JPH0226934Y2 - - Google Patents

Info

Publication number
JPH0226934Y2
JPH0226934Y2 JP731885U JP731885U JPH0226934Y2 JP H0226934 Y2 JPH0226934 Y2 JP H0226934Y2 JP 731885 U JP731885 U JP 731885U JP 731885 U JP731885 U JP 731885U JP H0226934 Y2 JPH0226934 Y2 JP H0226934Y2
Authority
JP
Japan
Prior art keywords
vacuum chamber
vacuum
leaf spring
introducing
electromagnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP731885U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61125168U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP731885U priority Critical patent/JPH0226934Y2/ja
Publication of JPS61125168U publication Critical patent/JPS61125168U/ja
Application granted granted Critical
Publication of JPH0226934Y2 publication Critical patent/JPH0226934Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP731885U 1985-01-24 1985-01-24 Expired JPH0226934Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP731885U JPH0226934Y2 (enrdf_load_stackoverflow) 1985-01-24 1985-01-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP731885U JPH0226934Y2 (enrdf_load_stackoverflow) 1985-01-24 1985-01-24

Publications (2)

Publication Number Publication Date
JPS61125168U JPS61125168U (enrdf_load_stackoverflow) 1986-08-06
JPH0226934Y2 true JPH0226934Y2 (enrdf_load_stackoverflow) 1990-07-20

Family

ID=30485559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP731885U Expired JPH0226934Y2 (enrdf_load_stackoverflow) 1985-01-24 1985-01-24

Country Status (1)

Country Link
JP (1) JPH0226934Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4668561B2 (ja) * 2004-07-30 2011-04-13 株式会社アルバック 成膜材料供給装置
KR100607048B1 (ko) 2004-09-24 2006-08-01 두산디앤디 주식회사 증착장치용 자동 시편공급기

Also Published As

Publication number Publication date
JPS61125168U (enrdf_load_stackoverflow) 1986-08-06

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