磁気
記録装置の小型化に伴う磁気ヘッドの小型化は一層要求
されるため、磁気ヘッドの取り扱いは益々困難になると
考えられる。However, in the above-mentioned conventional technology, since the magnetic head is polished after cutting the magnetic head from a single magnetic head block, there are many defects due to handling due to the small size of the magnetic head during the polishing process, which reduces the yield. The problem was that the Furthermore, as magnetic recording devices become smaller in the future, there will be a demand for smaller magnetic heads, and it is thought that handling of magnetic heads will become increasingly difficult.
そこで本発明は、このような課題を解決するものであり
その目的とするところは、磁気ヘッド切断工程において
発生する加工変質層を除去するための研摩工程における
被研摩物の取り扱いを容易にし、歩留り低下を防止する
ことにある。SUMMARY OF THE INVENTION The present invention is intended to solve these problems, and its purpose is to facilitate the handling of the polished object in the polishing process for removing the damaged layer generated in the magnetic head cutting process, and to improve the yield. The purpose is to prevent the decline.
本発明の磁気ヘッドの製造方法は、二体の磁性体部材の
少なくとも一方の磁性体部材に複数個のコイル巻線用溝
を設ける工程と、前記二体の磁性体部材を接合部材を用
いて接合し磁性体ブロックを得る工程と、前記磁性体ブ
ロックを複数個の1個のコイル巻線溝を具備する単一磁
気ヘッドブロックに分離する工程と、前記単一磁気ヘッ
ドブロックを所望の厚みに切断し磁気ヘッドを得る工程
と、前記磁気ヘッドの切断面の加工変質層を除去するべ
く研摩工程とを含む磁気ヘッドの製造方法において、前
記磁性体ブロックを形成する工程の後に、所望の厚みを
具備し、複数個のコイル巻線用窓を具備する磁気ヘッド
ウェハーに切断する工程と、前記磁気ヘッドウェハーの
切断面の加工変質層を除去する工程と、前記磁気ヘッド
ウェハーを1個のコイル巻線用窓を具備する磁気ヘッド
に分割する工程とを含むことを特徴とする。The method for manufacturing a magnetic head of the present invention includes the steps of providing a plurality of coil winding grooves in at least one of the two magnetic members, and joining the two magnetic members using a joining member. a step of joining to obtain a magnetic block; a step of separating the magnetic block into a single magnetic head block having a plurality of single coil winding grooves; and a step of forming the single magnetic head block into a desired thickness. In a method for manufacturing a magnetic head, which includes a step of cutting to obtain a magnetic head, and a polishing step to remove a process-affected layer on the cut surface of the magnetic head, after the step of forming the magnetic block, a desired thickness is formed. cutting the magnetic head wafer into magnetic head wafers each having a plurality of coil winding windows; removing a process-affected layer on the cut surface of the magnetic head wafer; and cutting the magnetic head wafer into one coil winding window. The method is characterized in that it includes a step of dividing the magnetic head into magnetic heads each having a line window.
第1図(a)〜(f)は本発明による磁気ヘッドの製造
方法の1実施例の斜視図である。本実施例における磁性
体はM n −Z n多結晶フェライトを用いている。FIGS. 1(a) to 1(f) are perspective views of one embodiment of a method for manufacturing a magnetic head according to the present invention. The magnetic material in this example uses Mn-Zn polycrystalline ferrite.
第1図(a)に示すように複数個のコイル巻線用溝4を
具備した磁性体1と、他の磁性体2とを接合部材5を用
いて接合し磁気ヘッドブロック3を形成する。本実施例
では該接合部材として低融点ガラスを用いており、約7
00℃において接合している。次に第1図(b)に示す
点線6に沿ってダイシングマシーン等により磁気ヘッド
ブロック3を切断し、第1図(c)に示す如く、磁気へ
ラドウェハ−7を得る。この磁気へラドウェハ−7は本
実施例の場合3個のコイル巻線用窓を具備しているため
、後に3個の磁気ヘッドに分離される。As shown in FIG. 1(a), a magnetic body 1 having a plurality of coil winding grooves 4 and another magnetic body 2 are bonded together using a bonding member 5 to form a magnetic head block 3. In this example, low melting point glass is used as the bonding member, and approximately 7
Bonded at 00°C. Next, the magnetic head block 3 is cut by a dicing machine or the like along the dotted line 6 shown in FIG. 1(b) to obtain a magnetic helad wafer 7 as shown in FIG. 1(c). In this embodiment, this magnetic head wafer 7 is provided with three windows for coil winding, and is therefore later separated into three magnetic heads.
