JPS6428364A - Vacuum formation of film - Google Patents

Vacuum formation of film

Info

Publication number
JPS6428364A
JPS6428364A JP18219187A JP18219187A JPS6428364A JP S6428364 A JPS6428364 A JP S6428364A JP 18219187 A JP18219187 A JP 18219187A JP 18219187 A JP18219187 A JP 18219187A JP S6428364 A JPS6428364 A JP S6428364A
Authority
JP
Japan
Prior art keywords
particles
film
vessel
tray
dropped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18219187A
Other languages
Japanese (ja)
Inventor
Etsuro Ikehata
Eiji Moro
Tomoaki Maeda
Akira Onodera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP18219187A priority Critical patent/JPS6428364A/en
Publication of JPS6428364A publication Critical patent/JPS6428364A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To form a thin film having a uniform thickness on a particulate material by placing a tray-shaped vessel carrying the particles to be formed with the film in a vacuum chamber and oscillating the particles to be formed with the film together with the tray-shaped vessel during the period of film formation. CONSTITUTION:A coil 12 is intermittently energized from a power supply 10 to magnetize a magnetic core 14 intermittently. A magnetic material 8 is thereby alternately attracted to a magnetic core 10 to vertically oscillate the tray-shaped vessel 4 contg. the particles 6 to be formed with the film. This oscillation is supported by a spring material 6 and is amplified so that the respective particles 6 are sprung upward to the vessel 4 as shown by arrows (a). The risen particles are again dropped onto the vessel 4. The particles are brought into collision against the other particles 6 on the vessel 4 at this time so that the particles are dropped to the places different from before. The dropped particles 6 are thus pressed to the fresh particle surfaces on the different inside surface of the vessel 4. The film having the uniform thickness is formed over the entire surface of the particles 6 by the repetition of the above-mentioned springing during the vacuum film formation period.
JP18219187A 1987-07-23 1987-07-23 Vacuum formation of film Pending JPS6428364A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18219187A JPS6428364A (en) 1987-07-23 1987-07-23 Vacuum formation of film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18219187A JPS6428364A (en) 1987-07-23 1987-07-23 Vacuum formation of film

Publications (1)

Publication Number Publication Date
JPS6428364A true JPS6428364A (en) 1989-01-30

Family

ID=16113930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18219187A Pending JPS6428364A (en) 1987-07-23 1987-07-23 Vacuum formation of film

Country Status (1)

Country Link
JP (1) JPS6428364A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19746332C2 (en) * 1997-02-19 1999-10-07 Fraunhofer Ges Forschung Device for coating components or other materials
JP2007076491A (en) * 2005-09-14 2007-03-29 Hitachi Ltd Operation device for on-vehicle equipment
JP2007204786A (en) * 2006-01-31 2007-08-16 Bridgestone Corp Particle coating method and particle coating apparatus
JP2007204785A (en) * 2006-01-31 2007-08-16 Bridgestone Corp Particle coating method and particle coating apparatus
CN110699650A (en) * 2019-09-19 2020-01-17 金陵科技学院 Reinforced pill and preparation method thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19746332C2 (en) * 1997-02-19 1999-10-07 Fraunhofer Ges Forschung Device for coating components or other materials
JP2007076491A (en) * 2005-09-14 2007-03-29 Hitachi Ltd Operation device for on-vehicle equipment
JP2007204786A (en) * 2006-01-31 2007-08-16 Bridgestone Corp Particle coating method and particle coating apparatus
JP2007204785A (en) * 2006-01-31 2007-08-16 Bridgestone Corp Particle coating method and particle coating apparatus
CN110699650A (en) * 2019-09-19 2020-01-17 金陵科技学院 Reinforced pill and preparation method thereof
CN110699650B (en) * 2019-09-19 2021-10-29 金陵科技学院 Reinforced pill and preparation method thereof

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