JPH0226938Y2 - - Google Patents

Info

Publication number
JPH0226938Y2
JPH0226938Y2 JP5978583U JP5978583U JPH0226938Y2 JP H0226938 Y2 JPH0226938 Y2 JP H0226938Y2 JP 5978583 U JP5978583 U JP 5978583U JP 5978583 U JP5978583 U JP 5978583U JP H0226938 Y2 JPH0226938 Y2 JP H0226938Y2
Authority
JP
Japan
Prior art keywords
cassette
chamber
film
intermediate chamber
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5978583U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59165462U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5978583U priority Critical patent/JPS59165462U/ja
Publication of JPS59165462U publication Critical patent/JPS59165462U/ja
Application granted granted Critical
Publication of JPH0226938Y2 publication Critical patent/JPH0226938Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5978583U 1983-04-21 1983-04-21 真空成膜装置 Granted JPS59165462U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5978583U JPS59165462U (ja) 1983-04-21 1983-04-21 真空成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5978583U JPS59165462U (ja) 1983-04-21 1983-04-21 真空成膜装置

Publications (2)

Publication Number Publication Date
JPS59165462U JPS59165462U (ja) 1984-11-06
JPH0226938Y2 true JPH0226938Y2 (US20030204162A1-20031030-M00001.png) 1990-07-20

Family

ID=30190033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5978583U Granted JPS59165462U (ja) 1983-04-21 1983-04-21 真空成膜装置

Country Status (1)

Country Link
JP (1) JPS59165462U (US20030204162A1-20031030-M00001.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0613751B2 (ja) * 1986-03-07 1994-02-23 株式会社日立製作所 連続スパッタ装置

Also Published As

Publication number Publication date
JPS59165462U (ja) 1984-11-06

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