次いで第1図(d)に示すように前記磁気へラドウェハ
−7を複数個研摩用治具8の上にワックス等を利用して
貼り付けて切断時の加工変質層を除去するための研摩を
行なう。この研摩はダイヤモンド砥粒により行なわれる
が、砥粒の粒径は3關、1mm、 1/4m+*という
ように三段階に分けられる。この研摩後−旦磁気へラド
ウェハ−7を研摩治具より取り外し、逆サイドの切断面
の加工変質層を除去するために再度研摩治具8に貼り付
け、研摩する。こうして磁気へラドウニ)1−7の両側
の切断面を研摩した後に、第1図(e)に示す点線9に
沿って分離し、第1図(f)に示すような磁気ヘッド1
0を得る。Next, as shown in FIG. 1(d), a plurality of the magnetic helad wafers 7 are pasted onto a polishing jig 8 using wax or the like, and polished to remove the damaged layer during cutting. Let's do it. This polishing is performed using diamond abrasive grains, and the grain size of the abrasive grains is divided into three stages: 3mm, 1mm, and 1/4m+*. After this polishing, the magnetic rad wafer 7 is removed from the polishing jig, and is again attached to the polishing jig 8 and polished in order to remove the damaged layer on the cut surface on the opposite side. After polishing both cut surfaces of the magnetic head (1-7), it is separated along the dotted line 9 shown in FIG. 1(e), and a magnetic head 1 as shown in FIG. 1(f) is prepared.
Get 0.
本実施例に示した第1図(c)の磁気へラドウェハ−7
を第1図(d)の研摩治具8に貼り付ける作業は主とし
てピンセットを用いた手作業で行なわれるが、本実施例
においては磁気へラドウェハ−7が磁気ヘッド10に対
し大きいためロボットによる作業を行なっている。Magnetic held wafer 7 shown in FIG. 1(c) in this example
The work of pasting the wafer to the polishing jig 8 shown in FIG. 1(d) is mainly done manually using tweezers, but in this embodiment, since the magnetic helad wafer 7 is larger than the magnetic head 10, the work is performed by a robot. is being carried out.
本実施例ではコイル巻線用溝4は一方の磁性体部材1に
のみ設けられているが、両方の磁性体部材に設けること
も可能である。In this embodiment, the coil winding groove 4 is provided only in one of the magnetic members 1, but it is also possible to provide it in both magnetic members.
また本実施例ではコイル巻線用溝4は3本であるが3本
より多くし、取り数を多くすることも可能である。Further, in this embodiment, there are three coil winding grooves 4, but it is also possible to have more than three grooves and increase the number of grooves.
さらに本実施例の第1図(b)に示す、磁気ヘッドブロ
ック3からの磁気へラドウェハ−7の切断工程において
は、ダイニングマシーンにより1枚毎に切断したが、マ
ルチバンドソーやマルチワイヤーソー等を用いることも
可能であり、−括で切断することが可能である。Furthermore, in the cutting process of the magnetic helad wafer 7 from the magnetic head block 3 shown in FIG. It is also possible to use it, and it is possible to cut it with a -bracket.
上述したように本発明によれば、二体の磁性体部材の少
なくとも一方の磁性体部材に複数個のコイル巻線用溝を
設ける工程と、前記二体の磁性体部材を接合部材を用い
て接合し磁性体ブロックを得る工程と、前記磁性体ブロ
ックを複数個の1個のコイル巻線溝を具備する単一磁気
ヘッドブロックに分離する工程と、前記単一磁気ヘッド
ブロックを所望の厚みに切断し磁気ヘッドを得る工程と
、前記磁気ヘッドの切断面の加工変質層を除去するべく
研摩工程とを含む磁気ヘッドの製造方法において、前記
磁性体ブロックを形成する工程の後に、所望の厚みを具
備し、複数個のコイル巻線用窓を具備する磁気ヘッドウ
ェハーに切断する工程と、前記磁気ヘッドウェハーの切
断面の加工変質層を除去する工程と、前記磁気ヘッドウ
ェハーを1個のコイル巻線用窓を具備する磁気ヘッドに
分割する工程とを含むことにより、従来のように小さな
磁気ヘッドを取り扱う工程がなくなり、作業時間の短縮
(従来の1/3) 、及び取り扱いミスによる不良の発
生率の低減(従来の1/10)になるという効果を有す
る。As described above, according to the present invention, the steps include providing a plurality of coil winding grooves in at least one of the two magnetic members, and joining the two magnetic members using a joining member. a step of joining to obtain a magnetic block; a step of separating the magnetic block into a single magnetic head block having a plurality of single coil winding grooves; and a step of forming the single magnetic head block into a desired thickness. In a method for manufacturing a magnetic head, which includes a step of cutting to obtain a magnetic head, and a polishing step to remove a process-affected layer on the cut surface of the magnetic head, after the step of forming the magnetic block, a desired thickness is formed. cutting the magnetic head wafer into magnetic head wafers each having a plurality of coil winding windows; removing a process-affected layer on the cut surface of the magnetic head wafer; and cutting the magnetic head wafer into one coil winding window. By including the process of dividing the magnetic head into magnetic heads equipped with wire windows, there is no need to handle small magnetic heads as in the past, reducing work time (1/3 of the conventional time) and causing defects due to handling errors. This has the effect of reducing the rate (1/10 of the conventional rate).
また作業対象物(磁気ヘッドウェハー)が大きいために
機械による保持が可能となり手作業をなくすことが可能
となり、作業性の向上や省力化をもたらすという効果を
有する。Furthermore, since the object to be worked on (magnetic head wafer) is large, it can be held by a machine and manual work can be eliminated, which has the effect of improving workability and saving labor.
このように本発明による効果は多大なものがある。As described above, the present invention has many effects.
第1図(a)〜(C)第1図(e) (f)は、本発明
による一実施例の製造方法を示す斜視図、ただし第1図
(d)のみ平面図。
第2図(a)〜(Iり第2図(f)は従来技術による製
造方法の斜視図。ただし第2図(e)のみ平面図。
1・・・磁性体部材
2・・・磁性体部材
3・・・磁気ヘッドブロック
4・・・コイル巻線用溝
5・・・接合部材
6・・・切断用点線
7・・・磁気ヘッドウェハー
8・・・研摩用治具
9・・・切断用点線
10・・・磁気ヘッド
11・・・単一磁気ヘッドブロック
12・・・研摩前の磁気ヘッド
以上
出願人 セイコーエプソン株式会社
代理人 弁理士 鈴 木 喜三部(他1名)鳥ダ 1f
7<aン
笛1図(b)
タさ 1 しり (子)
I
第2図(b)FIGS. 1(a) to 1(C), FIGS. 1(e) and 1(f) are perspective views showing a manufacturing method of an embodiment according to the present invention, but only FIG. 1(d) is a plan view. FIGS. 2(a) to 2(f) are perspective views of the manufacturing method according to the prior art. However, only FIG. 2(e) is a plan view. 1...Magnetic member 2...Magnetic material Member 3... Magnetic head block 4... Coil winding groove 5... Joining member 6... Dotted line for cutting 7... Magnetic head wafer 8... Polishing jig 9... Cutting Dotted line 10...Magnetic head 11...Single magnetic head block 12...Magnetic head before polishing Applicant Seiko Epson Corporation Representative Patent attorney Kizobe Suzuki (1 other person) Torida 1F
7<a whistle diagram 1 (b) Tasa 1 Shiri (child) I Figure 2 (b)
Claims (1)
個のコイル巻線用溝を設ける工程と、前記二体の磁性体
部材を接合部材を用いて接合し磁性体ブロックを得る工
程と、前記磁性体ブロックを複数個の単一磁気ヘッドブ
ロックに分離する工程と、前記単一磁気ヘッドブロック
を所望の厚みに切断し磁気ヘッドを得る工程と、前記磁
気ヘッドの切断面の加工変質層を除去するべく研摩工程
とを含む磁気ヘッドの製造方法において、前記磁性体ブ
ロックを形成する工程の後に、所望の厚みを具備し、複
数個のコイル巻線用窓を具備する磁気ヘッドウェハーに
切断する工程と、前記磁気ヘッドウェハーの切断面の加
工変質層を除去する工程と、前記磁気ヘッドウェハーを
1個のコイル巻線用窓を具備する磁気ヘッドに分割する
工程とを含むことを特徴とする磁気ヘッドの製造方法。a step of providing a plurality of coil winding grooves in at least one of the two magnetic members; a step of joining the two magnetic members using a joining member to obtain a magnetic block; A step of separating the magnetic material block into a plurality of single magnetic head blocks, a step of cutting the single magnetic head block to a desired thickness to obtain a magnetic head, and a step of removing a process-affected layer on the cut surface of the magnetic head. In a method of manufacturing a magnetic head including a polishing step for removal, after the step of forming the magnetic material block, the magnetic head wafer is cut into magnetic head wafers having a desired thickness and having a plurality of windows for coil winding. a step of removing a process-affected layer on a cut surface of the magnetic head wafer; and a step of dividing the magnetic head wafer into magnetic heads each having one coil winding window. A method of manufacturing a magnetic head.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9245189A JPH02270103A (en) | 1989-04-12 | 1989-04-12 | Manufacture of magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9245189A JPH02270103A (en) | 1989-04-12 | 1989-04-12 | Manufacture of magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02270103A true JPH02270103A (en) | 1990-11-05 |
Family
ID=14054767
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9245189A Pending JPH02270103A (en) | 1989-04-12 | 1989-04-12 | Manufacture of magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02270103A (en) |
-
1989
- 1989-04-12 JP JP9245189A patent/JPH02270103A/en active Pending
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